US5681484A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etching to form cross-over, non-intersecting channel networks for use in partitioned microelectronic and fluidic device arrays for clinical diagnostics and chemical synthesis
Assignee: Sarnoff Corp
•
Filing: 1995-05-31
•
Granted: 1997-10-28
•
Expires: 2015-05-31
Abstract
Abstract A system for processing a plurality of tests or syntheses in parallel comprising a sample channel for moving samples into a microlaboratory array of a plurality of wells connected by one or more channels for the testing-or synthesis of samples, a station for housing the array and an optical system comprising at least one light source and at least one light detector for measuring the samples in the array, and a means of electrically connecting said array to an apparatus capable of monitoring and controlling the flow of fluids into the array. Samples are loaded from a common loading channel into the array, processed in the wells and measurements taken by the optical system. The array can process many samples, or synthesize many compounds in parallel, reducing the time required for such processes. Etching from both sides of a substrate using patterned photoresist and metal layers to form a network of capillary channels for separately transporting a plurality of different liquids. The channels can cross over each other without intersecting.
Inventors
- 👤 Peter John Zanzucchi
- 👤 Satyam Choudary Cherukuri
- 👤 Sterling Edward McBride
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:42
CPC Classifications
G; G01; G01N; G01N33/00; G01N33/48; G01N33/50; G01N33/53; B; B01; B01L; B01L7/00; B01L7/52; B01J; B01J19/00; B01J19/0046; B01J19/0093; B01L3/00; B01L3/50; B01L3/502; B01L3/5025; B01L3/5027; B01L3/502707; B01L3/50273; B01L3/502738; C; C07; C07K; C07K1/00; C07K1/04; C07K1/042; G01N27/00; G01N27/26; G01N33/543; G01N33/54366; G01N33/558; G01N33/561; G01N35/00; B01F; B01F33/00; B01F33/30; B01J2219/00; B01J2219/00274; B01J2219/00277; B01J2219/00279; B01J2219/00306; B01J2219/00313; B01J2219/00315; B01J2219/00317; B01J2219/00351; B01J2219/00353; B01J2219/00364; B01J2219/00367; B01J2219/00369; B01J2219/00389; B01J2219/00479; B01J2219/00488; B01J2219/00495; B01J2219/00497; B01J2219/005; B01J2219/00527; B01J2219/00536; B01J2219/0054; B01J2219/00547; B01J2219/00583; B01J2219/00585; B01J2219/0059; B01J2219/00596; B01J2219/00603; B01J2219/00605; B01J2219/00612; B01J2219/00614; B01J2219/00621; B01J2219/00623; B01J2219/00626; B01J2219/00632; B01J2219/00637; B01J2219/00646; B01J2219/00648; B01J2219/00659; B01J2219/0068; B01J2219/00686; B01J2219/00698; B01J2219/00718; B01J2219/0072; B01J2219/00722; B01J2219/00725; B01J2219/00781; B01J2219/00819; B01J2219/00824; B01J2219/00826; B01J2219/00828; B01J2219/00831; B01J2219/00891; B01J2219/0095; B01J2219/00952; B01L2200/00; B01L2200/06; B01L2200/0605; B01L2200/12; B01L2200/14; B01L2200/143; B01L2200/147; B01L2300/00; B01L2300/08; B01L2300/0803; B01L2300/0806; B01L2300/0861; B01L2300/0864; B01L2300/0867; B01L2300/087; B01L2300/0874; B01L2300/18; B01L2300/1805; B01L2300/1827; B01L2400/00; B01L2400/04; B01L2400/0403; B01L2400/0406; B01L2400/0409; B01L2400/0415; B01L2400/06; B01L2400/0633; B01L3/502715; C40; C40B; C40B40/00; C40B40/04; C40B40/06; C40B40/10; C40B60/00; C40B60/14; C40B70/00; Y; Y10; Y10S; Y10S436/00; Y10S436/805; Y10S436/807; Y10T; Y10T436/00; Y10T436/11
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
346 words
A method of forming in a planar substrate a network of capillary channels for separately transporting a plurality of different liquids, wherein channels for a particular liquid cross over channels for another liquid without the channels intersecting, the channels being made up of via segments and planar segments formed on a first surface of the substrate or a second surface of the substrate, wherein the first surface of the substrate is a top or bottom surface of the substrate and the second surface of the substrate is a top or bottom surface of the substrate and is opposite the first surface, wherein the method comprises: (a) providing the substrate, which comprises glass, fused silica, quartz or silicon; (b) depositing a first etch resistance coating and second etch resistance coating to the first and second surfaces, respectively, of the substrate; (c) applying a first photoresist layer over the first etch resistance coating; (d) exposing and developing the first photoresist layer and etching the first etch resistance coating to form a plurality of first openings at the position of via segments in the first photoresist layer and the first etch resistance coating; (e) etching the substrate at the first openings through to the second etch resistance coating to form first surface via segments; (f) exposing and developing the first photoresist layer and etching the first etch resistance coating to form a plurality of second openings at the positions of the first surface planar channel segments in the first photoresist layer and the first etch resistance coating; (g) etching the substrate under the second openings to form first surface planar channel segments; (h) applying a second photoresist layer over the second etch resistance coating; (i) exposing and developing the second photoresist layer and etching the second etch resistance coating to form a plurality of third openings at the positions of second surface planar channel segments; (j) etching the substrate at the third openings to form second surface planer channel segments; and (k) sealing cover plates to both sides of the substrate to enclose the channels, thereby forming said network.
