US5972791A
Expired / Lapsed
US
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Capacitor, integrated circuitry, diffusion barriers, and method for forming an electrically conductive diffusion barrier
Assignee: Micron Technology Inc
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Filing: 1998-05-15
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Granted: 1999-10-26
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Expires: 2018-05-15
Abstract
Abstract A capacitor having a pair of conductive electrodes separated by a dielectric layer and wherein at least one of the electrodes comprise Ti x Al 1-x N, and wherein the variable "x" lies in a range of about 0.4 to about 0.8. The invention also contemplates a method for forming an electrically conductive diffusion barrier on a silicon substrate and which comprises providing a chemical vapor deposition reactor having a chamber; positioning the silicon substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous titanium aluminum and nitrogen to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber effective to deposit an electrically conductive diffusion barrier layer on the silicon substrate comprising Ti x Al 1-x N, and wherein the variable "x" is in a range of about 0.4 to about 0.8.
Inventors
- 👤 Paul J. Schuele
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 08:55
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
97 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon, comprising the steps of: providing a chemical vapor deposition reactor having a chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous titanium, aluminum and nitrogen to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber effective to deposit an electrically conductive diffusion barrier layer on the substrate comprising Ti x Al 1-x N, and wherein "x" is in a range of about 0.4 to about 0.8.
Claim 2
Independent Claim
97 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon, comprising the steps of: providing a chemical vapor deposition reactor having a chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous titanium, aluminum and nitrogen to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber effective to deposit an electrically conductive diffusion barrier layer on the substrate comprising Ti x Al 1-x N, and wherein "x" is in a range of about 0.4 to about 0.8.
Claim 3
Dependent Claim
34 words
A method for forming a diffusion barrier as claimed in claim 1, wherein the source of gaseous titanium is TMAT, the source of gaseous aluminum is DMEAA, and the source of nitrogen is ammonia.
Claim 4
Dependent Claim
61 words
A method for forming a diffusion barrier as claimed in claim 1, wherein the step of providing temperature and pressure conditions comprises: bringing the substrate to a temperature of about 250 to about 550 degrees C. within the chemical vapor deposition reactor chamber prior to the introduction of the gaseous titanium, aluminum and nitrogen to the chemical vapor deposition reactor chamber.
Claim 5
Dependent Claim
28 words
A method for forming a diffusion barrier as claimed in claim 1, wherein the diffusion barrier is formed to a thickness of about 300 to about 1500 Angstroms.
Claim 6
Dependent Claim
25 words
A method for forming a diffusion barrier as claimed in claim 1, wherein the diffusion barrier is formed to a thickness of about 500 Angstroms.
Claim 7
Dependent Claim
24 words
A method for forming a diffusion barrier as claimed in claim 1, wherein "x" is in a range of about 0.5 to about 0.7.
Claim 8
Dependent Claim
17 words
A method for forming a diffusion barrier as claimed in claim 1, wherein "x" is about 0.6.
Claim 9
Independent Claim
92 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon comprising: providing a chemical vapor deposition reactor chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous TMAT, DMEAA, and ammonia to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber effective to deposit an electrically conductive diffusion barrier layer on the substrate comprising Ti x Al 1-x N, and wherein "x" is in a range of about 0.4 to about 0.8.
Claim 10
Independent Claim
92 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon comprising: providing a chemical vapor deposition reactor chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous TMAT, DMEAA, and ammonia to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber effective to deposit an electrically conductive diffusion barrier layer on the substrate comprising Ti x Al 1-x N, and wherein "x" is in a range of about 0.4 to about 0.8.
Claim 11
Independent Claim
124 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon comprising: providing a chemical vapor deposition reactor chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous titanium, aluminum and nitrogen to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber to heat the substrate to a temperature of about 250 degrees C. to about 550 degrees C. prior to the introduction of the gaseous titanium, aluminum and nitrogen, the temperature and pressure conditions effective to deposit an electrically conductive diffusion barrier on the substrate comprising Ti x Al 1-x N, and wherein "x" is in a range of about 0.4 to about 0.8.
Claim 12
Independent Claim
124 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon comprising: providing a chemical vapor deposition reactor chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous titanium, aluminum and nitrogen to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber to heat the substrate to a temperature of about 250 degrees C. to about 550 degrees C. prior to the introduction of the gaseous titanium, aluminum and nitrogen, the temperature and pressure conditions effective to deposit an electrically conductive diffusion barrier on the substrate comprising Ti x Al 1-x N, and wherein "x" is in a range of about 0.4 to about 0.8.
Claim 13
Independent Claim
124 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon, comprising: providing a chemical vapor deposition reactor chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous TMAT, DMEAA and ammonia to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber to heat the substrate to a temperature of about 250 degrees C. to about 550 degrees C. prior to the introduction of the gaseous TMAT, DMEAA, and ammonia, the temperature and pressure conditions effective to deposit an electrically conductive diffusion barrier on the substrate comprising Ti x Al 1-x N, and wherein "x" is in the range of about 0.4 to about 0.8.
Claim 14
Independent Claim
124 words
A method for forming an electrically conductive diffusion barrier on a substrate containing silicon, comprising: providing a chemical vapor deposition reactor chamber; positioning the substrate in the chemical vapor deposition reactor chamber; providing a source of gaseous TMAT, DMEAA and ammonia to the chemical vapor deposition reactor chamber; and providing temperature and pressure conditions in the chemical vapor deposition reactor chamber to heat the substrate to a temperature of about 250 degrees C. to about 550 degrees C. prior to the introduction of the gaseous TMAT, DMEAA, and ammonia, the temperature and pressure conditions effective to deposit an electrically conductive diffusion barrier on the substrate comprising Ti x Al 1-x N, and wherein "x" is in the range of about 0.4 to about 0.8.
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