Patent US5756390A successfully refreshed from Google Patents.
US5756390A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Modified LOCOS process for sub-half-micron technology
Assignee: Toshiba Corp
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Filing: 1996-02-27
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Granted: 1998-05-26
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Expires: 2016-02-27
Abstract
Abstract A process for producing a wafer comprising depositing a pad oxide layer, depositing a silicon nitride layer, patterning and etching the silicon nitride to expose the wafer and define masking stacks, forming field oxide isolation regions in the exposed regions and then removing the masking stack in such a way that reduction in the thickness of the field isolation regions are minimized. In particular, in one implementation, the cap oxide on the top of the masking stack is removed through chemical mechanical polishing (CMP). In another implementation, a sacrificial passivation layer, such as silicon dioxide or polysilicon, is deposited over the field isolation regions and the masking stacks. The sacrificial passivation layer and the cap oxide on the upper surface of the masking stacks are then removed through either CMP or selective etching. With the passivation layer, the field isolation regions are protected against diminishment during subsequent etching of the cap oxide which permits the field isolation region to be initially grown to their desired thickness. This results is less bird's beak encroachment and problems associated therewith as the field isolation regions need not be as thick initially. The sacrificial passivation layer can then be removed, subsequent to removal of the masking stack by growing a sacrificial layer which either absorbs the passivation layer, or does not significantly increase its thickness, and then etching the sacrificial layer to expose the underlying wafer and isolation regions.
Inventors
- 👤 Werner Juengling
- 👤 Viju K. Mathews
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:43
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/10; H10W10/13
Claims Analysis
Total Claims: 49
Claim 1
Independent Claim
118 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material over a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; and selectively removing only an upper surface of said masking stacks without reducing said first thickness of said isolation regions by using chemical mechanical polishing (CMP) to remove said upper portion of said masking stacks.
Claim 2
Independent Claim
118 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material over a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; and selectively removing only an upper surface of said masking stacks without reducing said first thickness of said isolation regions by using chemical mechanical polishing (CMP) to remove said upper portion of said masking stacks.
Claim 3
Dependent Claim
31 words
The method of claim 1, further comprising the step of removing the portion of said masking stacks remaining after said selectively removing step to expose said first surface of said wafer.
Claim 4
Dependent Claim
35 words
The method of claim 2, further comprising the step of positioning a pad oxide layer on said first surface of said wafer prior to positioning said masking material over said first surface of said wafer.
Claim 5
Dependent Claim
29 words
The method of claim 3, wherein the step of positioning a masking material on a first surface of said wafer comprises positioning silicon nitride on said pad oxide layer.
Claim 6
Dependent Claim
24 words
The method of claim 4, wherein the step of forming isolation regions comprises growing silicon dioxide regions in said exposed regions of said wafer.
Claim 7
Dependent Claim
40 words
The method of claim 5, wherein said step of using chemical mechanical polishing (CMP) comprises removing a cap oxide formed on said top surface of said masking stack as a result of said growth of said silicon dioxide isolation region.
Claim 8
Dependent Claim
31 words
The method of claim 6, wherein said step of removing the remaining portion of said masking material comprises etching said remaining portions of said masking material using a wet etching procedure.
Claim 9
Dependent Claim
95 words
The method of claim 7, further comprising the steps of: positioning a layer of sacrificial material over said first surface of said wafer after removal of said masking material; and subsequently etching said layer of sacrificial material so as to expose said wafer and said isolation regions wherein said steps of positioning a layer of sacrificial material and subsequently removing said layer results in any remaining oxide regions of said masking stack, occurring as a result of said step of forming said field isolation regions, being substantially removed from said first surface of said wafer.
Claim 10
Dependent Claim
34 words
The method of claim 2, further comprising the step of positioning a sacrificial passivation layer over said masking stacks and said isolation regions prior to selectively removing said upper surfaces of said masking stacks.
Claim 11
Dependent Claim
29 words
The method of claim 9, wherein said step of positioning said sacrificial passivation layer comprises forming a layer of silicon dioxide over said masking stacks and said isolation regions.
Claim 12
Dependent Claim
54 words
The method of claim 10, wherein said step of selectively removing said upper surface of said masking stacks comprises using chemical mechanical polishing to remove a portion of said sacrificial passivation layer and any oxide formed on said upper surface of said masking stack to expose said resulting remaining portion of said masking material.
