US5900288A — Method for improving substrate adhesion in fluoro…

Claim 1

Independent Claim 132 words

A method of cleaning internal surfaces of a chamber containing fluoropolymer deposits and at least one substrate, comprising: a) placing at least one substrate in a chamber including internal surfaces having fluoropolymer deposits thereon, said at least one substrate having no fluoropolymer deposits thereon; b) generating a hydrogen plasma from a H 2 gas flow in said chamber containing said at least one substrate; and c) treating said internal surfaces of said chamber and said at least one substrate having no fluoropolymer deposits thereon with said hydrogen plasma to remove said fluoropolymer deposits from said internal surfaces, and subsequently removing hydrogen and fluoropolymer material that formed said fluoropolymer deposits from said chamber, such that the removed fluoropolymer material does not redeposit in said chamber on said at least one substrate during treating.

Claim 2

Independent Claim 132 words

A method of cleaning internal surfaces of a chamber containing fluoropolymer deposits and at least one substrate, comprising: a) placing at least one substrate in a chamber including internal surfaces having fluoropolymer deposits thereon, said at least one substrate having no fluoropolymer deposits thereon; b) generating a hydrogen plasma from a H 2 gas flow in said chamber containing said at least one substrate; and c) treating said internal surfaces of said chamber and said at least one substrate having no fluoropolymer deposits thereon with said hydrogen plasma to remove said fluoropolymer deposits from said internal surfaces, and subsequently removing hydrogen and fluoropolymer material that formed said fluoropolymer deposits from said chamber, such that the removed fluoropolymer material does not redeposit in said chamber on said at least one substrate during treating.

Claim 3

Dependent Claim 83 words

A method according to claim 1, wherein said treated chamber is at a temperature of from about 25° C. to about 400° C. and at a pressure of from about 10 to about 500 mTorr, and the H 2 gas flow has a flow rate of from about 10 to about 500 sccm and said hydrogen plasma is generated by rf power having a frequency of about 13.56 MHz and a power density of from about 0.03 to about 0.65 watts/cm 2 .

Claim 4

Dependent Claim 80 words

A method according to claim 1, wherein said chamber is treated at a temperature ranging from about 150° C. to about 300° C. and a pressure from about 50 to about 300 mTorr, the H 2 gas flow has a flow rate of from about 50 to about 300 sccm, and the hydrogen plasma is generated by rf power having a frequency of about 13.56 MHz and a power density of from about 0.15 to about 0.50 watts/cm 2 .

Claim 5

Dependent Claim 64 words

A method according to claim 1, wherein said chamber is treated at a temperature of about 250° C. and a pressure of about 200 mTorr, the H 2 gas flow has a flow rate of about 100 sccm, and the hydrogen plasma is generated by rf power having a frequency of about 13.56 MHz and a power density of about 0.30 watts/cm 2 .

Claim 6

Independent Claim 151 words

A method of forming a coated substrate in a chamber of a plasma processing system, comprising steps of: a) placing a substrate having no fluoropolymer deposits thereon in a chamber of a plasma processing system; b) generating a hydrogen plasma from a H 2 gas flow in the chamber containing said substrate having no fluoropolymer deposits thereon; c) cleaning internal surfaces of said chamber with the hydrogen plasma to remove fluoropolymer deposits formed on the internal surfaces during a substrate fluoropolymer coating operation performed in said chamber prior to the step (a), such that the removed fluoropolymer material that formed said fluoropolymer deposits does not redeposit in said chamber on said substrate; wherein said substrate having no fluoropolymer deposits thereon is exposed to no oxygen-containing plasma after being placed in the chamber and before the step (c); and d) subsequently to the step (c), coating said substrate with a fluoropolymer layer.