Claim 2
Independent Claim
346 words
A method of forming in a planar substrate a network of capillary channels for separately transporting a plurality of different liquids, wherein channels for a particular liquid cross over channels for another liquid without the channels intersecting, the channels being made up of via segments and planar segments formed on a first surface of the substrate or a second surface of the substrate, wherein the first surface of the substrate is a top or bottom surface of the substrate and the second surface of the substrate is a top or bottom surface of the substrate and is opposite the first surface, wherein the method comprises: (a) providing the substrate, which comprises glass, fused silica, quartz or silicon; (b) depositing a first etch resistance coating and second etch resistance coating to the first and second surfaces, respectively, of the substrate; (c) applying a first photoresist layer over the first etch resistance coating; (d) exposing and developing the first photoresist layer and etching the first etch resistance coating to form a plurality of first openings at the position of via segments in the first photoresist layer and the first etch resistance coating; (e) etching the substrate at the first openings through to the second etch resistance coating to form first surface via segments; (f) exposing and developing the first photoresist layer and etching the first etch resistance coating to form a plurality of second openings at the positions of the first surface planar channel segments in the first photoresist layer and the first etch resistance coating; (g) etching the substrate under the second openings to form first surface planar channel segments; (h) applying a second photoresist layer over the second etch resistance coating; (i) exposing and developing the second photoresist layer and etching the second etch resistance coating to form a plurality of third openings at the positions of second surface planar channel segments; (j) etching the substrate at the third openings to form second surface planer channel segments; and (k) sealing cover plates to both sides of the substrate to enclose the channels, thereby forming said network.
Claim 3
Dependent Claim
14 words
The method of claim 1, wherein the substrate is glass, fused silica or quartz.
Claim 4
Dependent Claim
10 words
The method of claim 1, wherein the substrate is glass.
Claim 5
Dependent Claim
11 words
The method of claim 3, wherein the substrate is borosilicate glass.
Claim 6
Dependent Claim
16 words
The method of claim 3, wherein the first and second etch resistance coatings are metal layers.
References Cited (Backward Citations)
US3494723A
Cited
US3615241A
Cited
US4417946A
Cited
US4276048A
Cited
US4385115A
Cited
US4589952A
Cited
US5220189A
Cited
US4683914A
Cited
US4533430A
Cited
US4495025A
Cited
US5141868A
Cited
US5000817A
Cited
EP0198413A2
Cited
US4753775A
Cited
US5144139A
Cited
US5204525A
Cited
US5164598A
Cited
US4963498A
Cited
US4948961A
Cited
US4756884A
Cited
US5140161A
Cited
EP0483117A2
Cited
US4999283A
Cited
US4891120A
Cited
US4999286A
Cited
US5001048A
Cited
US5212988A
Cited
US5189914A
Cited
US5129262A
Cited
US4999284A
Cited
US4960486A
Cited
US4908112A
Cited
US5200051A
Cited
US5063081A
Cited
US5229297A
Cited
WO1990009596A1
Cited
US4981552A
Cited
US5312590A
Cited
GB2248840A
Cited
US5424186A
Cited
US5143854A
Cited
EP0402995A2
Cited
US5156810A
Cited
US5241363A
Cited
US5176203A
Cited
US5205902A
Cited
US5003822A
Cited
US5006749A
Cited
US5066938A
Cited
US5087930A
Cited
US5252743A
Cited
US5188963A
Cited
US5147607A
Cited
EP0430248A2
Cited
US5073029A
Cited
US5327777A
Cited
US5118384A
Cited
US5194133A
Cited
WO1991016966A1
Cited
US5112455A
Cited
US5238853A
Cited
US5250263A
Cited
WO1992010092A1
Cited
US5129261A
Cited
US5230864A
Cited
WO1993006121A1
Cited
US5270170A
Cited
US5384261A
Cited
US5324633A
Cited
US5296114A
Cited
US5277754A
Cited
US5262127A
Cited
US5359115A
Cited
US5412087A
Cited
US5296375A
Cited
WO1993022058A1
Cited
US5304487A
Cited
US5427946A
Cited
WO1994005414A1
Cited
US5420328A
Cited
US5324483A
Cited
US5324483B1
Cited
US5288463A
Cited
WO1994010128A1
Cited
US5585011A
Cited
WO1995012608A1
Cited
US5463564A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-27 | 2001-04-28 | 2001-10-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-27 | 2005-04-28 | 2005-10-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-27 | 2009-04-28 | 2009-10-28 | $7700.00 | Window Closed / Lapsed |