US3853313A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer interlocking transport system
Assignee: International Business Machines Corp
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Filing: 1973-09-17
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Granted: 1974-12-10
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Expires: 1993-09-17
Abstract
Abstract A wafer transport apparatus to lock and hold a wafer in a predetermined contoured position while permitting transport of the wafer from the contouring apparatus to a remote location for further processing on the contoured wafer surface. The apparatus comprises a pallet having a plurality of pedestals therein, and vacuum cups at one extended end of the pedestals for supporting and gripping a wafer thereon. Means are provided to permit reciprocation of individual ones of the pedestals in the pallet, when the pallet is positioned in the contouring apparatus, and pedestal locks are provided to grasp and lock individual ones of the pedestals in an individually determinable position, while holding the pedestals in that position so that the pallet may be removed from the apparatus and positioned at some remote station.
Inventors
- 👤 H Appenzeller
- 👤 J Miller
- 👤 V Shea
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 21:34
CPC Classifications
B; B21; B21D; B21D43/00; B21D43/003
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
174 words
A contoured wafer, transport apparatus, said apparatus comprising: a pallet having a plurality of pedestals therein, vacuum cups at one extended end of said pedestals for supporting and gripping a wafer thereon, and means for supplying a source of vacuum to said vacuum cups, means to permit reciprocation of each of said pedestals in said pallet, a passageway through said pallet surrounding a plurality of said pedestals, and locking means to lock individual ones of said pedestals in an individually determinable position, said locking means comprising, a collet circumscribing each of said plurality of said pedestals, each of said collets having at least one axially extending slit in the sidewall thereof; and means for restraining axial movement of said collet, at least one expansible tube means snaked in and through said passageway and substantiAlly surrounding said collets associated with said pedestals, and means for applying a fluid pressure to said tube means to expand the same against said collets thereby decreasing the diameter of said collets and locking said pedestals in a predetermined position.
Claim 2
Dependent Claim
174 words
A contoured wafer, transport apparatus, said apparatus comprising: a pallet having a plurality of pedestals therein, vacuum cups at one extended end of said pedestals for supporting and gripping a wafer thereon, and means for supplying a source of vacuum to said vacuum cups, means to permit reciprocation of each of said pedestals in said pallet, a passageway through said pallet surrounding a plurality of said pedestals, and locking means to lock individual ones of said pedestals in an individually determinable position, said locking means comprising, a collet circumscribing each of said plurality of said pedestals, each of said collets having at least one axially extending slit in the sidewall thereof; and means for restraining axial movement of said collet, at least one expansible tube means snaked in and through said passageway and substantiAlly surrounding said collets associated with said pedestals, and means for applying a fluid pressure to said tube means to expand the same against said collets thereby decreasing the diameter of said collets and locking said pedestals in a predetermined position.
Claim 3
Dependent Claim
184 words
A contoured wafer, transport apparatus, said apparatus comprising: a pallet having a plurality of pedestals therein, vacuum cups at one extended end of said pedestals for supporting and gripping a wafer thereon, and means for supplying a source of vacuum to said vacuum cups, means to permit reciprocation of each of said pedestals in said pallet, a passageway through said pallet surrounding a plurality of said pedestals, and locking means to lock individual ones of said pedestals in an individually determinable position, said locking means comprising, a collet circumscribing each of said pedestals, each of said collets having at least one axially extending slit in the sidewall thereof; and means for restraining axial movement of said collet, said collet having an exterior wall portion, a cam for engagement with said wall, and means comprising at least one expandable tube means snaked in and through said passageway with means to supply fluid pressure thereto for actuating said cam between a first position for pressing said collet against said pedestal and locking said pedestal, and a second position permitting movement of said pedestal in said collet.
Claim 4
Dependent Claim
184 words
A contoured wafer, transport apparatus, said apparatus comprising: a pallet having a plurality of pedestals therein, vacuum cups at one extended end of said pedestals for supporting and gripping a wafer thereon, and means for supplying a source of vacuum to said vacuum cups, means to permit reciprocation of each of said pedestals in said pallet, a passageway through said pallet surrounding a plurality of said pedestals, and locking means to lock individual ones of said pedestals in an individually determinable position, said locking means comprising, a collet circumscribing each of said pedestals, each of said collets having at least one axially extending slit in the sidewall thereof; and means for restraining axial movement of said collet, said collet having an exterior wall portion, a cam for engagement with said wall, and means comprising at least one expandable tube means snaked in and through said passageway with means to supply fluid pressure thereto for actuating said cam between a first position for pressing said collet against said pedestal and locking said pedestal, and a second position permitting movement of said pedestal in said collet.
Claim 5
Dependent Claim
23 words
A contoured wafer, trarsport apparatus in accordance with claim 2 wherein said collet has a sloped exterior wall portion engageable by said cam.
Claim 6
Dependent Claim
52 words
A contoured wafer, transport apparatus in accordance with claim 3 wherein said cam comprises a sleeve having an interior wall sloped complementary to the slope of said collet wall, and biasing means pressing said sleeve into said first position, and means to overcome said biasing means to release pressure against said collet.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-09 | 1978-06-10 | 1978-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-09 | 1982-06-10 | 1982-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-09 | 1986-06-10 | 1986-12-10 | $7700.00 | Window Closed / Lapsed |