US5387310A
Expired / Lapsed
US
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Method for producing single crystal diamond film
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1993-04-16
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Granted: 1995-02-07
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Expires: 2013-04-16
Abstract
Abstract A single crystal diamond film having good electrical characteristics is produced by a method which comprises steps of decomposing a raw material gas comprising a hydrogen gas and a carbon-containing compound and epitaxially growing a single crystal diamond film on a single crystal substrate in a vapor phase, wherein a molar ratio of the carbon atoms in the carbon-containing compound to the hydrogen is from 2:100 to 10:100 and a lattice constant of the single crystal substrate satisfies the following relation: |(a-a0)/a|x100</=20(I) wherein a0 is the lattice constant of diamond (3.567 ANGSTROM ) and a is a lattice constant of the single crystal substrate.
Inventors
- 👤 Hiromu Shiomi
- 👤 Naoji Fujimori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:37
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
70 words
A method for producing a single crystal diamond film, which comprises the steps of: decomposing a raw material gas comprising a hydrogen gas and a carbon containing compound, and epitaxially growing a single crystal diamond film on a (100) plane of a single crystal diamond substrate in a vapor phase, wherein a molar ratio of the carbon atoms in the carbon-containing compound to the hydrogen is from 2:100 to 10:100.
Claim 2
Independent Claim
70 words
A method for producing a single crystal diamond film, which comprises the steps of: decomposing a raw material gas comprising a hydrogen gas and a carbon containing compound, and epitaxially growing a single crystal diamond film on a (100) plane of a single crystal diamond substrate in a vapor phase, wherein a molar ratio of the carbon atoms in the carbon-containing compound to the hydrogen is from 2:100 to 10:100.
Claim 3
Independent Claim
99 words
A method for producing a single crystal diamond film, comprising the steps of: decomposing a raw material gas comprising a hydrogen gas and a carbon-containing compound, and epitaxially growing a single crystal diamond film on a single crystal substrate in a vapor phase, wherein a molar ratio of the carbon atoms in the carbon containing compound to the hydrogen is from 2:100 to 10:100 and the single crystal substrate is selected from the group consisting of AlN, ZnS, Tl 2 Ba 2 Ca 2 Cu 3 O 10 , Y 1 Ba 2 Cu 3 O 7-x and C-BN.
Claim 4
Independent Claim
99 words
A method for producing a single crystal diamond film, comprising the steps of: decomposing a raw material gas comprising a hydrogen gas and a carbon-containing compound, and epitaxially growing a single crystal diamond film on a single crystal substrate in a vapor phase, wherein a molar ratio of the carbon atoms in the carbon containing compound to the hydrogen is from 2:100 to 10:100 and the single crystal substrate is selected from the group consisting of AlN, ZnS, Tl 2 Ba 2 Ca 2 Cu 3 O 10 , Y 1 Ba 2 Cu 3 O 7-x and C-BN.
Claim 5
Dependent Claim
26 words
The method according to claim 2, wherein the molar ratio of the carbon atoms in the carbon-containing compound to the hydrogen is from 5:100 to 7:100.
Claim 6
Dependent Claim
26 words
The method according to claim 1, wherein the molar ratio of the carbon atoms in the carbon-containing compound to the hydrogen is from 5:100 to 7:100.
References Cited (Backward Citations)
JPS60195091A
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JPS61286299A
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JPS62138395A
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EP0282054A1
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EP0282075A2
Cited
JPS63252997A
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EP0288065A2
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JPH01100093A
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EP0348026A1
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-06 | 1998-08-08 | 1999-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-06 | 2002-08-08 | 2003-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-06 | 2006-08-08 | 2007-02-07 | $7700.00 | Window Closed / Lapsed |