US5872031A
Expired / Lapsed
US
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Enhancement-depletion logic based on gaas mosfets
Assignee: University of California
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Filing: 1996-11-27
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Granted: 1999-02-16
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Expires: 2016-11-27
Abstract
Abstract The present invention discloses a method of forming an oxide layer on a layer of gallium arsenide, including the steps of depositing a layer of aluminum arsenide on the layer of gallium arsenide, of exposing the layer of aluminum arsenide to an oxidizing gas mixture so that the aluminum arsenide is oxidized to aluminum oxide, and of controlling excess arsenic released in the aluminum oxide during the exposing step, so as to ensure enhanced electrical properties in the aluminum oxide. The method is used to provide an insulating gate layer for a GaAs field effect transistor by forming an oxide layer on GaAs and controlling excess arsenic so as to maintain high resistivity in the oxide layer and to avoid the formation of interface surface states which degrade transistor performance. The method is also used to provide complementary metal-insulator-semiconductor logic devices based on the gallium arsenide field effect transistor.
Inventors
- 👤 Umesh Kumar Mishra
- 👤 Primit A. Parikh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:50
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/66; H10D64/68; H10D64/691; H10D30/00; H10D30/01; H10D30/021; H10D30/60; H10D30/637; H10D30/80; H10D30/801; H10D64/01; H10D64/013; H10D64/01358; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0158; H10D84/0165; H10D84/0181; H10D84/0193; H10D84/02; H10D84/05; H10P; H10P95/00; H10P95/94; H10D62/00; H10D62/80; H10D62/85
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
58 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, the controlling step further comprising the step of hydrogenizing the aluminum oxide layer, wherein the hydrogenizing step further comprises exposing the aluminum oxide to hydrogen ions.
Claim 2
Independent Claim
58 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, the controlling step further comprising the step of hydrogenizing the aluminum oxide layer, wherein the hydrogenizing step further comprises exposing the aluminum oxide to hydrogen ions.
Claim 3
Dependent Claim
25 words
The method of claim 1, wherein the hydrogen ions are accelerated to an energy ranging from approximately 100 electron volts to approximately 300 electron volts.
Claim 4
Dependent Claim
19 words
The method of claim 1, wherein the hydrogen ions are accelerated to an energy of approximately 200 electron volts.
Claim 5
Independent Claim
49 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, wherein the controlling step further comprises depositing an n- type layer over the layer of aluminum oxide.
Claim 6
Independent Claim
49 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, wherein the controlling step further comprises depositing an n- type layer over the layer of aluminum oxide.
Claim 7
Dependent Claim
37 words
The method of claim 4, wherein the n- type layer is formed from at least one material selected from the group consisting of gallium arsenide, aluminum gallium arsenide, gallium nitride, aluminum gallium indium phosphide, and indium phosphide.
Claim 8
Independent Claim
66 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, wherein the controlling step further comprises depositing a vacancy semiconductor layer over the layer of aluminum oxide, the vacancy semiconductor layer having vacancies so as to attract the excess arsenic from the oxide layer.
Claim 9
Independent Claim
66 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, wherein the controlling step further comprises depositing a vacancy semiconductor layer over the layer of aluminum oxide, the vacancy semiconductor layer having vacancies so as to attract the excess arsenic from the oxide layer.
Claim 10
Dependent Claim
19 words
The method of claim 6, wherein the vacancy semiconductor layer is a low temperature growth layer of gallium arsenide.
Claim 11
Independent Claim
59 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, wherein the controlling step further comprises forming a semiconductor barrier layer between the semiconductor layer and the layer of aluminum oxide to prevent migration of excess arsenic.
Claim 12
Independent Claim
59 words
A method of treating an aluminum oxide layer formed on a semiconductor layer, comprising the step of controlling excess arsenic released in the aluminum oxide layer when forming the aluminum oxide layer, wherein the controlling step further comprises forming a semiconductor barrier layer between the semiconductor layer and the layer of aluminum oxide to prevent migration of excess arsenic.
Claim 13
Dependent Claim
30 words
The method of claim 8, wherein the semiconductor barrier layer is formed from at least one material selected from the group consisting of aluminum gallium arsenide and indium gallium phosphide.
Claim 14
Independent Claim
97 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step; wherein the controlling step further comprises hydrogenizing the aluminum oxide layer by exposing the aluminum oxide layer to hydrogen ions.
Claim 15
Independent Claim
97 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step; wherein the controlling step further comprises hydrogenizing the aluminum oxide layer by exposing the aluminum oxide layer to hydrogen ions.
Claim 16
Independent Claim
93 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step: wherein the controlling step further comprises depositing an n-type layer over the layer of aluminum arsenide.
