Patent US6020458A successfully refreshed from Google Patents.
US6020458A
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Precursors for making low dielectric constant materials with improved thermal stability
Assignee: Canon USA Inc
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Filing: 1997-10-24
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Granted: 2000-02-01
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Expires: 2017-10-24
Abstract
Abstract Fluorinated chemical precursors, methods of manufacture, polymer thin films with low dielectric constants, and integrated circuits comprising primarily of sp 2 C-F and some hyperconjugated sp 3 C-F bonds are disclosed in this invention. Precursors are disclosed for creating fluorinated silanes and siloxanes, and fluorinated hydrocarbon polymers. Thermal transport polymerization (TP), chemical vapor deposition (CVD), plasma enhanced CVD (PECVD), high density PECVD (HPCVD), photon assisted CVD (PACVD), and plasma-photon assisted (PPE) CVD and PPETP of these chemicals provides thin films with low dielectric constants and high thermal stabilities for use in the manufacture of integrated circuits.
Inventors
- 👤 Chung J. Lee
- 👤 Hui Wang
- 👤 Giovanni Antonio Foggiato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:39
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; C; C08; C08G; C08G77/00; C08G77/04; C08G77/22; C08G77/24; C08J; C08J5/00; C08J5/18; C08L; C08L83/00; C09; C09D; C09D4/00; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6338; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6924; H10P14/6336; H10P14/68; H10P14/683; H10P14/687; Y; Y10; Y10T; Y10T428/00; Y10T428/26
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
63 words
A polymer made from a monomeric precursor using at least one method selected from the group consisting of transport polymerization and chemical vapor deposition the precursor selected from the group consisting of a fluorinated silane, a fluorinated siloxane and a fluorocarbon, said precursor comprising a fluorinated moiety with at least one of a sp 2 C-F bond and hyperconjugated sp 3 C-F bond.
Claim 2
Dependent Claim
63 words
A polymer made from a monomeric precursor using at least one method selected from the group consisting of transport polymerization and chemical vapor deposition the precursor selected from the group consisting of a fluorinated silane, a fluorinated siloxane and a fluorocarbon, said precursor comprising a fluorinated moiety with at least one of a sp 2 C-F bond and hyperconjugated sp 3 C-F bond.
Claim 3
Dependent Claim
36 words
The polymer of claim 1 wherein the precursor comprises (C 6 H 5-n F n ) m -SiH 4-m wherein n is 1, 2, 3, 4, or 5, and wherein m is 1, 2, or 3.
Claim 4
Dependent Claim
38 words
The polymer of claim 1 wherein the precursor comprises (C 6 H 5-n F n ) m -Si(OCH 3 ) 4-m wherein n is 1, 2, 3, 4, or 5, and wherein m is 1, 2, or 3.
Claim 5
Dependent Claim
42 words
The polymer of claim 1 wherein the precursor comprises CH 3-n F n -C 6 H 4-p F p --CH 3-m F m wherein n and m are 1, 2 or 3, and wherein p is 0, 1, 2, 3, or 4.
Claim 6
Dependent Claim
16 words
The polymer of claim 1 wherein the precursor comprises C 6 F 5 --CF 3 .
Claim 7
Dependent Claim
16 words
The polymer of claim 1 wherein the precursor comprises C 6 F 5 --CHF 2 .
Claim 8
Dependent Claim
16 words
The polymer of claim 1 wherein the precursor comprises C 6 F 5 --CH 2 F.
Claim 9
Dependent Claim
16 words
The polymer of claim 1 wherein the precursor comprises C 6 F 5 --CH 3 .
Claim 10
Dependent Claim
16 words
The polymer of claim 1 wherein the precursor comprises C 6 F 5 --CF═CF 2 .
Claim 11
Dependent Claim
18 words
The polymer of claim 1 wherein the precursor comprises HCF 2 --C 6 F 4 --CF 2 H.
Claim 12
Dependent Claim
18 words
The polymer of claim 1 wherein the precursor comprises CH 2 F--C 6 F 4 --CH 2 F.
Claim 13
Dependent Claim
18 words
The polymer of claim 1 wherein the precursor comprises CF 3 --C 6 F 4 --CF 3 .
Claim 14
Dependent Claim
18 words
The polymer of claim 1 wherein the precursor comprises CH 3 --C 6 F 4 --CH 3 .
Claim 15
Dependent Claim
22 words
A rigid polymer having a dielectric constant below about 2.7, said polymer made from a monomeric precursor comprising a fluorinated aromatic moiety.
Claim 16
Dependent Claim
22 words
A rigid polymer having a dielectric constant below about 2.7, said polymer made from a monomeric precursor comprising a fluorinated aromatic moiety.
Claim 17
Dependent Claim
15 words
The polymer of claim 14 wherein the fluorinated aromatic moiety comprises a fluorinated phenyl moiety.
Claim 18
Dependent Claim
23 words
A rigid polymer having a dielectric constant below about 2.7, made from a monomeric precursor comprising at least a sp 2 C-F bond.
Claim 19
Dependent Claim
23 words
A rigid polymer having a dielectric constant below about 2.7, made from a monomeric precursor comprising at least a sp 2 C-F bond.
Claim 20
Dependent Claim
16 words
The polymer as in claim 16 comprising sp 2 C-F and hyperconjugated sp 3 C-F bonds.
Claim 21
Dependent Claim
46 words
The polymer of claim 1, wherein precursor comprises (C 6 H 5-n F n )--CH 1-m F m ═CH 2-p F P , wherein n is 1, 2, 3, 4 or 5, wherein m is 0 or 1, and wherein p is 0, 1 or 2.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-01-31 | 2003-08-02 | 2004-02-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-01-31 | 2007-08-02 | 2008-02-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-01-31 | 2011-08-02 | 2012-02-01 | $7700.00 | Window Closed / Lapsed |