US5585299A — Process for fabricating a semiconductor electrost…

Claim 1

Independent Claim 327 words

A process for fabricating an electrostatic discharge (ESD) protective device on a silicon substrate, comprising the steps of: (1) defining a functional region and an ESD protective region on the silicon substrate and forming a field oxide layer therebetween; (2) forming a gate oxide layer on both the functional region and the ESD protective region; (3) forming a polysilicon layer on the gate oxide layer; (4) forming, using a mask of predefined pattern to etch the polysilicon layer and the gate oxide layer, a gate electrode and exposing part of the silicon substrate, then performing an ion implantation process to the exposed part of the silicon substrate to form a lightly doped source/drain electrode; (5) forming an oxide layer on both the functional region and the ESD protective region; (6) coating a first photoresist layer on the oxide layer on the ESD protective region and then using an ESD mask for pattern definition so as to selectively remove part of the oxide layer on the functional region, thus forming an isolator on lateral side of the gate electrode in the functional region; (7) ion implanting using the gate electrode and the isolator in the functional region as a mask to form a heavily doped region to thereby form a lightly doped source/drain electrode, then removing the first photoresist layer on the oxide layer in the ESD protective region; (8) forming by sputtering deposition a metallization layer of titanium to thereby perform a rapid thermal annealing process and an etching process to form a self-aligning TiSi 2 layer on the gate electrode and exposed surface of the source/drain electrode; (9) coating a second photoresist layer on the functional region and then using the ESD mask to selectively remove part of the oxide layer on the ESD protective region; and (10) ion implanting using the gate electrode in the ESD protective region as mask to form heavily doped region, then removing the second photoresist layer on the functional region.

Claim 2

Dependent Claim 327 words

A process for fabricating an electrostatic discharge (ESD) protective device on a silicon substrate, comprising the steps of: (1) defining a functional region and an ESD protective region on the silicon substrate and forming a field oxide layer therebetween; (2) forming a gate oxide layer on both the functional region and the ESD protective region; (3) forming a polysilicon layer on the gate oxide layer; (4) forming, using a mask of predefined pattern to etch the polysilicon layer and the gate oxide layer, a gate electrode and exposing part of the silicon substrate, then performing an ion implantation process to the exposed part of the silicon substrate to form a lightly doped source/drain electrode; (5) forming an oxide layer on both the functional region and the ESD protective region; (6) coating a first photoresist layer on the oxide layer on the ESD protective region and then using an ESD mask for pattern definition so as to selectively remove part of the oxide layer on the functional region, thus forming an isolator on lateral side of the gate electrode in the functional region; (7) ion implanting using the gate electrode and the isolator in the functional region as a mask to form a heavily doped region to thereby form a lightly doped source/drain electrode, then removing the first photoresist layer on the oxide layer in the ESD protective region; (8) forming by sputtering deposition a metallization layer of titanium to thereby perform a rapid thermal annealing process and an etching process to form a self-aligning TiSi 2 layer on the gate electrode and exposed surface of the source/drain electrode; (9) coating a second photoresist layer on the functional region and then using the ESD mask to selectively remove part of the oxide layer on the ESD protective region; and (10) ion implanting using the gate electrode in the ESD protective region as mask to form heavily doped region, then removing the second photoresist layer on the functional region.

Claim 3

Dependent Claim 29 words

A process as claimed in claim 1, wherein in Step (3) the polysilicon layer on the gate dioxide layer has a thickness of between 800 Å to 1500 Å.

Claim 4

Dependent Claim 27 words

A process as claimed in claim 1, wherein in Step (4) the polysilicon layer serving as gate electrode has a length of 1.2 μm to 1.5 μm.

Claim 5

Dependent Claim 39 words

A process as claimed in claim 1, wherein in Step (4) the ion implantation process uses a source of N-type phosphor ions with an energy of about 50 KeV and a concentration of about 3×10 13 atoms/cm 2 .

Claim 6

Dependent Claim 32 words

A process as claimed in claim 1, wherein in Step (5) the oxide layer is formed through a low-pressure chemical-vapor deposition (LPCVD) method to a thickness of 1000 Å to 3000 Å.

Claim 7

Dependent Claim 43 words

A process as claimed in claim 1, wherein in Step (7) the ion implantation process uses a source of N-type arsenic ions with an energy of 50 KeV to 100 KeV and a concentration of 1×10 15 to 1×10 16 atoms/cm 2 .

Claim 8

Dependent Claim 28 words

A process as claimed in claim 1, wherein in Step (8) the sputtering deposition process deposits the titanium layer to a thickness of 300 Å to 800 Å.