Claim 17
Independent Claim
93 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step: wherein the controlling step further comprises depositing an n-type layer over the layer of aluminum arsenide.
Claim 18
Dependent Claim
30 words
The method of claim 11, wherein the n-type layer is formed from the group consisting of gallium arsenide, aluminum gallium arsenide, gallium nitride, aluminum gallium indium phosphide, and indium phosphide.
Claim 19
Independent Claim
111 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step: wherein the controlling step further comprises depositing a vacancy semiconductor layer over the layer of aluminum arsenide, the vacancy semiconductor layer having vacancies so as to attract the excess arsenic from the oxide layer.
Claim 20
Independent Claim
111 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step: wherein the controlling step further comprises depositing a vacancy semiconductor layer over the layer of aluminum arsenide, the vacancy semiconductor layer having vacancies so as to attract the excess arsenic from the oxide layer.
Claim 21
Dependent Claim
25 words
The method of claim 13, wherein the vacancy semiconductor layer is a low temperature growth layer of gallium arsenide, indium gallium arsenide, and indium phosphide.
Claim 22
Independent Claim
98 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step; wherein the controlling step further comprises forming a semiconductor barrier layer between the gallium arsenide layer and the aluminum arsenide layer.
Claim 23
Independent Claim
98 words
A method of manufacturing a gallium arsenide field effect transistor having a gallium arsenide channel layer, a source and a drain, comprising the steps of: depositing an aluminum arsenide layer over the gallium arsenide channel layer; laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer; and controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step; wherein the controlling step further comprises forming a semiconductor barrier layer between the gallium arsenide layer and the aluminum arsenide layer.
Claim 24
Dependent Claim
32 words
The method of claim 15, wherein the semiconductor barrier layer is formed from the group consisting of aluminum gallium arsenide, indium gallium phosphide, gallium nitride, aluminum gallium indium phosphide, and indium phosphide.
Claim 25
Independent Claim
85 words
A method of manufacturing a gallium arsenide complementary metal-insulator-semiconductor device, having an n-type gallium arsenide channel layer, a first source and a first drain on a substrate; and a p-type gallium arsenide layer, a second source and a second drain on the substrate, the method comprising: depositing an aluminum arsenide layer over the n-type and p-type gallium arsenide channel layers; and laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer.
Claim 26
Independent Claim
85 words
A method of manufacturing a gallium arsenide complementary metal-insulator-semiconductor device, having an n-type gallium arsenide channel layer, a first source and a first drain on a substrate; and a p-type gallium arsenide layer, a second source and a second drain on the substrate, the method comprising: depositing an aluminum arsenide layer over the n-type and p-type gallium arsenide channel layers; and laterally oxidizing the aluminum arsenide layer by exposing the aluminum arsenide layer to an oxidizing gas, so as to form an aluminum oxide layer.
Claim 27
Dependent Claim
26 words
The method of claim 17, further comprising the step of controlling excess arsenic released in the aluminum oxide layer as a result of the oxidizing step.
Claim 28
Dependent Claim
24 words
The method of claim 18, wherein the controlling step comprises hydrogenizing the aluminum oxide layer by exposing the aluminum oxide layer to hydrogen ions.
Claim 29
Dependent Claim
20 words
The method of claim 18, wherein the controlling step comprises depositing an n-type layer over the layer of aluminum arsenide.
Claim 30
Dependent Claim
30 words
The method of claim 20, wherein the n-type layer is formed from the group consisting of gallium arsenide, aluminum gallium arsenide, gallium nitride, aluminum gallium indium phosphide, and indium phosphide.
Claim 31
Dependent Claim
38 words
The method of claim 18, wherein the controlling step comprises depositing a vacancy semiconductor layer over the layer of aluminum arsenide, the vacancy semiconductor layer having vacancies so as to attract the excess arsenic from the oxide layer.
Claim 32
Dependent Claim
29 words
The method of claim 22, wherein the controlling step comprises forming a semiconductor barrier layer between the n-type and p-type gallium arsenide channel layers and the aluminum arsenide layer.
Claim 33
Dependent Claim
24 words
The method of claim 23 wherein the semiconductor barrier layer is formed from the group consisting of aluminum gallium arsenide and indium gallium phosphide.
Claim 34
Dependent Claim
67 words
The method of claim 18, comprising the further step of etching the aluminum arsenide layer to form a first region of aluminum arsenide to be oxidized, to become a first gate aluminum oxide layer overlying the n-type gallium arsenide channel layer, and to form a second region of aluminum arsenide to be oxidized, to become a second aluminum oxide layer overlying the p-type gallium arsenide channel layer.
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