US5244730A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma deposition of fluorocarbon
Assignee: International Business Machines Corp
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Filing: 1991-04-30
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Granted: 1993-09-14
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Expires: 2011-04-30
Abstract
Abstract Polymeric fluorocarbon layer is prepared by plasma enhanced chemical vapor deposition in a chamber, the walls of which are coated with a polymeric fluorocarbon film by introducing a gaseous polymerizable fluorocarbon into the chamber and applying radio-frequency at a power level of about 100 to about 1000 watts, employing a pressure of about 10 to 180 mTorr and a self-bias voltage of about -50 to about -700 volts. The polymeric fluorocarbon layer is about 0.05 to about 5 μm thick, has a maximum dielectric constant of about 2.5, has a C/F ratio of about 1:1 to about 1:3, is thermally stable at temperatures of at least about 350° C., and is substantially free from metallic contamination and oxygen.
Inventors
- 👤 Thao N. Nguyen
- 👤 Gottlieb S. Oehrlein
- 👤 Zeev A. Weinberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 06:06
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; B05D2506/00; B05D2506/10; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/31504; Y10T428/3154; Y10T428/31678; Y10T428/31692; Y10T428/31699
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
102 words
A coated substrate obtained by the method of placing the substrate, and a working electrode in a chamber which can be evacuated wherein the walls of said chamber and the electrode are coated with a polymeric fluorocarbon film and wherein the electrode is capacitively coupled; introducing into said chamber a gaseous polymerizable fluorocarbon; applying radio-frequency power of about 100 watts to about 1000 watts to said electrode; to thereby deposit a polymeric fluorocarbon film onto said substrate while maintaining the pressure of about 10 to about 180 mTorr and a self-bias voltage on said electrode of about -50 to about -700 volts.
Claim 2
Dependent Claim
102 words
A coated substrate obtained by the method of placing the substrate, and a working electrode in a chamber which can be evacuated wherein the walls of said chamber and the electrode are coated with a polymeric fluorocarbon film and wherein the electrode is capacitively coupled; introducing into said chamber a gaseous polymerizable fluorocarbon; applying radio-frequency power of about 100 watts to about 1000 watts to said electrode; to thereby deposit a polymeric fluorocarbon film onto said substrate while maintaining the pressure of about 10 to about 180 mTorr and a self-bias voltage on said electrode of about -50 to about -700 volts.
Claim 3
Dependent Claim
16 words
The coated substrate of claim 1 wherein the F/C ratio is about 1.8:1 to about 1:1.
Claim 4
Dependent Claim
14 words
The coat ed substrate of claim 1 wherein the F/C ratio is about 1.4:1.
Claim 5
Dependent Claim
19 words
The coated substrate of claim 1 wherein the oxygen content of the polymeric fluorocarbon is less than about 0.5%.
Claim 6
Dependent Claim
17 words
The coated substrate of claim 1 wherein the coating is about 0.1 to about 1 micron thick.
Claim 7
Dependent Claim
83 words
A substrate having a thin polymeric fluorocarbon coating thereon of about 0.01 to about 5 microns, wherein said coating has a maximum dielectric constant of about 2.5, is thermally stable at temperatures of at least about 350° C., has a F/C ratio of about 1:1 to about 3:1, has less than about 0.5% oxygen content and is free from metallic contamination and demonstrates effectively no leakage as determined by current-voltage measurements of coatings of one micron thickness up to at least 50 volts.
Claim 8
Dependent Claim
83 words
A substrate having a thin polymeric fluorocarbon coating thereon of about 0.01 to about 5 microns, wherein said coating has a maximum dielectric constant of about 2.5, is thermally stable at temperatures of at least about 350° C., has a F/C ratio of about 1:1 to about 3:1, has less than about 0.5% oxygen content and is free from metallic contamination and demonstrates effectively no leakage as determined by current-voltage measurements of coatings of one micron thickness up to at least 50 volts.
Claim 9
Dependent Claim
16 words
The coated substrate of claim 6 wherein the dielectric constant is about 1.9 to about 2.3.
Claim 10
Dependent Claim
16 words
The coated substrate of claim 6 wherein the dielectric constant is about 2 to about 2.2.
Claim 11
Dependent Claim
32 words
The coated substrate of claim 6 wherein the hydrogen content of the polymeric fluorocarbon is less than about 1% and wherein said coating is highly crosslinked and exhibits predominantly C-CF x bonding.
Claim 12
Dependent Claim
16 words
The coated substrate of claim 6 wherein the F/C ratio is about 1.8:1 to about 1:1.
Claim 13
Dependent Claim
13 words
The coated substrate of claim 6 wherein the F/C ratio is about 1.4:1.
Claim 14
Dependent Claim
17 words
The coated substrate of claim 6 wherein the coating is about 0.1 to about 1 micron thick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-13 | 1997-03-15 | 1997-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-13 | 2001-03-15 | 2001-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-13 | 2005-03-15 | 2005-09-14 | $7700.00 | Window Closed / Lapsed |