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US4904571A
Expired / Lapsed
US
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Remover solution for photoresist
Assignee: Tokyo Ohka Kogyo Co Ltd
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Filing: 1988-07-15
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Granted: 1990-02-27
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Expires: 2008-07-15
Abstract
Abstract A remover solution for photoresist comprising (a) a solvent which is typically water, (b) an inorganic or organic alkaline compound such as sodium and potassium hydroxides, and (c) a borohydride compound such as sodium and lithium borohydrides and organic amine borane compounds. When used for removing patterned photoresist layer in the manufacturing process of, for example, electronic circuit board substrates. The method gives quite satisfactory results without discoloration or denaturation of the copper surface and solder surface, consequently leading to the production of high-quality products.
Inventors
- 👤 Tsuyoshi Miyashita
- 👤 Shigeru Ohtawa
- 👤 Hiroyuki Tohda
- 👤 Shozo Toda
- 👤 Hisashi Nakane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 02:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425; H; H05; H05K; H05K3/00; H05K3/0073
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
180 words
A method for removing a patterned photoresist film provided on a substrate for a printed circuit during the manufacture of said printed circuit, consisting essentially of the step of immersing said substrate provided with patterned photoresist film in a remover solution for a time period sufficiently long and at a temperature sufficiently high for removing said patterned photoresist film from said substrate, wherein said photoresist is one which is developable by a weakly alkaline developer solution, said immersion step for removing the patterned photoresist film is carried out when the patterned photoresist film is no longer needed during the manufacture of said printed circuit, and said remover solution comprises: (a) a solvent; (b) an alkaline compound dissolved in said solvent; and (c) a borohydride compound dissolved in said solvent, wherein the concentration of said alkaline compound dissolved in the solvent is in the range from 0.1 to 10% by weight, and the amount of said borohydride compound dissolved in the solvent is in the range from 0.01 to 50 moles per mole of the alkaline compound dissolved in the solvent.
Claim 2
Independent Claim
180 words
A method for removing a patterned photoresist film provided on a substrate for a printed circuit during the manufacture of said printed circuit, consisting essentially of the step of immersing said substrate provided with patterned photoresist film in a remover solution for a time period sufficiently long and at a temperature sufficiently high for removing said patterned photoresist film from said substrate, wherein said photoresist is one which is developable by a weakly alkaline developer solution, said immersion step for removing the patterned photoresist film is carried out when the patterned photoresist film is no longer needed during the manufacture of said printed circuit, and said remover solution comprises: (a) a solvent; (b) an alkaline compound dissolved in said solvent; and (c) a borohydride compound dissolved in said solvent, wherein the concentration of said alkaline compound dissolved in the solvent is in the range from 0.1 to 10% by weight, and the amount of said borohydride compound dissolved in the solvent is in the range from 0.01 to 50 moles per mole of the alkaline compound dissolved in the solvent.
Claim 3
Dependent Claim
25 words
A method as in claim 1, wherein said solvent is selected from the group consisting of water, alcohols, ethers, ketones, chlorinated hydrocarbons and aromatic hydrocarbons.
Claim 4
Dependent Claim
11 words
A method as in claim 2, wherein said solvent is water.
Claim 5
Dependent Claim
24 words
A method as in claim 1, wherein said alkaline compound is selected from the group consisting of inorganic alkaline compounds and organic alkaline compounds.
Claim 6
Dependent Claim
15 words
A method as in claim 4, wherein said alkaline compound is an inorganic alkaline compound.
Claim 7
Dependent Claim
35 words
A method as in claim 5, wherein said inorganic alkaline compound is selected from the group consisting of alkali metal hydroxides, alkali metal carbonates, alkali metal hydrogen carbonates, alkali metal phosphates and alkali metal pyrophosphates.
Claim 8
Dependent Claim
38 words
A method as in claim 1, wherein said borohydride compound is selected from the group consisting of sodium borohydride, lithium borohydride, dimethyl amine borane, trimethyl amine borane, pyridine borane, tert-butyl amine borane, triethyl amine borane and morpholine borane.
Claim 9
Dependent Claim
18 words
A method as in claim 1, wherein said photoresist coating is formed by using a liquid photoresist composition.
Claim 10
Dependent Claim
19 words
A method as in claim 1, wherein said photoresist coating is formed by using a dry film photoresist composition.
Claim 11
Dependent Claim
14 words
A method as in claim 1, wherein said substrate is a copper-foiled laminated plate.
References Cited (Backward Citations)
US4517227A
Cited
US4761303A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-26 | 1993-08-28 | 1994-02-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-26 | 1997-08-28 | 1998-02-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-26 | 2001-08-28 | 2002-02-27 | $7700.00 | Window Closed / Lapsed |