Claim 13
Dependent Claim
98 words
The method of claim 11, further comprising the steps of: positioning a layer of sacrificial material over said first surface of said wafer after removing said masking material; and subsequently removing said layer of sacrificial material so as to expose said wafer and said isolation regions wherein said steps of positioning a layer of sacrificial material and subsequently removing said layer results in any remaining oxide regions of said masking stack, occurring as a result of said step of forming said field isolation regions, and said passivation layer being substantially removed from said first surface of said wafer.
Claim 14
Dependent Claim
61 words
The method of claim 12, wherein said step of positioning a sacrificial passivation layer on said first surface of said wafer comprises forming a sacrificial passivation layer having a thickness selected so that, upon removal of said layer of sacrificial material and said sacrificial passivation layer, said isolation regions are exposed and have a thickness substantially equal to said first thickness.
Claim 15
Dependent Claim
28 words
The method of claim 9, wherein said step of positioning a sacrificial passivation layer comprises positioning a layer of polysilicon over said masking stacks and said isolation regions.
Claim 16
Dependent Claim
20 words
The method of claim 14, further comprising the step of positioning a protective buffering material over said layer of polysilicon.
Claim 17
Dependent Claim
90 words
The method of claim 15, wherein the step of selectively removing an upper surface of said masking stack comprises: selectively removing any of said protective buffer material positioned over said upper surface of said masking stacks to expose only said polysilicon layer positioned on said upper surface of said masking stacks; and using chemical mechanical polishing (CMP) to remove said polysilicon layer positioned on said upper surface of said masking stacks and any oxide formed on said upper surface of said masking stacks so as to expose said masking material.
Claim 18
Dependent Claim
98 words
The method of claim 16, further comprising the steps of: growing a sacrificial oxide layer after said removal of said portion of said masking stack remaining after said selective removal step, wherein said step of growing said sacrificial oxide layer results in said polysilicon layer positioned on top of said field isolation regions transforming into silicon oxide; and removing said sacrificial oxide layer and said transformed polysilicon so that said wafer is exposed and said isolation regions are exposed, wherein said removing step results in said field isolation regions having a thickness substantially equal to said first thickness.
Claim 19
Independent Claim
128 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; removing the upper surface of said masking stacks through chemical mechanical polishing (CMP) to expose said resulting remaining portion of said masking material; and removing said resulting remaining portion of said masking material to expose said first surface of said wafer between said isolation regions.
Claim 20
Independent Claim
128 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; removing the upper surface of said masking stacks through chemical mechanical polishing (CMP) to expose said resulting remaining portion of said masking material; and removing said resulting remaining portion of said masking material to expose said first surface of said wafer between said isolation regions.
Claim 21
Dependent Claim
35 words
The method of claim 18, further comprising the step of positioning a pad oxide layer on said first surface of said wafer prior to positioning a masking material on a first surface of said wafer.
Claim 22
Dependent Claim
29 words
The method of claim 19, wherein the step of positioning a masking material on a first surface of said wafer comprises positioning silicon nitride on said pad oxide layer.
Claim 23
Dependent Claim
24 words
The method of claim 20, wherein the step of forming isolation regions comprises growing silicon dioxide regions in said exposed regions of said wafer.
Claim 24
Dependent Claim
96 words
The method of claim 21, further comprising the steps of: positioning a layer of sacrificial material over said first surface of said wafer subsequent to said removal of said masking material; and subsequently etching said layer of sacrificial material so as to expose said wafer and said isolation regions wherein said steps of positioning a layer of sacrificial material and subsequently removing said layer results in any remaining oxide regions of said masking stack, occurring as a result of said step of forming said isolation regions, being substantially removed from said first surface of said wafer.
Claim 25
Dependent Claim
34 words
The method of claim 18, further comprising the step of positioning a sacrificial passivation layer on said masking stacks and said isolation regions prior to selectively removing said upper surfaces of said masking stacks.
Claim 26
Dependent Claim
30 words
The method of claim 23, wherein said step of positioning said sacrificial passivation layer material comprises forming a layer of silicon dioxide over said masking stacks and said isolation regions.