Claim 7

Independent Claim 151 words

A method of forming a coated substrate in a chamber of a plasma processing system, comprising steps of: a) placing a substrate having no fluoropolymer deposits thereon in a chamber of a plasma processing system; b) generating a hydrogen plasma from a H 2 gas flow in the chamber containing said substrate having no fluoropolymer deposits thereon; c) cleaning internal surfaces of said chamber with the hydrogen plasma to remove fluoropolymer deposits formed on the internal surfaces during a substrate fluoropolymer coating operation performed in said chamber prior to the step (a), such that the removed fluoropolymer material that formed said fluoropolymer deposits does not redeposit in said chamber on said substrate; wherein said substrate having no fluoropolymer deposits thereon is exposed to no oxygen-containing plasma after being placed in the chamber and before the step (c); and d) subsequently to the step (c), coating said substrate with a fluoropolymer layer.

Claim 8

Dependent Claim 30 words

A method according to claim 5, wherein the step (d) comprises coating said substrate with an amorphous carbon layer and then coating said amorphous carbon layer with the fluoropolymer layer.

Claim 9

Dependent Claim 17 words

A method according to claim 5, wherein the steps (a)-(d) are carried out in a single chamber.

Claim 10

Dependent Claim 83 words

A method according to claim 5, wherein said chamber is treated at a temperature of from about 25° C. to about 400° C. and at a pressure of from about 10 to about 500 mTorr and the H 2 gas flow has a flow rate of from about 10 to about 500 sccm and said hydrogen plasma is generated by rf power having a frequency of about 13.56 MHz and a power density of from about 0.03 to about 0.65 watts/cm 2 .

Claim 11

Dependent Claim 81 words

A method according to claim 3, wherein said chamber is treated at a temperature ranging from about 150° C. to about 300° C. and a pressure of from about 50 to about 300 mTorr, the H 2 gas flow has a flow rate of from about 50 to about 300 sccm, and the hydrogen plasma is generated by rf power having a frequency of about 13.56 MHz and a power density of from about 0.15 to about 0.50 watts/cm 2 .

Claim 12

Dependent Claim 64 words

A method according to claim 3, wherein said chamber is treated at a temperature of about 250° C. and a pressure of about 200 mTorr, the H 2 gas flow has a flow rate of about 100 sccm, and the hydrogen plasma is generated by rf power having a frequency of about 13.56 MHz and a power density of about 0.30 watts/cm 2 .

Claim 13

Dependent Claim 31 words

A method according to claim 5, wherein the substrate comprises at least one member selected from the group consisting of a metal, an insulating polymer, a glass, and a crystalline silicon.

Claim 14

Dependent Claim 11 words

A method according to claim 5, wherein the substrate comprises polyimide.

Claim 15

Dependent Claim 15 words

A method according to claim 5, wherein the substrate is a thermal ink jet device.

Claim 16

Independent Claim 119 words

A method of forming a coated substrate in a plasma deposition chamber, comprising steps of: a) placing a substrate having no fluoropolymer material thereon in a plasma deposition chamber; b) generating a hydrogen plasma from a H 2 gas flow in the plasma deposition chamber containing the substrate; c) treating internal surfaces of the chamber and the substrate having no fluoropolymer material thereon with the hydrogen plasma to remove fluoropolymer deposits on the internal surfaces, such that the removed fluoropolymer material that formed said fluropolymer deposits does not redeposit on said substrate during treating; d) subsequently to the step (c), coating said substrate with an amorphous carbon layer; and e) coating said amorphous carbon layer with a fluoropolymer layer.

Claim 17

Independent Claim 119 words

A method of forming a coated substrate in a plasma deposition chamber, comprising steps of: a) placing a substrate having no fluoropolymer material thereon in a plasma deposition chamber; b) generating a hydrogen plasma from a H 2 gas flow in the plasma deposition chamber containing the substrate; c) treating internal surfaces of the chamber and the substrate having no fluoropolymer material thereon with the hydrogen plasma to remove fluoropolymer deposits on the internal surfaces, such that the removed fluoropolymer material that formed said fluropolymer deposits does not redeposit on said substrate during treating; d) subsequently to the step (c), coating said substrate with an amorphous carbon layer; and e) coating said amorphous carbon layer with a fluoropolymer layer.

