US4407852A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrets from plasma polymerized material
Assignee: POLYPLASMA Inc A CORP OF CANADA
•
Filing: 1980-10-16
•
Granted: 1983-10-04
•
Expires: 2000-10-16
Abstract
Abstract This invention relates to electrets which comprise a film of plasma polymerized dielectric material having a volumetric space charge.
Inventors
- 👤 Slawomir W. Sapieha
- 👤 Michael R. Wertheimer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:31
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; H; H01; H01G; H01G7/00; H01G7/02; H01G7/021; H01G7/023
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
28 words
In a device utilizing an electret, the improvement wherein the electret comprises a film of a plasma polymerized dielectric material having a substantially uniform volumetric space charge therethrough.
Claim 2
Dependent Claim
28 words
In a device utilizing an electret, the improvement wherein the electret comprises a film of a plasma polymerized dielectric material having a substantially uniform volumetric space charge therethrough.
Claim 3
Dependent Claim
15 words
The improvement of claim 1 wherein said plasma polymerized dielectric material is made from hexamethyldisiloxane.
Claim 4
Dependent Claim
16 words
The improvement of claim 1, wherein the electret is formed from a hydrocarbon or halocarbon material.
Claim 5
Dependent Claim
21 words
The improvement of claim 1, wherein the electret comprises a multilayer laminate formed of different materials to have a desired property.
Claim 6
Dependent Claim
18 words
The improvement of claim 1, wherein said film has a thickness of between 100 A and 25 μm.
Claim 7
Dependent Claim
16 words
The improvement of claim 1, wherein said plasma polymerized dielectric material is produced from an organosilicone.
Claim 8
Independent Claim
22 words
A method of manufacturing an electret comprising the steps of providing a substrate, and depositing on said substrate a plasma polymerized material.
Claim 9
Independent Claim
22 words
A method of manufacturing an electret comprising the steps of providing a substrate, and depositing on said substrate a plasma polymerized material.
Claim 10
Dependent Claim
29 words
The method of claim 7, wherein the step of depositing said plasma polymerized material comprises the step of exposing said substrate to a plasma by a microwave plasma apparatus.
Claim 11
Dependent Claim
24 words
The method of claim 8, wherein said microwave plasma apparatus has a power density of between 0.01 to 10 watts per cm 3 .
Claim 12
Independent Claim
16 words
The method of claims 7 or 8, including the step of applying an external magnetic field.
Claim 13
Dependent Claim
13 words
The method of claim 7, including the step of electrically biasing said substrate.
Claim 14
Dependent Claim
25 words
A method of claim 7, 8, or 11, including the step of heating or cooling said substrate when the substrate is exposed to the plasma.
Claim 15
Dependent Claim
27 words
The method of claim 7, 8, or 11 including the further step of subjecting the plasma polymerized material to a corona discharge treatment, or electron beam charging.
Claim 16
Independent Claim
23 words
The method of claims 7 or 11, wherein the film is plasma polymerized at a frequency of between 0 Hz and 30 GHz.
Claim 17
Independent Claim
24 words
The method of claims 7, 8 or 11, wherein the film is plasma polymerized at a frequency of between 50 Hz and 10 GHz.
Claim 18
Dependent Claim
14 words
The method of claim 7, wherein the plasma polymerized material comprises a polar material.
Claim 19
Dependent Claim
22 words
The method of claim 16, further including the step of subjecting the plasma polymerized material to a polarization treatment at elevated temperature.
Claim 20
Dependent Claim
14 words
The method of claim 7, wherein said plasma polymerized material was produced from hexamethyldisiloxane.
Claim 21
Dependent Claim
33 words
In a transducer having a backplate and an electret adjacent thereto, the improvement wherein said electret comprises a film of a plasma polymerized dielectric material having a substantially uniform volumetric space charge therethrough.
Claim 22
Dependent Claim
33 words
In a transducer having a backplate and an electret adjacent thereto, the improvement wherein said electret comprises a film of a plasma polymerized dielectric material having a substantially uniform volumetric space charge therethrough.
Claim 23
Dependent Claim
39 words
In a transducer comprising a backplate, an electret on one side of said backplate, and a diaphragm, the improvement wherein said electret comprises a film of a plasma polymerized dielectric material having a substantially uniform volumetric space charge therethrough.
Claim 24
Dependent Claim
39 words
In a transducer comprising a backplate, an electret on one side of said backplate, and a diaphragm, the improvement wherein said electret comprises a film of a plasma polymerized dielectric material having a substantially uniform volumetric space charge therethrough.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-03 | 1987-04-04 | 1987-10-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-03 | 1991-04-04 | 1991-10-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-03 | 1995-04-04 | 1995-10-04 | $7700.00 | Window Closed / Lapsed |