US4894115A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser beam scanning method for forming via holes in polymer materials
Assignee: Lockheed Martin Corp
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Filing: 1989-02-14
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Granted: 1990-01-16
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Expires: 2009-02-14
Abstract
Abstract The surface of a polymer dielectric layer is scanned repeatedly with a high energy continuous wave laser in a pattern to create via holes of desired size, shape and depth. This is followed by a short plasma etch. The via holes are produced at commercial production rates under direct computer control without use of masks and without damage to conductor material underlying the dielectric layer. A two-step technique usable to form a large hole to a partial depth in the dielectric layer and several smaller diameter holes within the large hole through the remainder of the dielectric layer depth allows formation of a large number of holes in a given area of a thick dielectric layer.
Inventors
- 👤 Charles W. Eichelberger
- 👤 Robert J. Wojnarowski
- 👤 II Kenneth B. Welles
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:11
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/0011; H05K3/0017; H05K3/0026; H05K3/0032; H05K3/0035; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/082; H05K2201/00; H05K2201/09; H05K2201/09818; H05K2201/09827; H05K2203/00; H05K2203/01; H05K2203/0147; H05K2203/0165; H05K2203/02; H05K2203/0207; H05K2203/09; H05K2203/095; H05K3/0008; H05K3/0041; H05K3/0055; H10W70/00; H10W70/099
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
113 words
A method for producing via holes in a polymer dielectric layer comprising the steps of: scanning a predetermined area of the polymer dielectric layer with a laser beam in a predetermined pattern at a sufficient level of energy and speed to heat a small volume of the polymer dielectric to a point of vaporization during a predetermined laser beam dwell time, said volume being the product of the laser beam maximum energy spot area and the depth of a surface layer portion of the polymer dielectric layer; and repeating said scanning of said area for a sufficient number of times to etch a desired amount of polymer dielectric layer from said predetermined area.
Claim 2
Independent Claim
113 words
A method for producing via holes in a polymer dielectric layer comprising the steps of: scanning a predetermined area of the polymer dielectric layer with a laser beam in a predetermined pattern at a sufficient level of energy and speed to heat a small volume of the polymer dielectric to a point of vaporization during a predetermined laser beam dwell time, said volume being the product of the laser beam maximum energy spot area and the depth of a surface layer portion of the polymer dielectric layer; and repeating said scanning of said area for a sufficient number of times to etch a desired amount of polymer dielectric layer from said predetermined area.
Claim 3
Dependent Claim
53 words
The method of claim 1 wherein said polymer dielectric layer is situated on a precision positioning table and said scanning of said predetermined area is achieved by deflecting said beam along the X axis of a set of Cartesian coordinates and moving said table along the Y axis of said set of coordinates.
Claim 4
Dependent Claim
74 words
The method of claim 1 further comprising the steps of: repositioning said polymer dielectric layer relative to said laser beam so that said beam scans an additional predetermined area of said polymer dielectric layer in said predetermined pattern and at said level of energy and speed; and repeating said scanning of said additional predetermined area for a sufficient number of times to etch a desired amount of polymer dielectric from said additional predetermined area.
Claim 5
Dependent Claim
36 words
The method of claim 3 wherein the sufficient number of scans of said predetermined area by said laser beam is equal to the sufficient number of scans of said additional predetermined area by said laser beam.
Claim 6
Dependent Claim
27 words
The method of claim 3 in which said polymer dielectric layer is situated on a precision positioning table and said repositioning is accomplished by moving said table.
Claim 7
Dependent Claim
27 words
The method of claim 4 in which said polymer dielectric layer is situated on a precision positioning table and said repositioning is accomplished by moving said table.
Claim 8
Dependent Claim
18 words
The method of claim 1 wherein said laser beam is produced by a high energy continuous wave laser.
Claim 9
Dependent Claim
29 words
The method of claim 7 wherein said laser beam is modulated by a laser beam modulator and is deflected by a laser beam deflector during each predetermined scan pattern.
Claim 10
Dependent Claim
13 words
The method of claim 7 wherein said laser comprises an argon ion laser.
Claim 11
Dependent Claim
17 words
The method of claim 7 wherein said laser beam is produced at a wavelength of 351 nanometers.
Claim 12
Dependent Claim
45 words
The method of claim 1 further comprising the step of plasma etching the polymer dielectric layer to remove any residual particles from an underlying metal conductor pad and to clean and roughen the surface of the polymer dielectric layer to enhance adhesion of subsequent metallization.
Claim 13
Dependent Claim
30 words
The method of claim 11 in which said plasma etching is performed in an atmosphere comprising approximately 80% oxygen and 20% CF 4 and at a temperature of 110° C.
Claim 14
Dependent Claim
32 words
The method of claim 1 further comprising the step of focussing said laser beam to a spot of approximately 3 microns in diameter on said predetermined area of the polymer dielectric layer.
Claim 15
Dependent Claim
89 words
The method of claim 1 wherein said scanning is accomplished by moving the focal point of said laser beam from one edge of the predetermined pattern across the surface of said polymer dielectric layer to the opposite edge of said predetermined pattern in a series of parallel scan lines all in the same direction, said focal point falling upon said one edge of the predetermined pattern at a predetermined distance from the immediately-preceding scan line in a direction perpendicular to the scan lines after each line has been scanned.