Claim 27
Dependent Claim
59 words
The method of claim 24, wherein said step of selectively removing said upper surface of said masking stacks comprises using chemical mechanical polishing (CMP) to remove the portion of said sacrificial passivation layer positioned on said upper surface of said masking stack and any oxide formed on said upper surface of said masking stack to expose said masking material.
Claim 28
Dependent Claim
97 words
The method of claim 25, further comprising the steps of: positioning a layer of sacrificial material over said first surface of said wafer after removing said masking material; and subsequently removing said layer of sacrificial material so as to expose said wafer and said isolation regions wherein said steps of positioning said layer of sacrificial material and subsequently removing said layer results in any remaining oxide regions of said masking stack, occurring as a result of said step of forming said isolation regions, and said passivation layer being substantially removed from said first surface of said wafer.
Claim 29
Dependent Claim
61 words
The method of claim 26, wherein said step of forming a sacrificial passivation layer on said first surface of said wafer comprises forming a sacrificial passivation layer having a thickness selected so that, upon removal of said layer of sacrificial material and said sacrificial passivation layer, said isolation regions are exposed and have a thickness substantially equal to said first thickness.
Claim 30
Independent Claim
170 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material of a first type of material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; positioning an oxidizable sacrificial passivation layer of a second type of material over said isolation regions; selectively removing only an upper portion of said masking stacks without reducing said first thickness of said isolation regions; and removing said masking material remaining after said selectively removing step wherein said first type of masking material and said second type of passivation material are selected so that said sacrificial passivation layer remains over said isolation regions following said step of removing said masking material.
Claim 31
Independent Claim
170 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material of a first type of material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; positioning an oxidizable sacrificial passivation layer of a second type of material over said isolation regions; selectively removing only an upper portion of said masking stacks without reducing said first thickness of said isolation regions; and removing said masking material remaining after said selectively removing step wherein said first type of masking material and said second type of passivation material are selected so that said sacrificial passivation layer remains over said isolation regions following said step of removing said masking material.
Claim 32
Dependent Claim
95 words
The method of claim 28, further comprising the steps of removing said sacrificial passivation layer after removing said masking stacks so as to expose said surface of said wafer and said isolation regions, wherein said step of removing said sacrificial passivation layer results in any remaining oxide material on said first surface of said wafer, occurring as a result of said step of forming said field isolation regions, being removed and wherein said thickness of said field isolation regions is substantially equal to said first thickness after said step of removing said sacrificial passivation layer.
Claim 33
Dependent Claim
28 words
The method of claim 29, wherein said step of positioning said sacrificial passivation layer comprises positioning a layer of polysilicon over said masking stacks and said isolation regions.
Claim 34
Dependent Claim
20 words
The method of claim 30, further comprising the step of positioning a protective buffering material over said layer of polysilicon.
Claim 35
Dependent Claim
71 words
The method of claim 31, wherein the step of selectively removing an upper portion of said masking stack comprises: selectively etching said buffer material to expose only said upper surface of said masking stacks; and using chemical mechanical polishing (CMP) to remove said polysilicon layer positioned on said upper surface of said masking stack and any oxide formed on said upper surface of said masking stack to expose said masking material.
Claim 36
Dependent Claim
28 words
The method of claim 32, wherein the step of depositing said buffer material over said sacrificial passivation layer comprises depositing a photoresist material over said sacrificial passivation layer.
Claim 37
Dependent Claim
35 words
The method of claim 32, further comprising the step of removing said buffer material remaining on the portions of said sacrificial passivation layer positioned over said isolation regions after said masking material has been removed.
Claim 38
Dependent Claim
99 words
The method of claim 34, further comprising the steps of: growing a sacrificial oxide layer after removal of said portion of said masking stack remaining after said selective exposing step, wherein said step of growing said sacrificial oxide layer results in said polysilicon layer positioned on top of said field isolation regions transforming into silicon dioxide; and removing said sacrificial oxide layer and said oxidized polysilicon so that both said first surface of said wafer and said isolation regions are exposed, wherein said field isolation region has a thickness substantially equal to said first thickness after said removing step.
Claim 39
Dependent Claim
31 words
The method of claim 28, wherein said step of positioning said sacrificial passivation layer comprises forming a sacrificial passivation layer of silicon dioxide over said masking stacks and said isolation regions.
