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US6002163A Expired / Lapsed US ⏱️ 0.0 years remaining

Electronic device pad relocation, precision placement, and packaging in arrays

Assignee: General Electric Co
•
Filing: 1998-12-21
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Granted: 1999-12-14
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Expires: 2018-12-21
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Abstract

Abstract Top die pads are electrically relocated by forming holes through a semiconductor wafer between device active regions. An electrically insulating layer is formed over all exposed surfaces of the wafer, including within the holes, and openings are made in the insulating layer for access to the top interconnection pads. The wafer and holes are metallized and patterned to form bottom interconnection pads electrically connected to corresponding top interconnection pads by metallization extending within the holes. A dicing saw having a kerf width less than the diameter of the holes is employed to separate the individual devices. For accurate position alignment of repatterned die, an alignment structure, such as projecting pins or an egg crate structure, engages the die, and alignment pads can be patterned on the die.

Inventors

  • 👤 Robert John Wojnarowski

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 12:37
CPC Classifications
H; H10; H10P; H10P52/00; H10P54/00; H10W; H10W20/00; H10W20/01; H10W20/021; H10W20/023; H10W72/00; H10W72/20; H10W90/00; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W72/071; H10W72/072; H10W72/07251; H10W72/251; H10W72/90; H10W72/921; H10W72/922; H10W72/923; H10W72/951; H10W72/952; H10W74/00

