US5877562A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photo alignment structure
Assignee: NXP BV
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Filing: 1997-09-08
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Granted: 1999-03-02
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Expires: 2017-09-08
Abstract
Abstract A photo alignment structure integral with a substrate enables the alignment apparatus to receive a reflected light signature of the surface topography of the alignment structure. As the circuit is constructed, the alignment target may be built in tandem with the process. The alignment structure is constructed so that its surface will retain sufficient topography to enable the alignment apparatus to properly align.
Inventors
- 👤 Harlan Sur
- 👤 Subhas Bothra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:31
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/708; G03F9/7084; H; H10; H10W; H10W46/00; H10W46/501
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
148 words
A semiconductor structure including a photo alignment target built simultaneously with an integrated circuit transistor, the integrated circuit transistor having drain, gate, and source regions and being isolated by at least one field oxide region, the semiconductor structure comprising: a first dielectric layer deposited on the field oxide region; at least one opening defined in the first dielectric layer located above the field oxide having a depth more than the overall thickness of the first dielectric layer but less than the thickness of field oxide region and the first dielectric layer combined; a first metal layer over the opening of the first dielectric layer and conforming to the opening, the first metal layer having a planar top surface; and a second metal layer deposited over the planar surface of the first metal layer and conforming to the opening, to provide a topography change recognizable by an alignment apparatus.
Claim 2
Dependent Claim
148 words
A semiconductor structure including a photo alignment target built simultaneously with an integrated circuit transistor, the integrated circuit transistor having drain, gate, and source regions and being isolated by at least one field oxide region, the semiconductor structure comprising: a first dielectric layer deposited on the field oxide region; at least one opening defined in the first dielectric layer located above the field oxide having a depth more than the overall thickness of the first dielectric layer but less than the thickness of field oxide region and the first dielectric layer combined; a first metal layer over the opening of the first dielectric layer and conforming to the opening, the first metal layer having a planar top surface; and a second metal layer deposited over the planar surface of the first metal layer and conforming to the opening, to provide a topography change recognizable by an alignment apparatus.
Claim 3
Dependent Claim
15 words
A semiconductor structure, as recited in claim 1, wherein the first metal layer is Tungsten.
Claim 4
Dependent Claim
210 words
A semiconductor structure including a photo alignment target built simultaneously with an integrated circuit transistor structure, the integrated circuit transistor structure having drain, gate and source regions and being isolated by at least one field oxide region, the semiconductor structure comprising: a first dielectric layer over the field oxide region and the transistor structure; at least one opening defined in the first dielectric layer located above the field oxide and having a depth more than the overall thickness of the first dielectric layer but less than the thickness of the field oxide layer and the first dielectric layer combined, said at least one opening defining a contact aperture in the transistor structure that has a depth of at least the thickness of the first dielectric layer but less than the depth of the thickness of the field oxide and first dielectric layer combined; a first metal layer deposited over the opening of the first dielectric layer and conforming to the opening, the first metal layer having a planar top surface; and a second metal layer deposited over the planar top surface and conforming to the opening, the second metal layer having a top surface in and adjacent to the opening, thereby providing a topography change recognizable by an alignment apparatus.
Claim 5
Dependent Claim
210 words
A semiconductor structure including a photo alignment target built simultaneously with an integrated circuit transistor structure, the integrated circuit transistor structure having drain, gate and source regions and being isolated by at least one field oxide region, the semiconductor structure comprising: a first dielectric layer over the field oxide region and the transistor structure; at least one opening defined in the first dielectric layer located above the field oxide and having a depth more than the overall thickness of the first dielectric layer but less than the thickness of the field oxide layer and the first dielectric layer combined, said at least one opening defining a contact aperture in the transistor structure that has a depth of at least the thickness of the first dielectric layer but less than the depth of the thickness of the field oxide and first dielectric layer combined; a first metal layer deposited over the opening of the first dielectric layer and conforming to the opening, the first metal layer having a planar top surface; and a second metal layer deposited over the planar top surface and conforming to the opening, the second metal layer having a top surface in and adjacent to the opening, thereby providing a topography change recognizable by an alignment apparatus.
Claim 6
Dependent Claim
39 words
A semiconductor structure as recited in claim 3, wherein the first metal layer is Tungsten, and where in said at least one opening includes at least first and second contact apertures leading respectively to the source and drain regions.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |