Method and apparatus for application of coatings on substrates

Claim 1

A method for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction consisting essentially of one metal comprising: placing the substrate, having the functional area to be coated, in a vacuum chamber; converting a portion of said metal into a first vapor in the vacuum chamber and depositing the first vapor onto the substrate by magnetic field-supported sputtering; and separately converting a further portion of said metal into a second vapor and depositing the second vapor onto the substrate by electric arc discharge using an electrode made of said metal; said functional area of said substrate being exposed substantially during the whole application of the coating simultaneously to both the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge, in such a way, that the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge are deposited jointly on the functional area, and substantially throughout the whole coating on the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric are discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering.

Claim 2

A method for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction consisting essentially of one metal comprising: placing the substrate, having the functional area to be coated, in a vacuum chamber; converting a portion of said metal into a first vapor in the vacuum chamber and depositing the first vapor onto the substrate by magnetic field-supported sputtering; and separately converting a further portion of said metal into a second vapor and depositing the second vapor onto the substrate by electric arc discharge using an electrode made of said metal; said functional area of said substrate being exposed substantially during the whole application of the coating simultaneously to both the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge, in such a way, that the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge are deposited jointly on the functional area, and substantially throughout the whole coating on the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric are discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering.

Claim 6

A method for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction consisting essentially of one metal, comprising: placing the substrate, having the functional area to be coated, in a vacuum chamber; converting a portion of said metal into a first vapor in the vacuum chamber and depositing the first vapor onto the substrate by magnetic field-supported sputtering; and separately converting a further portion of said metal into a second vapor and depositing the second vapor on the substrate by an electric arc discharge using an electrode made of said metal; said functional are of said substrate being exposed substantially during the whole application of the coating substantially alternately to both the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge, in such a way, that at least five out of one hundred atoms of the metal of the whole coating on said functional area are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering, and within the whole coating on said functional area no more than 30 nanometer thick layers exist, in which more than ninety-five out of one hundred parts of the metal comes from the magnetic field-supported sputtering.

Claim 7

A method for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction consisting essentially of one metal, comprising: placing the substrate, having the functional area to be coated, in a vacuum chamber; converting a portion of said metal into a first vapor in the vacuum chamber and depositing the first vapor onto the substrate by magnetic field-supported sputtering; and separately converting a further portion of said metal into a second vapor and depositing the second vapor on the substrate by an electric arc discharge using an electrode made of said metal; said functional are of said substrate being exposed substantially during the whole application of the coating substantially alternately to both the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge, in such a way, that at least five out of one hundred atoms of the metal of the whole coating on said functional area are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering, and within the whole coating on said functional area no more than 30 nanometer thick layers exist, in which more than ninety-five out of one hundred parts of the metal comes from the magnetic field-supported sputtering.

Claim 11

A method for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction consisting essentially of a plurality of metals, comprising: placing the substrate, having the functional area to be coated, in a vacuum chamber; converting a portion of at least one of the metals of said plurality of metals into a first vapor in the vacuum chamber and depositing the first vapor onto the substrate by magnetic field-supported sputtering; and separately converting a further portion of at least one of the metals of said plurality metals into a second vapor and depositing the second vapor on the substrate by an electric arc discharge using an electrode made of at least one of the metals; said functional area of said substrate being exposed substantially during the whole application of the coating simultaneously to both the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric are discharge, in such a way, that the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge are deposited jointly on the functional area, and substantially throughout the whole coating on the functional area at least five out of one hundred atoms of the metal fraction are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering.

Claim 12

A method for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction consisting essentially of a plurality of metals, comprising: placing the substrate, having the functional area to be coated, in a vacuum chamber; converting a portion of at least one of the metals of said plurality of metals into a first vapor in the vacuum chamber and depositing the first vapor onto the substrate by magnetic field-supported sputtering; and separately converting a further portion of at least one of the metals of said plurality metals into a second vapor and depositing the second vapor on the substrate by an electric arc discharge using an electrode made of at least one of the metals; said functional area of said substrate being exposed substantially during the whole application of the coating simultaneously to both the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric are discharge, in such a way, that the first vapor from the conversion by magnetic field-supported sputtering and the second vapor from the conversion by electric arc discharge are deposited jointly on the functional area, and substantially throughout the whole coating on the functional area at least five out of one hundred atoms of the metal fraction are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering.