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 166 words
An array of closely-spaced devices comprising: a plurality of electrical devices, each electrical device including top interconnection pads on a front major surface, an electrically insulating layer on the front major surface and a rear major surface, and a portion of at least one side surface, with openings in the insulating layer for access to the top interconnection pads, patterned metallization on the front and rear major surfaces and over the portion of at least one side surface forming bottom interconnection pads and alignment pads on the rear major surface, the bottom interconnection pads electrically connected to corresponding top interconnection pads by metallization extending over the electrically insulating layer on the portion of the at least one side surface; and a multi-chip module having a high density interconnect overcoat structure with at least two electrical connection pads positioned for mating with the alignment pads and a rigid alignment structure projecting from the multi-chip module for mechanical engagement with the electrical devices and providing accurate position alignment.
Claim 2
Dependent Claim 166 words
An array of closely-spaced devices comprising: a plurality of electrical devices, each electrical device including top interconnection pads on a front major surface, an electrically insulating layer on the front major surface and a rear major surface, and a portion of at least one side surface, with openings in the insulating layer for access to the top interconnection pads, patterned metallization on the front and rear major surfaces and over the portion of at least one side surface forming bottom interconnection pads and alignment pads on the rear major surface, the bottom interconnection pads electrically connected to corresponding top interconnection pads by metallization extending over the electrically insulating layer on the portion of the at least one side surface; and a multi-chip module having a high density interconnect overcoat structure with at least two electrical connection pads positioned for mating with the alignment pads and a rigid alignment structure projecting from the multi-chip module for mechanical engagement with the electrical devices and providing accurate position alignment.
Claim 3
Dependent Claim 29 words
The array of claim 1, further including solder for attaching the alignment pads of the electrical devices to the at least two electrical connection pads of the multi-chip module.
Claim 4
Dependent Claim 19 words
The array of claim 1, wherein the rigid alignment structure comprises a set of pins or a grid-like structure.
Claim 5
Dependent Claim 161 words
An array of closely-spaced imaging or display devices comprising: a plurality of imaging or display devices, each device including top interconnection pads on a front major surface, an electrically insulating layer on the front major surface and a rear major surface, and a portion of at least one side surface, with openings in the insulating layer for access to the top interconnection pads, patterned metallization on the front and rear major surfaces and over the portion of at least one side surface forming bottom interconnection pads and alignment pads on the rear major surface, the bottom interconnection pads electrically connected to corresponding top interconnection pads by metallization extending over the electrically insulating layer on the portion of the at least one side surface; an optically transparent substrate, the devices being positioned front major surface down on the optically transparent substrate; and a multilayer interconnect structure overlying the rear major surfaces of the devices in electrical connection with the bottom interconnection pads.
Claim 6
Dependent Claim 161 words
An array of closely-spaced imaging or display devices comprising: a plurality of imaging or display devices, each device including top interconnection pads on a front major surface, an electrically insulating layer on the front major surface and a rear major surface, and a portion of at least one side surface, with openings in the insulating layer for access to the top interconnection pads, patterned metallization on the front and rear major surfaces and over the portion of at least one side surface forming bottom interconnection pads and alignment pads on the rear major surface, the bottom interconnection pads electrically connected to corresponding top interconnection pads by metallization extending over the electrically insulating layer on the portion of the at least one side surface; an optically transparent substrate, the devices being positioned front major surface down on the optically transparent substrate; and a multilayer interconnect structure overlying the rear major surfaces of the devices in electrical connection with the bottom interconnection pads.
Claim 7
Dependent Claim 12 words
The array of claim 4, wherein the optically transparent substrate is rigid.
Claim 8
Dependent Claim 15 words
The array of claim 4, wherein the optically transparent substrate comprises a stretched polymer film.
Claim 9
Dependent Claim 17 words
The array of claim 4, which further includes a molding material to fix the devices in place.
Claim 10
Dependent Claim 174 words
An array of closely-spaced devices comprising: a plurality of electrical devices, each electrical device including top interconnection pads on a front major surface, an electrically insulating layer on the front major surface and a rear major surface, and a portion of at least one side surface, with openings in the insulating layer for access to the top interconnection pads, patterned metallization on the front and rear major surfaces and over the portion of at least one side surface forming bottom interconnection pads and alignment pads on the rear major surface, the bottom interconnection pads electrically connected to corresponding top interconnection pads by metallization extending over the electrically insulating layer on the portion of the at least one side surface; a substrate comprising a stretched polymer film, the devices being positioned and attached front major surface down on the substrate; and a multilayer interconnect structure overlying the rear major surfaces of the devices in electrical connection with the bottom interconnection pads, the substrate and the multilayer interconnect structure being curved to establish an array curvature.
Claim 11
Dependent Claim 174 words
An array of closely-spaced devices comprising: a plurality of electrical devices, each electrical device including top interconnection pads on a front major surface, an electrically insulating layer on the front major surface and a rear major surface, and a portion of at least one side surface, with openings in the insulating layer for access to the top interconnection pads, patterned metallization on the front and rear major surfaces and over the portion of at least one side surface forming bottom interconnection pads and alignment pads on the rear major surface, the bottom interconnection pads electrically connected to corresponding top interconnection pads by metallization extending over the electrically insulating layer on the portion of the at least one side surface; a substrate comprising a stretched polymer film, the devices being positioned and attached front major surface down on the substrate; and a multilayer interconnect structure overlying the rear major surfaces of the devices in electrical connection with the bottom interconnection pads, the substrate and the multilayer interconnect structure being curved to establish an array curvature.
Claim 12
Dependent Claim 85 words
A array for a multi-device electronic package including a plurality of devices having major surfaces, with interconnection pads on one of the major surfaces, said array comprising: a substrate having a rigid alignment structure thereon projecting from the substrate for mechanical engagement with the devices, the devices being positioned and attached to the substrate with the interconnection pads facing up, whereby the rigid alignment structure provides accurate position alignment; and a multilayer interconnect structure overlying the devices and interconnecting selected ones of the interconnection pads.
Claim 13
Dependent Claim 85 words
A array for a multi-device electronic package including a plurality of devices having major surfaces, with interconnection pads on one of the major surfaces, said array comprising: a substrate having a rigid alignment structure thereon projecting from the substrate for mechanical engagement with the devices, the devices being positioned and attached to the substrate with the interconnection pads facing up, whereby the rigid alignment structure provides accurate position alignment; and a multilayer interconnect structure overlying the devices and interconnecting selected ones of the interconnection pads.
Claim 14
Dependent Claim 20 words
The array of claim 9, wherein the rigid alignment structure formed is a set of pins or a grid-like structure.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-12-13 2003-06-14 2003-12-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-12-13 2007-06-14 2007-12-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-12-13 2011-06-14 2011-12-14 $7700.00 Window Closed / Lapsed

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