US5503962A
Expired / Lapsed
US
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Chemical-mechanical alignment mark and method of fabrication
Assignee: DSS Technology Management Inc
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Filing: 1994-07-15
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Granted: 1996-04-02
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Expires: 2014-07-15
Abstract
Abstract A method for forming an alignment mark during semiconductor device manufacturing. A first alignment mark having a first step height is formed in a semiconductor substrate. An interlayer dielectric is formed over the alignment mark and planarized to a first thickness. During contact/via etch an opening is formed through the first dielectric layer away from the first alignment mark. The opening is then filled with a material until the material in the bottom of the opening has a thickness less than thickness of the planarized dielectric layer.
Inventors
- 👤 Roger F. Caldwell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 10:54
CPC Classifications
H; H10; H10W; H10W46/00; H10W46/301; H10W46/501; H10W46/507; Y; Y10; Y10S; Y10S148/00; Y10S148/102
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
92 words
A method for forming a chemical-mechanical alignment mark comprising the steps of: forming a first alignment mark having a first step height; forming a first layer having a first thickness over said first alignment mark; forming an opening in said first layer, away from said first alignment mark; filling said opening with a second layer until said opening is filled to a second thickness less than said first thickness of said first layer, such difference between said first thickness and said second thickness forming a step height of said chemical-mechanical alignment mark.
Claim 2
Independent Claim
92 words
A method for forming a chemical-mechanical alignment mark comprising the steps of: forming a first alignment mark having a first step height; forming a first layer having a first thickness over said first alignment mark; forming an opening in said first layer, away from said first alignment mark; filling said opening with a second layer until said opening is filled to a second thickness less than said first thickness of said first layer, such difference between said first thickness and said second thickness forming a step height of said chemical-mechanical alignment mark.
Claim 3
Dependent Claim
24 words
The method of claim 1 wherein said second thickness is less than said first thickness by a quarter multiple of said first step height.
Claim 4
Dependent Claim
20 words
The method of claim 1 wherein said second thickness is approximately said first step height less than said first thickness.
Claim 5
Independent Claim
82 words
A method of forming a chemical-mechanical alignment mark comprising the steps of. forming an alignment mark in a substrate, wherein said alignment mark has a first step; forming a dielectric layer over said alignment mark; planarizing said dielectric layer to a first thickness; etching an opening away from said alignment mark through said dielectric layer; and depositing a second thickness of a conductive layer over said dielectric layer and into said opening wherein said second thickness is less than said first thickness.
Claim 6
Independent Claim
82 words
A method of forming a chemical-mechanical alignment mark comprising the steps of. forming an alignment mark in a substrate, wherein said alignment mark has a first step; forming a dielectric layer over said alignment mark; planarizing said dielectric layer to a first thickness; etching an opening away from said alignment mark through said dielectric layer; and depositing a second thickness of a conductive layer over said dielectric layer and into said opening wherein said second thickness is less than said first thickness.
Claim 7
Dependent Claim
24 words
The method of claim 4 wherein said second thickness is less than said first thickness by a quarter multiple of said first step height.
Claim 8
Dependent Claim
20 words
The method of claim 4 wherein said second thickness is approximately said first step height less than said first thickness.
Claim 9
Dependent Claim
27 words
The method of claim 4 further comprising the step off chemically-mechanically polishing said conductive layer until said conductive layer is substantially removed from over said dielectric layer.
Claim 10
Dependent Claim
11 words
The method of claim 7 wherein said conductive layer comprises tungsten.
Claim 11
Dependent Claim
12 words
The method of claim 7 wherein said dielectric layer comprises silicon dioxide.
Claim 12
Dependent Claim
46 words
The method of claim 4 further comprising the step of: after chemically-mechanically polishing said conductive layer, forming a second conductive layer over said dielectric layer and over said first conductive layer in said opening; and patterning said second layer over said dielectric layer into conductive interconnects.