Claim 16
Dependent Claim
78 words
The method of claim 1 wherein said scanning is accomplished by moving the focal point of said laser beam from one edge of the predetermined pattern across the surface of said polymer dielectric layer to the opposite edge of said predetermined pattern in a series of parallel scan lines in alternating directions, said focal point being moved a predetermined distance from the immediately-preceding scan line along either edge of said predetermined pattern after each line has been scanned.
Claim 17
Independent Claim
204 words
A method for producing via holes in a polymer dielectric layer comprising the steps of: scanning a first predetermined area of the polymer dielectric layer with alaser beam in a first predetermined pattern at a sufficient level of energy and speed to heat a small volume of the polymer dielectric to a point of vaporization during a predetermined laser beam dwell duration, said volume being the product of the laser beam maximum energy spot size and the depth of a surface layer portion of the polymer dielectric layer; repeating said scanning of said first predetermined pattern for a sufficient number of times to etch a first desired amount of polymer dielectric from said first predetermined area; scanning a second predetermined area of the polymer dielectric layer with said laser beam in a second predetermined pattern at said level of energy and speed to heat another said small volume of the polymer dielectric to a point of vaporization during said predetermined laser beam dwell duration, said second predetermined area being entirely within said first predetermined area; and repeating said scanning of said second predetermined pattern for a sufficient number of times to etch a second desired amount of polymer dielectric from said second predetermined area.
Claim 18
Independent Claim
204 words
A method for producing via holes in a polymer dielectric layer comprising the steps of: scanning a first predetermined area of the polymer dielectric layer with alaser beam in a first predetermined pattern at a sufficient level of energy and speed to heat a small volume of the polymer dielectric to a point of vaporization during a predetermined laser beam dwell duration, said volume being the product of the laser beam maximum energy spot size and the depth of a surface layer portion of the polymer dielectric layer; repeating said scanning of said first predetermined pattern for a sufficient number of times to etch a first desired amount of polymer dielectric from said first predetermined area; scanning a second predetermined area of the polymer dielectric layer with said laser beam in a second predetermined pattern at said level of energy and speed to heat another said small volume of the polymer dielectric to a point of vaporization during said predetermined laser beam dwell duration, said second predetermined area being entirely within said first predetermined area; and repeating said scanning of said second predetermined pattern for a sufficient number of times to etch a second desired amount of polymer dielectric from said second predetermined area.
Claim 19
Dependent Claim
58 words
The method of claim 16 wherein said polymer dielectric layer is situated on a precision positioning table and said scanning of each of said first and second predetermined areas is achieved by deflecting said beam along the X axis of a set of Cartesian coordinates and moving said table along the Y axis of said set of coordinates.
Claim 20
Dependent Claim
37 words
The method of claim 16 wherein the sufficient number of scans of said first predetermined area by said laser beam is equal to the sufficient number of scans of said second predetermined area by said laser beam.
Claim 21
Dependent Claim
18 words
The method of claim 16 wherein said laser beam is produced by a high energy continuous wave laser.
Claim 22
Dependent Claim
29 words
The method of claim 19 wherein said laser beam is modulated by a laser beam modulator and is deflected by a laser beam deflector during each predetermined scan pattern.
Claim 23
Dependent Claim
13 words
The method of claim 19 wherein said laser comprises an argon ion laser.
Claim 24
Dependent Claim
17 words
The method of claim 19 wherein said laser beam is produced at a wavelength of 351 nanometers.
Claim 25
Dependent Claim
45 words
The method of claim 16 further comprising the step of plasma etching the polymer dielectric layer to remove any residual particles from an underlying metal conductor pad and to clean and roughen the surface of the polymer dielectric layer to enhance adhesion of subsequent metallization.
Claim 26
Dependent Claim
30 words
The method of claim 23 in which said plasma etching is performed in an atmosphere comprising approximately 80% oxygen and 20% CF 4 and at a temperature of 110° C.
Claim 27
Dependent Claim
23 words
The method of claim 16 further comprising the step of focussing said laser beam to a spot of approximately 3 microns in diameter.
Claim 28
Dependent Claim
100 words
The method of claim 16 wherein scanning of each of said first and second areas is accomplished by moving the focal point of said laser beam from one edge of either predetermined pattern across the surface of the polymer dielectric layer to the opposite edge of said either pattern in a series of parallel scan lines all in the same direction, said focal point falling upon said one edge of said either pattern at a predetermined distance from the immediatelypreceding scan line in a direction perpendicular to the scan lines after each line in said either pattern has been scanned.
Claim 29
Dependent Claim
89 words
The method of claim 16 wherein scanning of each of said first and second areas is accomplished by moving the focal point of said laser beam from one edge of either predetermined pattern across the surface of the polymer dielectric layer to the opposite edge of said either pattern in a series of parallel scan lines in alternating directions, said focal point being moved a predetermined distance from the immediately-preceding scan line along either edge of said predetermined pattern after each line in said either pattern has been scanned.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-15 | 1993-07-17 | 1994-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-15 | 1997-07-17 | 1998-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-15 | 2001-07-17 | 2002-01-16 | $7700.00 | Window Closed / Lapsed |