Claim 9

Dependent Claim 36 words

A process as claimed in claim 1, wherein in Step (8) the etching process is a wet etching process using a solvent containing NH 4 OH/H 2 O 2 /H 2 O with a ratio 1:1:5-10.

Claim 10

Dependent Claim 26 words

A process as claimed in claim 1, wherein in Step (9) the heavily doped region in the ESD protective region includes originally formed lightly doped region.

Claim 11

Dependent Claim 259 words

A process for fabricating an electrostatic discharge (ESD) protective device on a silicon substrate, comprising the following steps of: (1) defining a functional region and an ESD protective region on the silicon substrate and forming a field oxide layer therebetween; (2) forming a gate electrode on the silicon substrate and exposing surfaces of the silicon substrate where the functional region and a source/drain electrode in the silicon substrate are to be formed, then performing an ion implantation process to the exposed surfaces so as to form a lightly doped region; (3) forming an oxide layer on both the functional region and the ESD protective region; (4) coating a first photoresist layer on the oxide layer on the ESD protective region and then using an ESD mask for pattern definition so as to form a lightly doped source/drain electrode on the functional region, then removing the first photoresist layer on the oxide layer in the ESD protective region; (5) performing a self-aligning silicide process to apply a layer of metal on the lightly doped source/drain electrode in the functional region so as to form self-aligning metal silicide layers respectively on the gate electrode and the exposed surfaces of the drain/source electrode; (6) coating a second photoresist layer on the functional region and then using the ESD mask to selectively remove part of the oxide layer on the ESD protective region; and (7) ion implanting using the gate electrode in the ESD protective region as mask to form heavily doped region, then removing the second photoresist layer on the functional region.

Claim 12

Dependent Claim 259 words

A process for fabricating an electrostatic discharge (ESD) protective device on a silicon substrate, comprising the following steps of: (1) defining a functional region and an ESD protective region on the silicon substrate and forming a field oxide layer therebetween; (2) forming a gate electrode on the silicon substrate and exposing surfaces of the silicon substrate where the functional region and a source/drain electrode in the silicon substrate are to be formed, then performing an ion implantation process to the exposed surfaces so as to form a lightly doped region; (3) forming an oxide layer on both the functional region and the ESD protective region; (4) coating a first photoresist layer on the oxide layer on the ESD protective region and then using an ESD mask for pattern definition so as to form a lightly doped source/drain electrode on the functional region, then removing the first photoresist layer on the oxide layer in the ESD protective region; (5) performing a self-aligning silicide process to apply a layer of metal on the lightly doped source/drain electrode in the functional region so as to form self-aligning metal silicide layers respectively on the gate electrode and the exposed surfaces of the drain/source electrode; (6) coating a second photoresist layer on the functional region and then using the ESD mask to selectively remove part of the oxide layer on the ESD protective region; and (7) ion implanting using the gate electrode in the ESD protective region as mask to form heavily doped region, then removing the second photoresist layer on the functional region.

Claim 13

Dependent Claim 38 words

A process as claimed in claim 10, wherein in Step (2) the ion implantation process uses a source of N-type phosphor ions with an energy of about 50 KeV and a concentration of 3×10 13 atoms/cm 2 .

Claim 14

Dependent Claim 32 words

A process as claimed in claim 10, wherein in Step (3) the oxide layer is formed through a low-pressure chemical-vapor deposition (LPCVD) method to a thickness of 1000 Å to 3000 Å.

Claim 15

Dependent Claim 24 words

A process as claimed in claim 10, wherein in Step (5) the metal is selected from the group consisting of titanium, cobalt, and platinum.

Claim 16

Dependent Claim 41 words

A process as claimed in claim 10, wherein in Step (7) the ion implantation process uses a source of N-type arsenic ions with an energy of about 50 KeV and a concentration of 1×10 15 and 1×10 16 atoms/cm 2 .

Claim 17

Dependent Claim 23 words

A process as claimed in claim 10, wherein the heavily doped region in the ESD protective region includes originally formed lightly doped region.

Claim 18

Dependent Claim 24 words

A process as claimed in claims 1 through 15, wherein the first photoresist layer and the second photoresist layer are complementary in optical characteristics.

Claim 19

Dependent Claim 22 words

A process as claimed in claim 16, wherein the first photoresist layer is positive photoresist and the second photoresist layer is negative.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1999-12-17	2000-06-17	2000-12-17	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2003-12-17	2004-06-17	2004-12-17	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2007-12-17	2008-06-17	2008-12-17	$7700.00	Window Closed / Lapsed

Process for fabricating a semiconductor electrostatic discharge (ESD) protective device

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