Claim 18

Dependent Claim 81 words

A method according to claim 14, wherein said chamber is treated at a temperature ranging from about 150° C. to about 300° C. and a pressure of from about 50 to about 300 mTorr, the H 2 gas flow has a flow rate of from about 50 to about 300 sccm, and the hydrogen plasma is generated by rf power having a frequency of about 13.56 MHz and a power density of from about 0.15 to about 0.50 watts/cm 2 .

Claim 19

Dependent Claim 31 words

A method according to claim 14, wherein the substrate comprises at least one member selected from the group consisting of a metal, an insulating polymer, a glass, and a crystalline silicon.

Claim 20

Dependent Claim 12 words

A method according to claim 14, wherein the substrate comprises a polyimide.

Claim 21

Dependent Claim 15 words

A method according to claim 14, wherein the substrate is a thermal ink jet device.

Claim 22

Independent Claim 113 words

A method of treating internal surfaces of a chamber, comprising: a) coating a first substrate using a fluoropolymer-forming plasma in said chamber, said coating also forming fluoropolymer deposits on said internal surfaces of said chamber; b) subsequently to the coating, treating said internal surfaces of said chamber with a hydrogen plasma while a second substrate having no fluoropolymer deposits thereon is disposed in said chamber, so as to remove said fluoropolymer deposits from said internal surfaces such that the removed fluoropolymer material that formed said fluropolymer deposits on said internal surfaces does not redeposit on said second substrate during treating; and c) removing hydrogen and the removed fluoropolymer fluoropolymer material from said chamber.

Claim 23

Independent Claim 113 words

A method of treating internal surfaces of a chamber, comprising: a) coating a first substrate using a fluoropolymer-forming plasma in said chamber, said coating also forming fluoropolymer deposits on said internal surfaces of said chamber; b) subsequently to the coating, treating said internal surfaces of said chamber with a hydrogen plasma while a second substrate having no fluoropolymer deposits thereon is disposed in said chamber, so as to remove said fluoropolymer deposits from said internal surfaces such that the removed fluoropolymer material that formed said fluropolymer deposits on said internal surfaces does not redeposit on said second substrate during treating; and c) removing hydrogen and the removed fluoropolymer fluoropolymer material from said chamber.

Claim 24

Independent Claim 148 words

A method of forming a coated substrate in a chamber of a plasma processing system, comprising steps of: a) placing a substrate in a chamber of a plasma processing system; b) generating a hydrogen plasma in the chamber containing the substrate; c) treating internal surfaces of the chamber and the substrate with the hydrogen plasma to remove fluoropolymer deposits that were formed on the internal surfaces during a substrate fluoropolymer coating operation performed in the chamber prior to the step (a), such that the removed fluoropolymer material that formed the fluropolymer deposits does not redeposit in the chamber on the substrate during treating; wherein the internal surfaces of the chamber and the substrate are not treated with an oxygen-containing plasma after the substrate is placed in the chamber and prior to the step (c); and d) subsequently to the step (c), coating the substrate with a fluoropolymer layer.

Claim 25

Independent Claim 148 words

A method of forming a coated substrate in a chamber of a plasma processing system, comprising steps of: a) placing a substrate in a chamber of a plasma processing system; b) generating a hydrogen plasma in the chamber containing the substrate; c) treating internal surfaces of the chamber and the substrate with the hydrogen plasma to remove fluoropolymer deposits that were formed on the internal surfaces during a substrate fluoropolymer coating operation performed in the chamber prior to the step (a), such that the removed fluoropolymer material that formed the fluropolymer deposits does not redeposit in the chamber on the substrate during treating; wherein the internal surfaces of the chamber and the substrate are not treated with an oxygen-containing plasma after the substrate is placed in the chamber and prior to the step (c); and d) subsequently to the step (c), coating the substrate with a fluoropolymer layer.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2002-05-03	2002-11-02	2003-05-04	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2006-05-03	2006-11-02	2007-05-04	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2010-05-03	2010-11-02	2011-05-04	$7700.00	Window Closed / Lapsed

Method for improving substrate adhesion in fluoropolymer deposition processes

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