US4729906A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing glow polymerisate layers
Assignee: Siemens AG
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Filing: 1986-01-31
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Granted: 1988-03-08
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Expires: 2006-01-31
Abstract
Abstract Glow polymerisate layers can be generated on a substrate, starting from hydrocarbons and/or fluorocarbons, by means of a high-frequency, low-pressure glow discharge. Glow polymerisates completely saturated with hydrogen or fluorine are obtained when the glow discharge is carried out in the microwave range between 0.5 and 1.000 GHz and if the amplitude E 0 of the effective field strength in the vicinity of the substrate no greater than 850 V/cm.
Inventors
- 👤 Wolfgang Kleeberg
- 👤 Johann Kammermaier
- 👤 Gerhard Rittmayer
- 👤 Rolf-Winfried Schulte
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:32
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; C; C08; C08F; C08F114/00; C08F114/18; C08F114/26; C08F2/00; C08F2/46; C08F2/52; B05D2506/00; B05D2506/10
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
90 words
A process for the formation of polymer layers on a substrate comprising glow discharging fluorocarbon monomers at a high frequency and a low pressure wherein said glow discharging is conducted by means of a hollow wave conductor and in the absence of a carrier gas in the microwave range of between 0.5 and 1,000 GHz and wherein the substrate is disposed outside of the hollow wave conductor and wherein the amplitude E 0 of the effective field strength in the vicinity of said substrate is no greater than 850 V/cm.
Claim 2
Dependent Claim
90 words
A process for the formation of polymer layers on a substrate comprising glow discharging fluorocarbon monomers at a high frequency and a low pressure wherein said glow discharging is conducted by means of a hollow wave conductor and in the absence of a carrier gas in the microwave range of between 0.5 and 1,000 GHz and wherein the substrate is disposed outside of the hollow wave conductor and wherein the amplitude E 0 of the effective field strength in the vicinity of said substrate is no greater than 850 V/cm.
Claim 3
Dependent Claim
21 words
The process of claim 1 wherein said glow discharging is carried out at a pressure of from 0.1 to 1 mbar.
Claim 4
Dependent Claim
20 words
The process of claim 1 or 2 wherein said substrate is heated to a temperature no higher than 200° C.
Claim 5
Dependent Claim
11 words
The process of claim 3 wherein said fluorocarbon monomers are perfluorocarbons.
Claim 6
Dependent Claim
10 words
The process of claim 4 wherein said perfluorocarbon is octafluorocyclobutane.
Claim 7
Dependent Claim
10 words
The process of claim 4 wherein said perfluorocarbon is perfluorocyclohexane.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-08 | 1991-09-07 | 1992-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-08 | 1995-09-07 | 1996-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-08 | 1999-09-07 | 2000-03-08 | $7700.00 | Window Closed / Lapsed |