US4278348A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Locking mechanism for use in a chuck for an optical alignment and exposure apparatus
Assignee: QUINTEL CORP
•
Filing: 1979-11-26
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Granted: 1981-07-14
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Expires: 1999-11-26
Abstract
Abstract A locking device for use in the chuck of an optical alignment and exposure apparatus is disclosed. The locking device comprises a plurality of flat, flexible blades fastened in pairs to a chuck plate in the chuck. Between each pair of blades there is a stationary element fastened to a base member in the chuck. Vacuum cups are fastened to the blades so that the blades are clamped tightly against the stationary element when the vacuum cups are evacuated.
Inventors
- 👤 Ernest J. Funk
- 👤 Thomas Wing
- 👤 Jack C. Lane
- 👤 Edward S. Westbrook, IV
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:15
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03B; G03B27/00; G03B27/32; G03B27/52; G03B27/58; G03B27/60; Y; Y10; Y10T; Y10T279/00; Y10T279/11
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
150 words
In a chuck for use in an optical alignment and exposure apparatus having a chuck plate supported in a base member and means for urging the chuck plate away from the base member, a locking mechanism for maintaining a fixed relationship between the chuck plate and the base member comprising: flexible blade means fastened to one of the chuck plate and base member; a brake element fastened to the other of the chuck plate and base member, and having a surface slidably in contact with a surface of the flexible blade means; and force applying means for urging the contacting surfaces of flexible blade means and the brake element together with sufficient force to prevent the flexible blade means and the brake element from sliding with respect to each other and to maintain a fixed separation between the chuck plate and the base member in response to an input stimulus.
Claim 2
Dependent Claim
150 words
In a chuck for use in an optical alignment and exposure apparatus having a chuck plate supported in a base member and means for urging the chuck plate away from the base member, a locking mechanism for maintaining a fixed relationship between the chuck plate and the base member comprising: flexible blade means fastened to one of the chuck plate and base member; a brake element fastened to the other of the chuck plate and base member, and having a surface slidably in contact with a surface of the flexible blade means; and force applying means for urging the contacting surfaces of flexible blade means and the brake element together with sufficient force to prevent the flexible blade means and the brake element from sliding with respect to each other and to maintain a fixed separation between the chuck plate and the base member in response to an input stimulus.
Claim 3
Dependent Claim
49 words
A locking mechanism as in claim 1 wherein the brake element is a block of material having two flat, parallel surfaces and the flexible blade means comprises two flat blades, each flat blade being held slidably in contact with one of the flat parallel surfaces of the brake element.
Claim 4
Dependent Claim
29 words
A locking mechanism as in claim 2 wherein the force applying means comprises cup means on each flat blade and means for evacuating the air from the cup means.
Claim 5
Dependent Claim
20 words
A locking mechanism as in claim 2 wherein the force applying means comprises a fluid actuated piston in a cylinder.
Claim 6
Dependent Claim
18 words
A locking mechanism as in claim 2 wherein the force applying means comprises an electromagnetically actuated magnetostrictive element.
Claim 7
Dependent Claim
52 words
A locking mechanism as in claim 1 wherein the brake element is a block of material having two flat, parallel surfaces and the flexible blade means comprises two interleaved sets of blades, each set of interleaved blades being held in contact with one of the flat, parallel surfaces of the brake element.
Claim 8
Dependent Claim
34 words
A locking mechanism as in claim 6 wherein the force applying means comprises cup means on the outermost blade of each set of blades and means for evacuating the air from the cup means.
Claim 9
Dependent Claim
20 words
A locking mechanism as in claim 6 wherein the force applying means comprises a fluid actuated piston in a cylinder.
Claim 10
Dependent Claim
18 words
A locking mechanism as in claim 6 wherein the force applying means comprises an electromagnetically actuated magneostrictive element.
Claim 11
Dependent Claim
205 words
A chuck for use in an optical alignment and exposure apparatus comprising: a chuck plate having an upper surface and a lower surface; a base member having an upper surface, a lower surface and a reference surface; chuck support means fastened to the lower surface of the base member for supporting the chuck in the apparatus; first force applying means for urging the chuck plate away from the upper surface of the base member; a brake element fastened to one of the lower surface of the chuck plate and the upper surface of the base member and having a braking surface; flexible blade means fastened to the other of the lower surface of the chuck plate and the upper surface of the base member and having a braking surface slidably in contact with the braking surface of the brake element; and second force applying means for urging the braking surface of the flexible blade means against the braking surface of the brake element in response to an input stimulus to prevent the flexible blade means and the brake element from sliding with respect to each other and to maintain a fixed spatial relationship between the upper surface of the chuck plate and the reference surface.
Claim 12
Dependent Claim
205 words
A chuck for use in an optical alignment and exposure apparatus comprising: a chuck plate having an upper surface and a lower surface; a base member having an upper surface, a lower surface and a reference surface; chuck support means fastened to the lower surface of the base member for supporting the chuck in the apparatus; first force applying means for urging the chuck plate away from the upper surface of the base member; a brake element fastened to one of the lower surface of the chuck plate and the upper surface of the base member and having a braking surface; flexible blade means fastened to the other of the lower surface of the chuck plate and the upper surface of the base member and having a braking surface slidably in contact with the braking surface of the brake element; and second force applying means for urging the braking surface of the flexible blade means against the braking surface of the brake element in response to an input stimulus to prevent the flexible blade means and the brake element from sliding with respect to each other and to maintain a fixed spatial relationship between the upper surface of the chuck plate and the reference surface.
Claim 13
Dependent Claim
49 words
A chuck as in claim 10 wherein the brake element is a block of material having two flat, parallel braking surfaces and the flexible blade means comprises two flat blades, each flat blade being held in contact with one of the flat, parallel braking surfaces of the brake element.
Claim 14
Dependent Claim
29 words
A chuck as in claim 10 wherein the second force applying means comprises cup means on each flat blade and means for evacuating the air from the cup means.
Claim 15
Dependent Claim
20 words
A chuck as in claim 10 wherein the second force applying means comprises a fluid actuated piston in a cylinder.
Claim 16
Dependent Claim
18 words
A chuck as in claim 10 wherein the second force applying means comprises an electromagnetically actuated magnetostrictive element.
Claim 17
Dependent Claim
51 words
A chuck as in claim 10 wherein the brake element is a block of material having two flat, parallel surfaces and the flexible blade means comprises two interleaved sets of blades, each set of interleaved blades being held in contact with one of the flat, parallel surfaces of the brake element.
Claim 18
Dependent Claim
34 words
A chuck as in claim 15 wherein the second force applying means comprises cup means on the outermost blade of each set of blades and means for evacuating the air from the cup means.
Claim 19
Dependent Claim
20 words
A chuck as in claim 15 wherein the second force applying means comprises a fluid actuated piston in a cylinder.
Claim 20
Dependent Claim
18 words
A chuck as in claim 15 wherein the second force applying means comprises an electromagnetically actuated magnetostrictive element.
Claim 21
Dependent Claim
19 words
A chuck as in claim 10 wherein there is a plurality of brake members and corresponding flexible blade means.
References Cited (Backward Citations)
DE1175167B
Cited
US3674368A
Cited
US3705769A
Cited
US3853313A
Cited
US3858978A
Cited
US3833230A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-07-13 | 1985-01-12 | 1985-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-07-13 | 1989-01-12 | 1989-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-07-13 | 1993-01-12 | 1993-07-14 | $7700.00 | Window Closed / Lapsed |