Claim 16

An apparatus for coating the functional area of a substrate with a meterial having a metal fraction, comprising: a vacuum chamber for receiving the substrate; first means in the vacuum chamber for vaporizing a part of the coating forming material by electric arc discharge; second means in said vacuum chamber for forming another part of the material into vapor and depositing the vapor onto the substrate by magnetic field-supported sputtering, said second means comprising a plurality of cathode sputtering devices in said vacuum chamber arranged around a central arc vaporization device forming said first means; and holding means for holding a plurality of substrates in a position between said central arc vaporization device and said plurality of cathode sputtering devices; said holding means comprising a vertical substrate holding shaft carrying a plurality of vertically spaced plates each for carrying a plurality of substrates, a horizontal ring for rotatably supporting each of said vertical shafts, and means for rotatably supporting and driving said horizontal ring in said vacuum chamber, said horizontal ring being disposed around said central arc vaporization device and being surrounded by said plurality of cathode sputtering devices.

Claim 17

An apparatus for coating the functional area of a substrate with a meterial having a metal fraction, comprising: a vacuum chamber for receiving the substrate; first means in the vacuum chamber for vaporizing a part of the coating forming material by electric arc discharge; second means in said vacuum chamber for forming another part of the material into vapor and depositing the vapor onto the substrate by magnetic field-supported sputtering, said second means comprising a plurality of cathode sputtering devices in said vacuum chamber arranged around a central arc vaporization device forming said first means; and holding means for holding a plurality of substrates in a position between said central arc vaporization device and said plurality of cathode sputtering devices; said holding means comprising a vertical substrate holding shaft carrying a plurality of vertically spaced plates each for carrying a plurality of substrates, a horizontal ring for rotatably supporting each of said vertical shafts, and means for rotatably supporting and driving said horizontal ring in said vacuum chamber, said horizontal ring being disposed around said central arc vaporization device and being surrounded by said plurality of cathode sputtering devices.

Claim 20

An apparatus for coating the functional area of a substrate with a material having a metal fraction, comprising: a vacuum chamber for receiving the substrate; first means in the vacuum chamber for vaporizing a part of the coating forming material by electric arc discharge; and second means in said vacuum chamber for forming another part of the material into vapor and depositing the vapor onto the substrate by magnetic field-supported sputtering, said second means comprising a plurality of cathode sputtering devices in said vacuum chamber arranged around a central arc vaporization device forming said first means; and holding means for holding a plurality of substrates in a position between said central arc vaporization device and said plurality of cathode sputtering devices; said vacuum chamber having a top wall, a bottom wall and a circumferential side wall, said arc vaporization device being positioned in at least one of said top and bottom walls and said plurality of cathode sputterng devices being circumferentially spaced around said side wall, said arc vaporization device comprising a water cooled basic body connected through and insulated from said one of said top and bottom wall of said vacuum chamber, a trigger device mounted adjacent said water-cooled basic body, and a direct current power supply having one pole connected to said basic body and another pole connected to said trigger device.

Claim 21

An apparatus for coating the functional area of a substrate with a material having a metal fraction, comprising: a vacuum chamber for receiving the substrate; first means in the vacuum chamber for vaporizing a part of the coating forming material by electric arc discharge; and second means in said vacuum chamber for forming another part of the material into vapor and depositing the vapor onto the substrate by magnetic field-supported sputtering, said second means comprising a plurality of cathode sputtering devices in said vacuum chamber arranged around a central arc vaporization device forming said first means; and holding means for holding a plurality of substrates in a position between said central arc vaporization device and said plurality of cathode sputtering devices; said vacuum chamber having a top wall, a bottom wall and a circumferential side wall, said arc vaporization device being positioned in at least one of said top and bottom walls and said plurality of cathode sputterng devices being circumferentially spaced around said side wall, said arc vaporization device comprising a water cooled basic body connected through and insulated from said one of said top and bottom wall of said vacuum chamber, a trigger device mounted adjacent said water-cooled basic body, and a direct current power supply having one pole connected to said basic body and another pole connected to said trigger device.

