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US5237434A Expired / Lapsed US ⏱️ 0.0 years remaining

Microelectronic module having optical and electrical interconnects

Assignee: University of North Carolina at Chapel Hill
•
Filing: 1991-11-05
•
Granted: 1993-08-17
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Expires: 2011-11-05
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Abstract

Abstract A multichip module having high density optical and electrical interconnections between integrated circuit chips. An optically transparent substrate is positioned overlying an array of integrated circuit chips mounted on a mounting substrate. The mounting substrate may include a heat sink to remove excess heat from the integrated circuit chips. The multichip module includes integrated circuit chips having optical detectors and optical transmitters to establish optical interconnections therebetween. A hologram is positioned in the optical path between the optical transmitters and the optical detectors. A planar mirror is preferably positioned opposite the hologram to direct the optical beams. The optically transparent substrate also includes an array of electrical contact pads to establish electrical connections with corresponding electrical contact pads on the underlying integrated circuit chips. A pattern of electrical interconnection lines is provided on at least one of the mounting substrate or the transparent substrate to electrically interconnect predetermined ones of the integrated circuit chips.

Inventors

  • 👤 Michael R. Feldman
  • 👤 Iwona Turlik
  • 👤 Gretchen M. Adema

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 08:03
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/43; H; H10; H10W; H10W72/00; H10W90/00; H10W90/20; H10W90/293; G02B6/4201; G02B6/4219; G02B6/4228; G02B6/4232; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W72/851; H10W72/874; H10W72/877; H10W90/701; H10W90/721; H10W90/724

