US5665688A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photoresist stripping composition
Assignee: Olin Microelectronic Chemicals Inc
•
Filing: 1996-01-23
•
Granted: 1997-09-09
•
Expires: 2016-01-23
Abstract
Abstract A photoresist stripping composition containing: (a) 20-70% by weight of an organic polar solvent having a dipole moment of more than 3.5; (b) 70-20% by weight of alkanolamine compounds; and (c) 0.1-10% by weight of 6,6',6"-(1,3,5-triazine-2,4,6-triyltriimino) tris(hexanoic acid).
Inventors
- 👤 Kenji Honda
- 👤 Donald F. Perry
- 👤 Taishih Maw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:53
CPC Classifications
C; C11; C11D; C11D7/00; C11D7/50; C11D7/5004; C11D7/5013; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425; C11D7/22; C11D7/32
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
66 words
A photoresist stripper composition comprising: (a) from about 20 to about 70% by weight of a cyclic amide organic polar solvent having a dipole moment of more than 3.5; (b) from about 70 to about 20% by weight of an alkanolamine compound; and (c) from about 0.1 to about 10% by weight of 6,6',6"-(1,3,5-triazine-2,4,6-triyltriimino) tris(hexanoic acid); all percents based on the weight of the stripper composition.
Claim 2
Dependent Claim
66 words
A photoresist stripper composition comprising: (a) from about 20 to about 70% by weight of a cyclic amide organic polar solvent having a dipole moment of more than 3.5; (b) from about 70 to about 20% by weight of an alkanolamine compound; and (c) from about 0.1 to about 10% by weight of 6,6',6"-(1,3,5-triazine-2,4,6-triyltriimino) tris(hexanoic acid); all percents based on the weight of the stripper composition.
Claim 3
Dependent Claim
22 words
The stripper composition of claim 1 wherein said cyclic amide is selected from the group consisting of N-alkyl-2-pyrolidone, N-hydroxyalkyl-2-pyrolidone, and mixtures thereof.
Claim 4
Dependent Claim
23 words
The stripper composition of claim 1 wherein said alkanolamine is selected from the group consisting of monoethanolamine, 2-(2-aminoethoxy)ethanol and 2-(2-aminoethylamino)ethanol, diethanolamine, and triethanolamine.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-08 | 2001-03-10 | 2001-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-08 | 2005-03-10 | 2005-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-08 | 2009-03-10 | 2009-09-09 | $7700.00 | Window Closed / Lapsed |