Claim 23

An apparatus for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction including at least one metal, comprising: a vacuum chamber for receiving the substrate and for exposing the functional area to be coated; first conversion means in the vacuum chamber for converting a portion of at least one metal into a first vapor in the vacuum chamber and for depositing the first vapor onto the substrate by magnetic field-supported sputtering, the vacuum chamber being constructed and the first conversion means being positioned in the vacuum chamber so that the first vapor has free access to the functional area of the substrate in the vacuum chamber; second conversion means in the vacuum chamber spaced from the first conversion means for separately converting a further portion of at least one metal into a second vapor and for depositing the second vapor onto the substrate by an electric arc discharge using an electrode made of the at least one metal, the vacuum chamber being constructed and the second conversion means being positioned in the vacuum chamber so that the second vapor has free access to the functional area on the substrate; and activation means operatively connected to said first and second conversion means for simultaneously activating said first and second converting means for exposing the functional area of the substrate substantially during the whole application of the coating simultaneously to both the first vapor and the second vapor, said activation means activating said first and second conversion means for jointly depositing the first vapor and the second vapor onto the functional area so that substantially throughout the whole coating of the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering.

Claim 24

An apparatus for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction including at least one metal, comprising: a vacuum chamber for receiving the substrate and for exposing the functional area to be coated; first conversion means in the vacuum chamber for converting a portion of at least one metal into a first vapor in the vacuum chamber and for depositing the first vapor onto the substrate by magnetic field-supported sputtering, the vacuum chamber being constructed and the first conversion means being positioned in the vacuum chamber so that the first vapor has free access to the functional area of the substrate in the vacuum chamber; second conversion means in the vacuum chamber spaced from the first conversion means for separately converting a further portion of at least one metal into a second vapor and for depositing the second vapor onto the substrate by an electric arc discharge using an electrode made of the at least one metal, the vacuum chamber being constructed and the second conversion means being positioned in the vacuum chamber so that the second vapor has free access to the functional area on the substrate; and activation means operatively connected to said first and second conversion means for simultaneously activating said first and second converting means for exposing the functional area of the substrate substantially during the whole application of the coating simultaneously to both the first vapor and the second vapor, said activation means activating said first and second conversion means for jointly depositing the first vapor and the second vapor onto the functional area so that substantially throughout the whole coating of the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering.

Claim 25

An apparatus for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction including at least one metal, comprising: a vacuum chamber for receiving the substrate and for exposing the functional area to be coated; first conversion means in the vacuum chamber for converting a portion of at least one metal into a first vapor in the vacuum chamber and for depositing the first vapor onto the substrate by magnetic field-supported sputtering, the vacuum chamber being constructed and the first conversion means being positioned in the vacuum chamber so that the first vapor has free access to the functional area of the substrate in the vacuum chamber; second conversion means in the vacuum chamber spaced from the first conversion means for separately converting a further portion of at least one metal into a second vapor and for depositing the second vapor onto the substrate by an electric arc discharge using an electrode made of the at least one metal, the vacuum chamber being constructed and the second conversion means being positioned in the vacuum chamber so that the second vapor has free access to the functional area on the substrate; and activation means operatively connected to said first and second conversion means for alternately activating said first and second converting means for exposing the functional area of the substrate substantially during the whole application of the coating alternately to the first vapor and the second vapor, said activation means activating said first and second conversion means for alternately depositing the first vapor and the second vapor onto the functional area so that substantially throughout the whole coating of the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering, and within the whole coating on the functional area no more than 30 nanometer thick layers exist, in which more than ninety-five out of one hundred parts of the metal comes from the magnetic field-supported sputtering.