Claims Analysis

Total Claims: 32
Claim 1
Independent Claim 283 words
A microelectronic module comprising: a first substrate; an array integrated circuit chips each having a first surface adjacent a first substrate, each of said integrated circuit chips including an array of electrical contact pads on a second surface thereof opposite said first surface, a first integrated circuit chip further including an optical transmitter generating an optical beam, and a second integrated circuit chip further including an optical detector for receiving the optical beam from said optical transmitter; a second substrate overlying the second surfaces of said first and second integrated circuit chips, said second substrate including means for permitting passage therethrough of the optical beam from said optical transmitter to said optical detector; a hologram positioned in the path of the optical beam from said optical transmitter to said optical detector for directing the optical beam therebetween to optically interconnect said first and second integrated circuit chips; an array of electrical contact pads on said second substrate corresponding to the array of electrical contact pads on a respective underlying integrated circuit chip; a pattern of electrical interconnection lines on at least one of said first substrate and said second substrate to electrically interconnect predetermined ones of said array of integrated circuit chips; and a solder bump between each electrical contact pad on said second substrate and the respective electrical contact pad on the underlying integrated circuit chip, to establish an electrical connection between the electrical contact pad on said second substrate and the respective electrical contact pad on the underlying integrated circuit chip and to facilitate alignment of said first integrated circuit chip including an optical transmitter and said second integrated circuit chip including an optical detector, with respect to said second substrate.
Claim 2
Dependent Claim 283 words
A microelectronic module comprising: a first substrate; an array integrated circuit chips each having a first surface adjacent a first substrate, each of said integrated circuit chips including an array of electrical contact pads on a second surface thereof opposite said first surface, a first integrated circuit chip further including an optical transmitter generating an optical beam, and a second integrated circuit chip further including an optical detector for receiving the optical beam from said optical transmitter; a second substrate overlying the second surfaces of said first and second integrated circuit chips, said second substrate including means for permitting passage therethrough of the optical beam from said optical transmitter to said optical detector; a hologram positioned in the path of the optical beam from said optical transmitter to said optical detector for directing the optical beam therebetween to optically interconnect said first and second integrated circuit chips; an array of electrical contact pads on said second substrate corresponding to the array of electrical contact pads on a respective underlying integrated circuit chip; a pattern of electrical interconnection lines on at least one of said first substrate and said second substrate to electrically interconnect predetermined ones of said array of integrated circuit chips; and a solder bump between each electrical contact pad on said second substrate and the respective electrical contact pad on the underlying integrated circuit chip, to establish an electrical connection between the electrical contact pad on said second substrate and the respective electrical contact pad on the underlying integrated circuit chip and to facilitate alignment of said first integrated circuit chip including an optical transmitter and said second integrated circuit chip including an optical detector, with respect to said second substrate.
Claim 3
Dependent Claim 34 words
The microelectronic module according to claim 1 further comprising a mirror positioned in spaced-apart relation from said hologram and in the path of the optical beam from said optical transmitter to said optical detector.
Claim 4
Dependent Claim 21 words
The microelectronic module according to claim 2 further comprising means for supporting said hologram in spaced-apart relation from said second substrate.
Claim 5
Dependent Claim 16 words
The microelectronic module according to claim 2 wherein said hologram is positioned on said second substrate.
Claim 6
Dependent Claim 25 words
The microelectronic module according to claim 1 wherein said first substrate includes a heat sink for removing heat from said array of integrated circuit chips.
Claim 7
Dependent Claim 35 words
The microelectronic module according to claim 1 wherein said means for permitting passage therethrough of the optical beam from said optical transmitter to said optical detector comprises an optically transparent material forming said second substrate.
Claim 8
Dependent Claim 15 words
The microelectronic module according to claim 1 wherein said optical transmitter comprises an edge-emitting laser.
Claim 9
Dependent Claim 29 words
The microelectronic module according to claim 7 further comprising a mirror positioned opposite said edge-emitting laser for directing the optical beam from said edge-emitting laser through said second substrate.
Claim 10
Dependent Claim 226 words
A microelectronic module comprising: a substrate comprising an optically transparent material; an array of integrated circuit chips each having a predetermined surface positioned on said substrate, each of said integrated circuit chips including an array of electrical contact pads on the predetermined surface thereof, a first integrated circuit chip further including an optical transmitter for generating an optical beam, a second integrated circuit chip further including an optical detector for receiving the optical beam from said optical transmitter; a hologram on said substrate for directing the optical beam from said optical transmitter to said optical detector to optically interconnect said first and second integrated circuit chips; an array of electrical contact pads on said substrate corresponding to the array of electrical contact pads on respective integrated circuit chips; a pattern of electrical interconnection lines on said substrate for electrically interconnecting predetermined ones of said array of integrated circuit chips; and a solder bump between each electrical contact pad on said substrate and the respective electrical contact pad on the underlying integrated circuit chip, to establish an electrical connection between the electrical contact pad on the substrate and the electrical contact pad on the underlying integrated circuit chip and to facilitate alignment of said first integrated circuit chip including an optical transmitter and said second integrated circuit chip including an optical detector, with respect to said substrate.
Claim 11
Dependent Claim 226 words