Claim 40
Dependent Claim
53 words
The method of claim 36, wherein said step of selectively exposing only said portion of said upper surface of said masking stacks comprises using chemical mechanical polishing (CMP) to remove said portion of said passivation layer and any oxide formed on said upper surface of said masking stack to expose said masking material.
Claim 41
Dependent Claim
103 words
The method of claim 37, further comprising the steps of: positioning a layer of sacrificial material over said first surface of said wafer after removing said masking material; and subsequently removing said layer of sacrificial material so as to expose said first surface of said wafer and said isolation regions wherein said steps of positioning a layer of sacrificial material and subsequently removing said layer results in any remaining oxide regions of said masking stack, occurring as a result of said step of forming said field isolation regions, and said sacrificial passivation layer being substantially removed from said first surface of said wafer.
Claim 42
Dependent Claim
61 words
The method of claim 38, wherein said step of forming a sacrificial passivation layer on said first surface of said wafer comprises forming a sacrificial passivation layer having a thickness selected so that, upon removal of said layer of sacrificial material and said sacrificial passivation layer, said isolation regions are exposed and have a thickness substantially equal to said first thickness.
Claim 43
Independent Claim
120 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; growing isolation regions in said exposed regions of said first surface of said wafers, wherein said isolation regions are grown to their final thicknesses; and selectively removing only an upper surface of said masking stacks without reducing said final thickness of said isolation regions by using chemical mechanical polishing (CMP) to remove said upper surface of said masking stacks.
Claim 44
Independent Claim
120 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; growing isolation regions in said exposed regions of said first surface of said wafers, wherein said isolation regions are grown to their final thicknesses; and selectively removing only an upper surface of said masking stacks without reducing said final thickness of said isolation regions by using chemical mechanical polishing (CMP) to remove said upper surface of said masking stacks.
Claim 45
Dependent Claim
40 words
The method of claim 40, further comprising the step of removing the portion of said masking stacks remaining after said selectively removing step to expose said first surface of said wafer without reducing said final thickness of said isolation regions.
Claim 46
Dependent Claim
34 words
The method of claim 40, further comprising the step of positioning a sacrificial passivation layer over said masking stacks and said isolation regions prior to selectively removing said upper surfaces of said masking stacks.
Claim 47
Dependent Claim
47 words
The method of claim 41, wherein said step of using chemical mechanical polishing comprises removing said portion of said sacrificial passivation layer and any oxide formed on said upper surface of said masking stack during said step of growing said isolation regions to expose said masking material.
Claim 48
Independent Claim
216 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material of a first type of material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; positioning an oxidizable sacrificial passivation layer of a second type of material over said isolation regions; selectively removing only an upper portion of said masking stacks without reducing said first thickness of said isolation regions; removing said masking material remaining after said selectively removing step wherein said first type of masking material and said second type of passivation material are selected so that said sacrificial passivation layer remains over said isolation regions following said step of removing said masking material; performing an oxidation step to transform said material of said second type into an sacrificial oxide layer; and removing said sacrificial oxide layer so that said isolation regions are exposed, wherein said isolation regions have a thickness substantially equal to said first thickness after said removing step.
Claim 49
Independent Claim
216 words
A method of producing a wafer having a plurality of isolation regions, said method comprising the steps of: positioning a masking material of a first type of material on a first surface of said wafer; selectively removing portions of said masking material to expose regions of said first surface of said wafer and to define a plurality of masking stacks having side walls and an upper surface; forming isolation regions in said exposed regions of said first surface of said wafer, wherein said isolation regions have a first thickness; positioning an oxidizable sacrificial passivation layer of a second type of material over said isolation regions; selectively removing only an upper portion of said masking stacks without reducing said first thickness of said isolation regions; removing said masking material remaining after said selectively removing step wherein said first type of masking material and said second type of passivation material are selected so that said sacrificial passivation layer remains over said isolation regions following said step of removing said masking material; performing an oxidation step to transform said material of said second type into an sacrificial oxide layer; and removing said sacrificial oxide layer so that said isolation regions are exposed, wherein said isolation regions have a thickness substantially equal to said first thickness after said removing step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-05-25 | 2001-11-24 | 2002-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-25 | 2005-11-24 | 2006-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-25 | 2009-11-24 | 2010-05-26 | $7700.00 | Window Closed / Lapsed |