Patent US5795809A successfully refreshed from Google Patents.
US5795809A
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Semiconductor wafer fabrication process including gettering utilizing a combined oxidation technique
Assignee: GlobalFoundries Inc
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Filing: 1995-05-25
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Granted: 1998-08-18
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Expires: 2015-05-25
Abstract
Abstract An improved method of silicon wafer fabrication suitable for either CMOS and/or NMOS process flows. The present method utilizes few processing steps to reduce fabrication costs and enhance wafer throughput. The improved method combines sacrificial oxide growth and removal steps of CMOS and NMOS front end pre-oxide steps with existing pad oxide growth and removal steps, resulting in fewer required operations. The thermal cycles required to form gettering sites within Cz bulk silicon wafers are retained, thus allowing the number of required processing operations to be reduced without negatively impacting existing levels of expected production yields.
Inventors
- 👤 Mark I. Gardner
- 👤 H. Jim Fulford, Jr.
- 👤 Said N. Ghneim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:51
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/61
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
209 words
A method for producing a semiconductor topography, comprising: providing a single crystal silicon material having an exposed surface; growing a pad oxide upon said exposed surface after the exposed surface is subjected to a cleaning solution, wherein the growth of said pad oxide encompasses a denudation step within an intrinsic gettering processing, and wherein said denudation step occurs concurrent with said growing; depositing a nitride film upon said pad oxide, wherein the deposition of said nitride film encompasses a nucleation step within an intrinsic gettering process, and wherein said nucleation step occurs concurrent with said depositing; patterning said nitride film and underlying pad oxide to present an opening to said exposed surface; introducing dopant impurities into said single crystal silicon material through said opening to said exposed surface of said single crystal silicon material, wherein the introduction of said dopant impurities encompasses a precipitation step within an intrinsic gettering process, and wherein said precipitation step occurs concurrent with said introducing; growing a sacrificial oxide upon said exposed surface within the confines of said opening and thereafter removing said sacrificial oxide to present an elevational recess about the lateral periphery of said opening; and using said elevational recess to align a mask subsequently placed in proximity with said exposed surface.
Claim 2
Independent Claim
209 words
A method for producing a semiconductor topography, comprising: providing a single crystal silicon material having an exposed surface; growing a pad oxide upon said exposed surface after the exposed surface is subjected to a cleaning solution, wherein the growth of said pad oxide encompasses a denudation step within an intrinsic gettering processing, and wherein said denudation step occurs concurrent with said growing; depositing a nitride film upon said pad oxide, wherein the deposition of said nitride film encompasses a nucleation step within an intrinsic gettering process, and wherein said nucleation step occurs concurrent with said depositing; patterning said nitride film and underlying pad oxide to present an opening to said exposed surface; introducing dopant impurities into said single crystal silicon material through said opening to said exposed surface of said single crystal silicon material, wherein the introduction of said dopant impurities encompasses a precipitation step within an intrinsic gettering process, and wherein said precipitation step occurs concurrent with said introducing; growing a sacrificial oxide upon said exposed surface within the confines of said opening and thereafter removing said sacrificial oxide to present an elevational recess about the lateral periphery of said opening; and using said elevational recess to align a mask subsequently placed in proximity with said exposed surface.
Claim 3
Dependent Claim
33 words
The method as recited in claim 1, wherein said providing step comprises slicing into wafers an ingot of said single crystal silicon, wherein said exposed surface is a planar surface of said wafer.
Claim 4
Dependent Claim
98 words
The method as recited in claim 1, further comprising: removing the remaining portion of said nitride film and underlying pad oxide, after the sacrificial oxide has been removed, to present a partially recessed exposed surface; growing a second pad oxide upon the partially recessed exposed surface and thereafter depositing a second nitride film upon the second pad oxide; removing portions of said second nitride film and underlying said second pad oxide to present an opening to said partially recessed exposed surface; and growing a field oxide upon said partially recessed exposed surface within the confines of said opening.
Claim 5
Dependent Claim
48 words
The method as recited in claim 3, further comprising removing the remaining portion of said second nitride film and said second pad oxide after said field oxide is grown to present an active area of said partially recessed exposed surface into which an ion species is thereafter implanted.
Claim 6
Dependent Claim
23 words
The method as recited in claim 1, wherein said sacrificial oxide is configured over a well portion of said single crystal silicon material.
Claim 7
Dependent Claim
30 words
The method as recited in claim 1, wherein said sacrificial oxide is greater than 1500 angstroms in thickness and said pad oxide is between 200 to 400 angstroms in thickness.
Claim 8
Dependent Claim
46 words
The method as recited in claim 1, wherein the denudation step comprises subjecting the single crystal silicon material, in the absence of moisture, to an oxygen flow less than approximately 400 sccm at a temperature between 1000° C. and 1150° C. for one to four hours.
Claim 9
Dependent Claim
44 words
The method as recited in claim 1, wherein the nucleation step comprises placing the pad oxide-covered exposed surface within a chemical vapor deposition chamber, heating to a temperature of approximately 780° C., and adsorbing a nitrogen-bearing reactant gas upon the pad-oxide covered exposed surface.
Claim 10
Dependent Claim
43 words
The method as recited in claim 1, wherein the precipitation step comprises introducing the dopant impurities by chemical diffusion into the single crystal silicon material and subsequently subjecting the single crystal silicon material to a drive-in at a temperature of approximately 1050° C.
Claim 11
Dependent Claim
43 words
The method as recited in claim 1, wherein the precipitation step comprises introducing the dopant impurities by ion implantation into the single crystal silicon material and subsequently subjecting the single crystal silicon material to an anneal at a temperature of approximately 1050° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-17 | 2002-02-16 | 2002-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-17 | 2006-02-16 | 2006-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-17 | 2010-02-16 | 2010-08-18 | $7700.00 | Window Closed / Lapsed |