Claim 13
Independent Claim
150 words
A method of forming a chemical-mechanical polishing alignment mark comprising the steps of: forming alignment mark in a silicon substrate, said alignment mark comprising a first step height; forming a layer comprising polysilicon over said substrate, including said alignment mark; forming a dielectric layer over said layer comprising polysilicon; planarizing said dielectric layer to a first thickness above said layer comprising polysilicon; etching an opening through said dielectric layer to said layer comprising polysilicon, wherein said opening is formed away from said alignment mark; conformily depositing a conductive layer comprising tungsten over said dielectric layer and over said layer comprising polysilicon in said opening wherein said conductive layer is deposited to a second thickness, wherein said second thickness is less than said first thickness; and chemically-mechanically polishing said conductive layer so as to form a second alignment mark having a second step height in said conductive layer in said opening.
Claim 14
Independent Claim
150 words
A method of forming a chemical-mechanical polishing alignment mark comprising the steps of: forming alignment mark in a silicon substrate, said alignment mark comprising a first step height; forming a layer comprising polysilicon over said substrate, including said alignment mark; forming a dielectric layer over said layer comprising polysilicon; planarizing said dielectric layer to a first thickness above said layer comprising polysilicon; etching an opening through said dielectric layer to said layer comprising polysilicon, wherein said opening is formed away from said alignment mark; conformily depositing a conductive layer comprising tungsten over said dielectric layer and over said layer comprising polysilicon in said opening wherein said conductive layer is deposited to a second thickness, wherein said second thickness is less than said first thickness; and chemically-mechanically polishing said conductive layer so as to form a second alignment mark having a second step height in said conductive layer in said opening.
Claim 15
Dependent Claim
24 words
The method of claim 11 wherein said second thickness is less than said first thickness by a quarter multiple of said first step height.
Claim 16
Dependent Claim
20 words
The method of claim 11 wherein said second thickness is approximately said first step height less than said first thickness.
Claim 17
Dependent Claim
23 words
The method of claim 11 wherein said conductive layer is chemically-mechanically polished until said conductive layer is substantially removed from said dielectric layer.
Claim 18
Dependent Claim
25 words
The method of claim 11 wherein said conductive layer is chemically-mechanically polished until said second step height is approximately equal to said first step height.
Claim 19
Dependent Claim
42 words
The method of claim 14 further comprising the steps of: forming a second conductive layer over said dielectric layer such that said second alignment mark is replicated in said second conductive layer; patterning said second conductive layer utilizing said second alignment mark.
Claim 20
Dependent Claim
25 words
The method of claim 11 wherein a contact opening is formed over an IC area of said substrate simultaneous with said etching of said opening.
Claim 21
Dependent Claim
24 words
The method of claim 17 wherein said contact opening is simultaneous filled with said opening during said step ,of conformily depositing said conductive layer.
Claim 22
Dependent Claim
28 words
The method of claim 18 wherein a planar contact plug is formed from said filled contact opening simultaneously with said second alignment mark during said chemical-mechanical polishing step.
Claim 23
Independent Claim
56 words
A method of forming an alignment mark, comprising the steps of: forming a first layer; globally planarizing said first layer; etching an opening in said first layer; and filling said opening with a second layer of a different material, so that the height difference between said first layer and said second layer forms the alignment mark.
Claim 24
Independent Claim
56 words
A method of forming an alignment mark, comprising the steps of: forming a first layer; globally planarizing said first layer; etching an opening in said first layer; and filling said opening with a second layer of a different material, so that the height difference between said first layer and said second layer forms the alignment mark.
Claim 25
Dependent Claim
12 words
The method of claim 20, wherein said second layer is conformily deposited.
Claim 26
Dependent Claim
11 words
The method of claim 20, wherein said second layer is opaque.
Claim 27
Dependent Claim
72 words
The method of claim 20 further comprising the step of globally planarizing said second layer. forming an opening in said first layer, away from said first alignment mark; filling said opening with a second layer until said opening is filled to a second thickness less than said first thickness of said first layer, such difference between said first thickness and said second thickness forming a step height of said chemical-mechanical alignment mark.
References Cited (Backward Citations)
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| 7.5 Years (Year 8) | 2003-04-02 | 2003-10-02 | 2004-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-02 | 2007-10-02 | 2008-04-02 | $7700.00 | Window Closed / Lapsed |