US5366906A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer level integration and testing
Assignee: Lockheed Martin Corp
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Filing: 1992-10-16
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Granted: 1994-11-22
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Expires: 2012-10-16
Abstract
Abstract In fabricating wafer scale integrated interconnects, a temporary or permanent dielectric layer and a pattern of electrical conductors are used to provide wafer scale integration or testing and burn-in. A resist can be used to cover the areas of IC pads on the wafer while the remainder of the pattern of electrical conductors is removed to provide for repair of the wafer scale integration structure. The pattern of electrical conductors may be configured so that the conductor lengths between at least some sub-circuits on a plurality of wafers are substantially electrically equal for signal propagation purposes; an additional wafer may be laminated to the wafer using an adhesive; controlled curfs may be cut into the wafer; and the wafer may be interconnected to an interface ring.
Inventors
- 👤 Robert J. Wojnarowski
- 👤 Constantine A. Neugebauer
- 👤 Wolfgang Daum
- 👤 Bernard Gorowitz
- 👤 Eric J. Wildi
- 👤 Michael Gdula
- 👤 Stanton E. Weaver, Jr.
- 👤 Anthony A. Immorlica, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:09
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/23; H10P74/232; H10P74/27; H10P74/273; H10W; H10W70/00; H10W70/099; H10W70/60; H10W70/611; H10W70/614; G; G01; G01R; G01R31/00; G01R31/28; G01R31/317; G01R31/3181; G01R31/3185; G01R31/318505; G01R31/318533; H10W72/00; H10W72/90; H10W72/941; H10W72/9413; H10W90/00; H10W90/10
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
143 words
A method for testing enhanced wafer level integration interconnects, comprising the steps of: applying a dielectric layer to a wafer containing a plurality of chips, each chip having thereon input pads and output pads: providing a plurality of vias in the dielectric layer, each of the vias being aligned with at least one predetermined different one of the chip input/output pads: providing a testing pattern of electrical conductors and overlay test pads on the dielectric layer: contacting each of a selected configuration of the chip input/output pads through an associated one of the overlay test pads, to form a wafer level conductive interconnect test pattern; and routing a plurality of boundary scan signals and a power signal for each of the chips to a boundary of the wafer; and connecting the input pads and output pads of each of the chips in pairs.
Claim 2
Independent Claim
143 words
A method for testing enhanced wafer level integration interconnects, comprising the steps of: applying a dielectric layer to a wafer containing a plurality of chips, each chip having thereon input pads and output pads: providing a plurality of vias in the dielectric layer, each of the vias being aligned with at least one predetermined different one of the chip input/output pads: providing a testing pattern of electrical conductors and overlay test pads on the dielectric layer: contacting each of a selected configuration of the chip input/output pads through an associated one of the overlay test pads, to form a wafer level conductive interconnect test pattern; and routing a plurality of boundary scan signals and a power signal for each of the chips to a boundary of the wafer; and connecting the input pads and output pads of each of the chips in pairs.
Claim 3
Dependent Claim
31 words
The method of claim 1, wherein the contacting is performed by a device selected from the group consisting of flex probes, probe cards, spring contact assemblies, surface arrays, and elastomeric contacts.
Claim 4
Dependent Claim
29 words
The method of claim 1, in which the step of obtaining a test pattern comprises testing at least one chip through a switching matrix connected to a single tester.
Claim 5
Dependent Claim
21 words
The method of claim 1, in which the step of obtaining a test pattern comprises testing several chips using multiple testers.
Claim 6
Independent Claim
149 words
A method for testing enhanced wafer level integration interconnects, comprising the steps of: applying a dielectric layer to a wafer containing a plurality of chips, each chip having thereon input pads and output pads: providing a plurality of vias in the dielectric layer, each of the vias being aligned with at least one predetermined different one of the input/output chip pads; providing a testing pattern of electrical conductors and overlay test pads on the dielectric layer: contacting each of a selected configuration of the input/output chip pads through an associated one of the overlay test pads, to form a wafer level conductive interconnect test pattern; and routing a plurality of boundary scan signals of each of the chips to a boundary of the wafer; connecting a plurality of power signals to a common power bus; and connecting the remaining input pads and output pads of the chips in pairs.
Claim 7
Independent Claim
149 words
A method for testing enhanced wafer level integration interconnects, comprising the steps of: applying a dielectric layer to a wafer containing a plurality of chips, each chip having thereon input pads and output pads: providing a plurality of vias in the dielectric layer, each of the vias being aligned with at least one predetermined different one of the input/output chip pads; providing a testing pattern of electrical conductors and overlay test pads on the dielectric layer: contacting each of a selected configuration of the input/output chip pads through an associated one of the overlay test pads, to form a wafer level conductive interconnect test pattern; and routing a plurality of boundary scan signals of each of the chips to a boundary of the wafer; connecting a plurality of power signals to a common power bus; and connecting the remaining input pads and output pads of the chips in pairs.
Claim 8
Dependent Claim
28 words
The method of claim 5, including the step of connecting said plurality of chips by chaining at least one individual cell on each of said plurality of chips.
Claim 9
Dependent Claim
31 words
The method of claim 5, wherein the contacting is performed by a device selected from the group consisting of flex probes, probe cards, spring contact assemblies, surface arrays, and elastomeric contacts.
Claim 10
Dependent Claim
29 words
The method of claim 5, in which the step of obtaining a test pattern comprises testing at least one chip through a switching matrix connected to a single tester.
Claim 11
Dependent Claim
21 words
The method of claim 5, in which the step of obtaining a test pattern comprises testing several chips using multiple testers.
Claim 12
Independent Claim
141 words
A method for testing enhanced wafer level integration interconnects, comprising the steps of; applying a dielectric layer to a wafer containing a plurality of chips, each chip having thereon input pads and output pads; providing a plurality of vias in the dielectric layer, each of the vias being aligned with at least one predetermined different one of the input/output chip pads: providing a testing pattern of electrical conductors and overlay test pads on the dielectric layer: contacting each of a selected configuration of the input/output chip pads through an associated one of the overlay test pads, to form a wafer level conductive interconnect test pattern; and biasing the input pads and the output pads of the chips from a power bus and a ground bus through components selected from the group consisting of resistors and fuses, and performing a static burn-in.
Claim 13
Independent Claim
141 words
A method for testing enhanced wafer level integration interconnects, comprising the steps of; applying a dielectric layer to a wafer containing a plurality of chips, each chip having thereon input pads and output pads; providing a plurality of vias in the dielectric layer, each of the vias being aligned with at least one predetermined different one of the input/output chip pads: providing a testing pattern of electrical conductors and overlay test pads on the dielectric layer: contacting each of a selected configuration of the input/output chip pads through an associated one of the overlay test pads, to form a wafer level conductive interconnect test pattern; and biasing the input pads and the output pads of the chips from a power bus and a ground bus through components selected from the group consisting of resistors and fuses, and performing a static burn-in.
Claim 14
Dependent Claim
31 words
The method of claim 10, wherein the contacting is performed by a device selected from the group consisting of flex probes, probe cards, spring contact assemblies, surface arrays, and elastomeric contacts.
Claim 15
Dependent Claim
29 words
The method of claim 10, in which the step of obtaining a test pattern comprises testing at least one chip through a switching matrix connected to a single tester.
Claim 16
Dependent Claim
21 words
The method of claim 10, in which the step of obtaining a test pattern comprises testing several chips using multiple testers.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-11-21 | 1998-05-23 | 1998-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-21 | 2002-05-23 | 2002-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-21 | 2006-05-23 | 2006-11-22 | $7700.00 | Window Closed / Lapsed |