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EP0288065A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method for synthesis of diamond

Assignee: Niterra Co Ltd
•
Filing: 1988-04-21
•
Granted: —
•
Expires: 2008-04-21
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Abstract

Abstract The following are disclosed: A method for synthesis of diamond which is characterized by contacting a gas obtained by excitation of carbon monoxide and hydrogen in such a ratio as carbon monoxide being at least 1 mol% per total of carbon monoxide and hydrogen with a substrate in the presence of a reducing metal. A method for synthesis of diamond which is characterized by contacting with a substrate a gas obtained by excitation of carbon dioxide and hydrogen mixed at such a ratio of carbon dioxide being 0.1-20 mol% per hydrogen. A method for synthesis of diamond by depositing diamond on the surface of a substrate by introducing onto the surface of the substrate a plasma obtained from hydrogen and carbon source gas by irradiation of microwave in a plasma generator which is characterized in that progress of microwave oscillated from one microwave oscillator is divided and thus divided respective microwaves and led to a plurality of plasma generators. A diamond synthesis apparatus which is characterized by comprising a microwave oscillator for oscillation of microwave, a branched waveguide for dividing the microwave oscillated from said microwave oscillator and a plurality of plasma generators which are connected with said branched waveguide and have a substrate for deposition of diamond, respectively.

Inventors

  • 👤 Toshimichi Ito
  • 👤 Masaaki Nosaka
  • 👤 Ikuo Hosoya

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-23 06:38
CPC Classifications
C; C01; C01B; C01B32/00; C01B32/25; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/277; C23C16/274; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 40 words
A method for synthesis of diamond which comprises contacting a gas obtained by excitation of carbon monoxide and hydrogen at a ratio of carbon monoxide being at least 1 mol% per total of carbon monoxide and hydrogen with a substrate.
Claim 2
Independent Claim 40 words
A method for synthesis of diamond which comprises contacting a gas obtained by excitation of carbon monoxide and hydrogen at a ratio of carbon monoxide being at least 1 mol% per total of carbon monoxide and hydrogen with a substrate.
Claim 3
Independent Claim 36 words
A method for synthesis of diamond which comprises contacting a gas obtained by excitation of a mixture of carbon dioxide and hydrogen at a ratio of carbon dioxide being 0.1-20 mol% for hydrogen with a substrate.
Claim 4
Independent Claim 36 words
A method for synthesis of diamond which comprises contacting a gas obtained by excitation of a mixture of carbon dioxide and hydrogen at a ratio of carbon dioxide being 0.1-20 mol% for hydrogen with a substrate.
Claim 5
Dependent Claim 17 words
A method according to claim 1 or 2 wherein the excitation is effected by plasma CVD method.
Claim 6
Independent Claim 64 words
A method for synthesis of diamond which comprises contacting with a substrate a plasma obtained from hydrogen gas and carbon source gas by irradiation with microwave in a plasma generator to deposit diamond on the surface of the substrate wherein progress of a microwave oscillated from one microwave oscillator is branched and thus branched microwaves are respectively led to a plurality of plasma generators.
Claim 7
Independent Claim 64 words
A method for synthesis of diamond which comprises contacting with a substrate a plasma obtained from hydrogen gas and carbon source gas by irradiation with microwave in a plasma generator to deposit diamond on the surface of the substrate wherein progress of a microwave oscillated from one microwave oscillator is branched and thus branched microwaves are respectively led to a plurality of plasma generators.
Claim 8
Dependent Claim 25 words
A method according to claim 1, 2 or 4 wherein the substrate is a material selected from the group consisting of silicon, WC and WC-Co.
Claim 9
Dependent Claim 19 words
A method according to claim 1 or 4 wherein the reaction temperature of surface of the substrate is 400-1,000°C.
Claim 10
Independent Claim 53 words
An apparatus for synthesis of diamond which has a microwave oscillator which oscillates microwave, a branching waveguide which branches the microwave oscillated from said microwave oscillator into a plurality of directions and a plurality of plasma generators which are connected with said branching waveguide and which respectively have substrate for deposition of diamond.
Claim 11
Independent Claim 53 words
An apparatus for synthesis of diamond which has a microwave oscillator which oscillates microwave, a branching waveguide which branches the microwave oscillated from said microwave oscillator into a plurality of directions and a plurality of plasma generators which are connected with said branching waveguide and which respectively have substrate for deposition of diamond.

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