A microelectronic module comprising: a substrate comprising an optically transparent material; an array of integrated circuit chips each having a predetermined surface positioned on said substrate, each of said integrated circuit chips including an array of electrical contact pads on the predetermined surface thereof, a first integrated circuit chip further including an optical transmitter for generating an optical beam, a second integrated circuit chip further including an optical detector for receiving the optical beam from said optical transmitter; a hologram on said substrate for directing the optical beam from said optical transmitter to said optical detector to optically interconnect said first and second integrated circuit chips; an array of electrical contact pads on said substrate corresponding to the array of electrical contact pads on respective integrated circuit chips; a pattern of electrical interconnection lines on said substrate for electrically interconnecting predetermined ones of said array of integrated circuit chips; and a solder bump between each electrical contact pad on said substrate and the respective electrical contact pad on the underlying integrated circuit chip, to establish an electrical connection between the electrical contact pad on the substrate and the electrical contact pad on the underlying integrated circuit chip and to facilitate alignment of said first integrated circuit chip including an optical transmitter and said second integrated circuit chip including an optical detector, with respect to said substrate.
Claim 12
Dependent Claim 28 words
The microelectronic module according to claim 9 further comprising a heat sink positioned on said array of integrated circuit chips on a surface thereof opposite said predetermined surface.
Claim 13
Dependent Claim 33 words
The microelectronic module according to claim 9 further comprising a mirror positioned in spaced-apart relation from said hologram in the path of the optical beam from said optical transmitter to said optical detector.
Claim 14
Dependent Claim 15 words
The microelectronic module according to claim 9 wherein said optical transmitter comprises an edge-emitting laser.
Claim 15
Dependent Claim 28 words
The microelectronic module according to claim 12 further comprising a mirror positioned opposite said edge-emitting laser for directing the optical beam from said edge-emitting laser through said substrate.
Claim 16
Dependent Claim 294 words
A microelectronic module comprising; a first substrate; an array of integrated circuit chips each having a first surface positioned on said first substrate, each of said integrated circuit chips including an array of electrical contact pads on a second surface thereof opposite said first surface, a first integrated circuit chip further including an optical transmitter for generating an optical beam, a second integrated circuit chip further including an optical detector for receiving the optical beam from said optical transmitter; a second substrate and a third substrate overlying respective second surfaces of said first and second integrated circuit chips, said second and third substrates comprising optically transparent material for permitting passage therethrough of the optical beam from said optical transmitter to said optical detector; a hologram positioned in the path of the optical beam from said optical transmitter to said optical detector for directing the optical beam therebetween to optically interconnect said first and second integrated circuit chips; an array of electrical contact pads on each of said second and third substrates corresponding to the array of electrical connections pads on the respective underlying integrated circuit chip; and a pattern of electrical interconnection lines on said first substrate for electrically interconnecting predetermined ones of said array of integrated circuit chips and a solder bump between each electrical contact pad on said second and third substrates and the respective electrical contact pad on the underlying integrated circuit chips, to establish an electrical connection between the electrical contact pad on the integrated circuit chip and the electrical contact pad on said second or third substrates and to facilitate alignment of said first integrated circuit chip including an optical transmitter and said second integrated circuit chip including an optical detector, with respect to said second and third substrates.
Claim 17
Dependent Claim 294 words
A microelectronic module comprising; a first substrate; an array of integrated circuit chips each having a first surface positioned on said first substrate, each of said integrated circuit chips including an array of electrical contact pads on a second surface thereof opposite said first surface, a first integrated circuit chip further including an optical transmitter for generating an optical beam, a second integrated circuit chip further including an optical detector for receiving the optical beam from said optical transmitter; a second substrate and a third substrate overlying respective second surfaces of said first and second integrated circuit chips, said second and third substrates comprising optically transparent material for permitting passage therethrough of the optical beam from said optical transmitter to said optical detector; a hologram positioned in the path of the optical beam from said optical transmitter to said optical detector for directing the optical beam therebetween to optically interconnect said first and second integrated circuit chips; an array of electrical contact pads on each of said second and third substrates corresponding to the array of electrical connections pads on the respective underlying integrated circuit chip; and a pattern of electrical interconnection lines on said first substrate for electrically interconnecting predetermined ones of said array of integrated circuit chips and a solder bump between each electrical contact pad on said second and third substrates and the respective electrical contact pad on the underlying integrated circuit chips, to establish an electrical connection between the electrical contact pad on the integrated circuit chip and the electrical contact pad on said second or third substrates and to facilitate alignment of said first integrated circuit chip including an optical transmitter and said second integrated circuit chip including an optical detector, with respect to said second and third substrates.
Claim 18
Dependent Claim 34 words
The microelectronic module according to claim 14 further comprising a mirror positioned in spaced-apart relation from said hologram and in the path of the optical beam from said optical transmitter to said optical detector.
Claim 19
Dependent Claim 23 words
The microelectronic module according to claim 14 further comprising means for supporting said hologram in spaced-apart relation from said second and third substrates.
Claim 20
Dependent Claim 22 words
The microelectronic module according to claim 14 wherein said hologram is positioned on at least one of said second and third substrates.
Claim 21
Dependent Claim 25 words
The microelectronic module according to claim 14 wherein said first substrate includes a heat sink for removing heat from said array of integrated circuit chips.
Claim 22
Dependent Claim 15 words
The microelectronic module according to claim 14 wherein said optical transmitter comprises an edge-emitting laser.
Claim 23
Dependent Claim 29 words
The microelectronic module according to claim 19 further comprising a mirror positioned opposite said edge-emitting laser for directing the optical beam from said edge-emitting laser through said second substrate.
