Patent US5578532A successfully refreshed from Google Patents.
US5578532A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer surface protection in a gas deposition process
Assignee: Novellus Systems Inc
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Filing: 1994-08-23
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Granted: 1996-11-26
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Expires: 2014-08-23
Abstract
Abstract A process comprising a platen having a substrate contact supporting a substrate during the deposition of tungsten, metal nitrides, other metals, and silicides in a chemical vapor deposition reactor. A deposition control gas composed of a suitable inert gas such as argon or a mixture of inert and reactant gases such as argon and hydrogen is introduced through a restrictive opening into an ambient in the reactor. An exclusion guard is positioned adjacent to the substrate contact and has an extension extending over a frontside peripheral region of the substrate. Deposition control gas is introduced through an opening beneath the exclusion guard extension and exits through a restrictive opening between the exclusion guard extension and a substrate frontside peripheral region. The restrictive opening provides a uniform deposition control gas flow at a pressure greater than reactor ambient pressure and process gas pressure impinging on the frontside of the substrate. Deposition control gas flows uniformly through the restrictive opening across the entire substrate frontside peripheral region, thereby preventing deposition on the substrate edge and backside.
Inventors
- 👤 Everhardus P. van de Ven
- 👤 Eliot K. Broadbent
- 👤 Jeffrey C. Benzing
- 👤 Barry L. Chin
- 👤 Christopher W. Burkhart
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:49
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/44; C23C16/455; C23C16/45519; C23C16/45521; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; C23C16/4586; C23C16/54; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0431; H10P72/0434; H10P72/0451; H10P72/0466; H10P72/70; H10P72/76; H10P72/7604; H10P72/7611; H10P72/7612; H10P72/7618; H10P72/7621; H10P72/78
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
103 words
A method of processing a wafer in a deposition chamber, comprising the steps of: placing the wafer on a wafer support surface; positioning an exclusion guard in proximity to the wafer edge and a frontside periphery of the wafer; providing approximately uniform separation between a portion of the exclusion guard and the frontside periphery of the wafer; introducing a process gas proximate to a frontside interior region of the wafer; introducing a deposition control gas between the exclusion guard portion and the wafer; and maintaining a non-negative pressure differential from the introduced deposition control gas to the frontside interior region of the wafer.
Claim 2
Independent Claim
103 words
A method of processing a wafer in a deposition chamber, comprising the steps of: placing the wafer on a wafer support surface; positioning an exclusion guard in proximity to the wafer edge and a frontside periphery of the wafer; providing approximately uniform separation between a portion of the exclusion guard and the frontside periphery of the wafer; introducing a process gas proximate to a frontside interior region of the wafer; introducing a deposition control gas between the exclusion guard portion and the wafer; and maintaining a non-negative pressure differential from the introduced deposition control gas to the frontside interior region of the wafer.
Claim 3
Dependent Claim
24 words
The method of processing a wafer in a deposition chamber as in claim 1 further comprising the step of: heating the wafer support surface.
Claim 4
Dependent Claim
20 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the exclusion guard is ceramic.
Claim 5
Dependent Claim
20 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the process gas includes tungsten.
Claim 6
Dependent Claim
21 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the deposition control gas includes argon.
Claim 7
Dependent Claim
22 words
The method of processing a wafer in a deposition chamber as in claim 5 wherein the deposition control gas further includes hydrogen.
Claim 8
Dependent Claim
36 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the exclusion guard is positioned approximately 0.05 mm from the wafer frontside periphery and extends approximately 1.5 mm across the wafer.
Claim 9
Dependent Claim
31 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the exclusion guard is positioned approximately 0.025 mm to 0.077 mm from the wafer frontside periphery.
Claim 10
Dependent Claim
29 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the deposition control gas is introduced at approximately 300 standard cubic centimeters per minute.
Claim 11
Dependent Claim
46 words
The method of processing a wafer in a deposition chamber as in claim 1 further comprising the step of: introducing deposition control gas into the deposition chamber and away from the frontside interior region of the wafer to enhance processing proximate to the wafer frontside periphery.
Claim 12
Dependent Claim
31 words
The method of processing a wafer in a deposition chamber as in claim 10 wherein the deposition control gas is introduced through approximately uniformly spaced orifices extending through the exclusion guard.
Claim 13
Dependent Claim
35 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the deposition control gas is introduced through an opening in the wafer support surface between the wafer and exclusion guard.
Claim 14
Dependent Claim
41 words
The method of processing a wafer in a deposition chamber as in claim 1 further comprising the step of: applying vacuum to a backside of the wafer through the wafer support surface to secure the wafer to the wafer support surface.
Claim 15
Dependent Claim
27 words
The method of processing a wafer in a deposition chamber as in claim 1 wherein the wafer is in substantially full contact with the wafer support surface.
Claim 16
Independent Claim
142 words
A method of protecting the edge and backside of a wafer disposed in a process chamber during processing, comprising the steps of: restraining the wafer on an interior region of a platen; guarding the wafer edge and backside with an exclusion guard; introducing a process gas comprising a mixture of a product reactant and a first reactant into the process chamber; introducing a deposition control gas through an opening in the platen surrounding the interior region comprising a gas different than the process gas into a peripheral space defined by an edge of the wafer and an interior surface of the exclusion guard; and maintaining a non-negative pressure differential from the peripheral space to a process chamber region proximate to a frontside of the wafer so that the process gas is excluded from contact with the side and backside of the wafer.
Claim 17
Independent Claim
142 words
A method of protecting the edge and backside of a wafer disposed in a process chamber during processing, comprising the steps of: restraining the wafer on an interior region of a platen; guarding the wafer edge and backside with an exclusion guard; introducing a process gas comprising a mixture of a product reactant and a first reactant into the process chamber; introducing a deposition control gas through an opening in the platen surrounding the interior region comprising a gas different than the process gas into a peripheral space defined by an edge of the wafer and an interior surface of the exclusion guard; and maintaining a non-negative pressure differential from the peripheral space to a process chamber region proximate to a frontside of the wafer so that the process gas is excluded from contact with the side and backside of the wafer.
Claim 18
Dependent Claim
23 words
The method as in claim 15 wherein the wafer is restrained by a vacuum chuck disposed in the interior region of the platen.
Claim 19
Dependent Claim
19 words
The method as in claim 15 wherein the deposition control gas includes the first reactant and an inert gas.
Claim 20
Dependent Claim
18 words
The method as in claim 17 wherein the first reactant is hydrogen and the inert gas is argon.
Claim 21
Dependent Claim
42 words
The method as in claim 15 wherein the exclusion guard includes an interior region proximate to the platen interior region, and the interior surface of the exclusion guard is defined by a basal cavity in the interior region of the exclusion guard.
Claim 22
Dependent Claim
21 words
The method as in claim 15 wherein the opening in the platen surrounding the interior region is an annular gas groove.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-26 | 2000-05-27 | 2000-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-26 | 2004-05-27 | 2004-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-26 | 2008-05-27 | 2008-11-26 | $7700.00 | Window Closed / Lapsed |