US4530635A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer transferring chuck assembly
Assignee: ASML Holding NV
•
Filing: 1983-06-15
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Granted: 1985-07-23
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Expires: 2003-06-15
Abstract
Abstract A wafer chuck assembly having an elevator for accepting a wafer and placing it precisely on a platen without changing its spatial orientation.
Inventors
- 👤 Orest Engelbrecht
- 👤 Joseph L. Laganza
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 10:40
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/7075; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57; H10P72/70; H10P72/78; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10T; Y10T279/00; Y10T279/11
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
177 words
A chuck assembly, comprising: housing means, platen means disposed in said housing, base means, wafer lifter means centrally disposed in said housing for grasping and depositing a wafer onto said platen means without disturbing its spatial orientation, said wafer lifter means comprising: base means, elevator means movable in the vertical direction relative to said base means, metal bellows means connected to said base means and said elevator means normally biasing said elevator means in the down position and preventing rotational movement of said elevator means when it is moved in the vertical direction, said base means, elevator means and metal bellows means forming an airtight volume, first conduit means formed in said base means communicating with said airtight volume, said platen means having a central opening located over said elevator means, whereby application of pressurized air to said first conduit means causes said elevator means to be raised through said central opening and withdrawal of said pressurized air source causes said elevator means to be lowered with both movements occurring without rotational movement of said elevator means.
Claim 2
Dependent Claim
177 words
A chuck assembly, comprising: housing means, platen means disposed in said housing, base means, wafer lifter means centrally disposed in said housing for grasping and depositing a wafer onto said platen means without disturbing its spatial orientation, said wafer lifter means comprising: base means, elevator means movable in the vertical direction relative to said base means, metal bellows means connected to said base means and said elevator means normally biasing said elevator means in the down position and preventing rotational movement of said elevator means when it is moved in the vertical direction, said base means, elevator means and metal bellows means forming an airtight volume, first conduit means formed in said base means communicating with said airtight volume, said platen means having a central opening located over said elevator means, whereby application of pressurized air to said first conduit means causes said elevator means to be raised through said central opening and withdrawal of said pressurized air source causes said elevator means to be lowered with both movements occurring without rotational movement of said elevator means.
Claim 3
Dependent Claim
29 words
A chuck assembly according to claim 1 wherein, said elevator means having a shaft at one end, said base means having a cylinder formed therein for receiving said shaft.
Claim 4
Dependent Claim
52 words
A chuck assembly according to claim 2 wherein said elevator means comprises, a flexible cup fixed to the other end of said elevator means, second conduit means for applying a vacuum to said flexible cup such that on coming into contact with a wafer said flexible cup secures said wafer by suction.
Claim 5
Dependent Claim
49 words
A chuck assembly according to claim 3 wherein said second conduit means comprises, one or more orifices extending through said flexible cup and opening in the surface of said flexible cup, a conduit in said base means, a bore in said shaft communicating with said orifices and said conduit.
Claim 6
Dependent Claim
28 words
A chuck assembly according to claim 4 wherein, means are provided in said platen means for applying vacuum to the surface thereof to secure a wafer deposited thereon.
Claim 7
Dependent Claim
23 words
A chuck assembly according to claim 5 wherein said housing includes, flexible means for flexibly restraining the said platen means within said housing.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-07-22 | 1989-01-21 | 1989-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-07-22 | 1993-01-21 | 1993-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-07-22 | 1997-01-21 | 1997-07-23 | $7700.00 | Window Closed / Lapsed |