Claim 26

An apparatus for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction including at least one metal, comprising: a vacuum chamber for receiving the substrate and for exposing the functional area to be coated; first conversion means in the vacuum chamber for converting a portion of at least one metal into a first vapor in the vacuum chamber and for depositing the first vapor onto the substrate by magnetic field-supported sputtering, the vacuum chamber being constructed and the first conversion means being positioned in the vacuum chamber so that the first vapor has free access to the functional area of the substrate in the vacuum chamber; second conversion means in the vacuum chamber spaced from the first conversion means for separately converting a further portion of at least one metal into a second vapor and for depositing the second vapor onto the substrate by an electric arc discharge using an electrode made of the at least one metal, the vacuum chamber being constructed and the second conversion means being positioned in the vacuum chamber so that the second vapor has free access to the functional area on the substrate; and activation means operatively connected to said first and second conversion means for alternately activating said first and second converting means for exposing the functional area of the substrate substantially during the whole application of the coating alternately to the first vapor and the second vapor, said activation means activating said first and second conversion means for alternately depositing the first vapor and the second vapor onto the functional area so that substantially throughout the whole coating of the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric arc discharge and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering, and within the whole coating on the functional area no more than 30 nanometer thick layers exist, in which more than ninety-five out of one hundred parts of the metal comes from the magnetic field-supported sputtering.

Claim 27

An apparatus for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction including at least one metal, comprising: a vacuum chamber for receiving the substrate and for exposing the functional area to be coated; first conversion means in the vacuum chamber for converting a portion of at least one metal into a first vapor in the vacuum chamber and for depositing the first vapor onto the substrate by magnetic field-supported sputtering, the vacuum chamber being constructed and the first conversion means being positioned in the vacuum chamber so that the first vapor has free access to the functional area of the substrate in the vacuum chamber; second conversion means in the vacuum chamber spaced from the first conversion means for separately converting a further portion of at least one metal into a second vapor and for depositing the second vapor onto the substrate by an electric arc discharge using an electrode made of the at least one metal, the vacuum chamber being constructed and the second conversion means being positioned in the vacuum chamber so that the second vapor has free access to the functional area on the substrate; and activation means operatively connected to said first and second conversion means for simultaneously activating said first and second converting means, and means for rotating the substrate past said first and second conversion means for exposing the functional area of the substrate substantially during the whole application of the coating alternately to the first vapor and the second vapor, said activation means activating said first and second conversion means for depositing the first vapor and the second vapor onto the functional area so that substantially throughout the whole coating of the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric arc discharges and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering, and within the whole coating on the functional area no more than 30 nanometer thick layers exist, in which more than ninety-five out of one hundred parts of the metal comes from the magnetic field-supported sputtering.

Claim 28

An apparatus for the application of a coating onto a functional area of a substrate, the coating being made of material having a metal fraction including at least one metal, comprising: a vacuum chamber for receiving the substrate and for exposing the functional area to be coated; first conversion means in the vacuum chamber for converting a portion of at least one metal into a first vapor in the vacuum chamber and for depositing the first vapor onto the substrate by magnetic field-supported sputtering, the vacuum chamber being constructed and the first conversion means being positioned in the vacuum chamber so that the first vapor has free access to the functional area of the substrate in the vacuum chamber; second conversion means in the vacuum chamber spaced from the first conversion means for separately converting a further portion of at least one metal into a second vapor and for depositing the second vapor onto the substrate by an electric arc discharge using an electrode made of the at least one metal, the vacuum chamber being constructed and the second conversion means being positioned in the vacuum chamber so that the second vapor has free access to the functional area on the substrate; and activation means operatively connected to said first and second conversion means for simultaneously activating said first and second converting means, and means for rotating the substrate past said first and second conversion means for exposing the functional area of the substrate substantially during the whole application of the coating alternately to the first vapor and the second vapor, said activation means activating said first and second conversion means for depositing the first vapor and the second vapor onto the functional area so that substantially throughout the whole coating of the functional area at least five out of one hundred atoms of the metal are derived from the conversion by the electric arc discharges and the remaining atoms are derived from the conversion by the magnetic field-supported sputtering, and within the whole coating on the functional area no more than 30 nanometer thick layers exist, in which more than ninety-five out of one hundred parts of the metal comes from the magnetic field-supported sputtering.