Claim 24
Dependent Claim 226 words
An interconnect chip for facilitating optical and electrical interconnections to an integrated circuit chip having a first surface thereof adjacent a mounting substrate, the integrated circuit chip including an array of electrical contact pads on a second surface thereof opposite the first surface, the integrated circuit chip further including at least one of an optical detector and an optical transmitter, the mounting substrate having an array of electrical contact pads thereon adjacent the periphery of the integrated circuit chip, said interconnect chip comprising: an optically transparent substrate for permitting an optical beam to pass therethrough to establish an optical interconnection with the integrated circuit chip, said optically transparent substrate adapted to overlie the integrated circuit chip and a portion of the mounting substrate; and an array of electrical contact pads on said optically transparent substrate adapted for electrically contacting respective underlying electrical contact pads of the integrated circuit chip and electrical contact pads of the mounting substrate to establish electrical interconnections with the integrated circuit chip and a solder bump on each electrical contact pad of said array of electrical contact pads to establish an electrical connection with the corresponding electrical contact pad of the underlying integrated circuit chip and to facilitate alignment of said interconnect chip with respect to the integrated circuit chip, including at least one of an optical detector and an optical transmitter.
Claim 25
Dependent Claim 226 words
An interconnect chip for facilitating optical and electrical interconnections to an integrated circuit chip having a first surface thereof adjacent a mounting substrate, the integrated circuit chip including an array of electrical contact pads on a second surface thereof opposite the first surface, the integrated circuit chip further including at least one of an optical detector and an optical transmitter, the mounting substrate having an array of electrical contact pads thereon adjacent the periphery of the integrated circuit chip, said interconnect chip comprising: an optically transparent substrate for permitting an optical beam to pass therethrough to establish an optical interconnection with the integrated circuit chip, said optically transparent substrate adapted to overlie the integrated circuit chip and a portion of the mounting substrate; and an array of electrical contact pads on said optically transparent substrate adapted for electrically contacting respective underlying electrical contact pads of the integrated circuit chip and electrical contact pads of the mounting substrate to establish electrical interconnections with the integrated circuit chip and a solder bump on each electrical contact pad of said array of electrical contact pads to establish an electrical connection with the corresponding electrical contact pad of the underlying integrated circuit chip and to facilitate alignment of said interconnect chip with respect to the integrated circuit chip, including at least one of an optical detector and an optical transmitter.
Claim 26
Dependent Claim 31 words
The interconnect chip according to claim 21 further comprising a hologram on said optically transparent substrate for directing an optical beam to establish an optical interconnection with the integrated circuit help.
Claim 27
Dependent Claim 20 words
The interconnect chip according to claim 21 further comprising a pattern of electrical interconnection lines on said optically transparent substrate.
Claim 28
Dependent Claim 37 words
The interconnect chip according to claim 23 wherein said pattern of electrical interconnection lines on said optically transparent substrate has a sufficiently low density of lines to permit a predetermined amount of optical power to pass therethrough.
Claim 29
Dependent Claim 179 words
An interconnect chip for facilitating optical and electrical interconnections to a integrated circuit chip having an array of electrical contact pads on a surface thereof and at least one of an optical detector and an optical transmitter, said interconnect chip comprising: a substrate adapted to be positioned overlying the integrated circuit chip, said substrate comprising optically transparent material for permitting an optical beam to pass therethrough to establish an optical interconnection with the integrated circuit chip; an array of electrical contact pads on said substrate adapted for electrically contacting respective electrical contact pads of the underlying integrated circuit chip; a hologram on said substrate for directing an optical beam to establish an optical interconnection to the integrated circuit chip; and a solder bump on each electrical contact pad of said array of electrical contact pads to establish an electrical connection with the corresponding electrical contact pad of the underlying integrated circuit chip and to facilitate alignment of said interconnect chip with respect to the integrated circuit chip, including at least one of an optical detector and an optical transmitter.
Claim 30
Dependent Claim 179 words
An interconnect chip for facilitating optical and electrical interconnections to a integrated circuit chip having an array of electrical contact pads on a surface thereof and at least one of an optical detector and an optical transmitter, said interconnect chip comprising: a substrate adapted to be positioned overlying the integrated circuit chip, said substrate comprising optically transparent material for permitting an optical beam to pass therethrough to establish an optical interconnection with the integrated circuit chip; an array of electrical contact pads on said substrate adapted for electrically contacting respective electrical contact pads of the underlying integrated circuit chip; a hologram on said substrate for directing an optical beam to establish an optical interconnection to the integrated circuit chip; and a solder bump on each electrical contact pad of said array of electrical contact pads to establish an electrical connection with the corresponding electrical contact pad of the underlying integrated circuit chip and to facilitate alignment of said interconnect chip with respect to the integrated circuit chip, including at least one of an optical detector and an optical transmitter.
Claim 31
Dependent Claim 20 words
The interconnect chip according to claim 25 further comprising a pattern of electrical interconnection lines on said optically transparent substrate.
Claim 32
Dependent Claim 37 words
The interconnect chip according to claim 26 wherein said pattern of electrical interconnection lines on said optically transparent substrate has a sufficiently low density of lines to permit a predetermined amount of optical power to pass therethrough.

References Cited (Backward Citations)

US4774630A Cited
US4711997A Cited
US4762382A Cited
US4912545A Cited
US4838630A Cited
EP0420029A1 Cited
US5061027A Cited
US5101460A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-08-16 1997-02-15 1997-08-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-08-16 2001-02-15 2001-08-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-08-16 2005-02-15 2005-08-17 $7700.00 Window Closed / Lapsed

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