US5472370A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of planarizing polycrystalline diamonds, planarized polycrystalline diamonds and products made therefrom
Assignee: University of Arkansas at Fayetteville
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Filing: 1994-07-29
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Granted: 1995-12-05
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Expires: 2014-07-29
Abstract
Abstract Disclosed is a method of planarizing a diamond film which generally includes orifices in the surface. The method includes first polishing the diamond film surface to reduce the surface roughness. Next, a filler material is applied to the surface of the film to fill the orifices in the film. Finally, the film is polished to remove excess filler material and expose the diamond film surface. Also disclosed are planarized diamond films diamond substrate having a polished surface of both diamond and filler material and a variation in thickness of less than 8 percent.
Inventors
- 👤 Ajay P. Malshe
- 👤 William D. Brown
- 👤 Hameed A. Naseem
- 👤 Leonard W. Schaper
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:47
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/042; H; H10; H10P; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
63 words
A method of processing a diamond film having a surface defining a multiplicity of orifices, the method comprising: (a) contacting the diamond film surface with a filler material to overfill at least one of the orifices; and (b) polishing the surface of the film to remove overfilled filler material, exposing the diamond surface and creating a polished and planarized diamond and filler surface.
Claim 2
Independent Claim
63 words
A method of processing a diamond film having a surface defining a multiplicity of orifices, the method comprising: (a) contacting the diamond film surface with a filler material to overfill at least one of the orifices; and (b) polishing the surface of the film to remove overfilled filler material, exposing the diamond surface and creating a polished and planarized diamond and filler surface.
Claim 3
Dependent Claim
39 words
The method of claim 1 wherein the filler material is selected from the group of materials consisting of inorganic materials, organic materials, metals, glasses, spin-on glasses, thermoplastic polymers, thermoset polymers, engineering thermoplastic polymers, thermally reflowing materials, and mixtures thereof.
Claim 4
Dependent Claim
60 words
The method of claim 1 wherein the filler material is selected from the group of materials consisting of acrylics, alkyds, amino resins, cyclotene resins based on benzocyclobutene, epoxides, fluorocarbons, SiO 2 , SiN, SiC, nylons, oxy-nitrides, phenolics, photo-sensitive polymers, polyamides, polyesters, polyethylene, polyimides, polyolefins, polyolefin copolymers, polyphenylene oxides, polyphenylene sulfides, polypropylene, polystyrenes, polysulfones, polyurethanes, polyvinyl chloride, spin-on-glass, and mixtures thereof.
Claim 5
Dependent Claim
31 words
The method of claim 3 wherein the filler material further includes materials selected from the group of materials consisting of diamond particles, polymer particles, diamond-like particles, ceramic particles, and metal particles.
Claim 6
Dependent Claim
19 words
The method of claim 1 wherein the filler material is selected from the materials consisting of spin-on-glass and polyimides.
Claim 7
Dependent Claim
14 words
The method of claim 5 wherein step (a) further includes curing the filler material.
Claim 8
Dependent Claim
18 words
The method of claim 1 wherein step (a) further includes vibrating the contacted diamond film and filler material.
Claim 9
Dependent Claim
15 words
The method of claim 1 wherein prior to step (a) the diamond film is polished.
Claim 10
Dependent Claim
20 words
The method of claim 1 wherein prior to step (a) a filler adhesion aid is applied to the diamond film.
Claim 11
Dependent Claim
31 words
The method of claim 1 wherein the orifices comprise at least one of crevices, cracks, grooves, exposed microcavities, scratches, slits, slots, openings, hollow portions, cavities, chambers, notches, pits, holes, and voids.
Claim 12
Independent Claim
68 words
A method of processing a diamond film comprising: (a) polishing the diamond film to create a polished diamond film surface having orifices on the surface; (b) contacting the diamond film surface with a filler material to overfill at least one of the orifices; and (c) polishing the surface of the film to remove overfilled filler material, expose the diamond surface and create a polished diamond and filler surface.
Claim 13
Independent Claim
68 words
A method of processing a diamond film comprising: (a) polishing the diamond film to create a polished diamond film surface having orifices on the surface; (b) contacting the diamond film surface with a filler material to overfill at least one of the orifices; and (c) polishing the surface of the film to remove overfilled filler material, expose the diamond surface and create a polished diamond and filler surface.
Claim 14
Dependent Claim
39 words
The method of claim 11 wherein the filler material is selected from the group of materials consisting of inorganic materials, organic materials, metals, glasses, spin-on glasses, thermoplastic polymers, thermoset polymers, engineering thermoplastic polymers, thermally reflowing materials, and mixtures thereof.
Claim 15
Dependent Claim
60 words
The method of claim 11 wherein the filler material is selected from the group of materials consisting of acrylics, alkyds, amino resins, cyclotene resins based on benzocyclobutene, epoxides, fluorocarbons, SiO 2 , SiN, SiC, nylons, oxy-nitrides, phenolics, photo-sensitive polymers, polyamides, polyesters, polyethylene, polyimides, polyolefins, polyolefin copolymers, polyphenylene oxides, polyphenylene sulfides, polypropylene, polystyrenes, polysulfones, polyurethanes, polyvinyl chloride, spin-on-glass, and mixtures thereof.
Claim 16
Dependent Claim
19 words
The method of claim 11 wherein the filler material is selected from the materials consisting of spin-on-glass and polyimides.
Claim 17
Dependent Claim
31 words
The method of claim 14 wherein the filler material further includes materials selected from the group of materials consisting of diamond particles, diamond-like particles, polymer particles, ceramic particles, and metal particles.
Claim 18
Dependent Claim
14 words
The method of claim 14 wherein step (b) further includes curing the filler material.
Claim 19
Dependent Claim
18 words
The method of claim 11 wherein step (b) further includes agitating the contacted diamond film and filler material.
Claim 20
Dependent Claim
20 words
The method of claim 11 wherein prior to step (b) a filler adhesion aid is applied to the diamond film.
Claim 21
Dependent Claim
31 words
The method of claim 11 wherein the orifices comprise at least one of crevices, cracks, grooves, exposed microcavities, scratches, slits, slots, openings, hollow portions, cavities, chambers, notches, pits, holes, and voids.
Claim 22
Independent Claim
44 words
A method of processing a diamond film comprising: (a) polishing the diamond film to create a polished diamond film surface having orifices on the surface; and (b) contacting the diamond film surface with a filler material to overfill at least one of the orifices.
Claim 23
Independent Claim
44 words
A method of processing a diamond film comprising: (a) polishing the diamond film to create a polished diamond film surface having orifices on the surface; and (b) contacting the diamond film surface with a filler material to overfill at least one of the orifices.
Claim 24
Dependent Claim
28 words
The method of claim 20 wherein in step (b), the diamond film surface is contacted with a sufficient amount of filler material to cover the diamond film surface.
Claim 25
Dependent Claim
43 words
A planarized diamond film comprising a diamond substrate with a polished surface area comprising both a polished diamond surface area and a polished filler material surface area, wherein the polished diamond surface area defines a multiplicity of orifices which contain the filler material.
Claim 26
Dependent Claim
43 words
A planarized diamond film comprising a diamond substrate with a polished surface area comprising both a polished diamond surface area and a polished filler material surface area, wherein the polished diamond surface area defines a multiplicity of orifices which contain the filler material.
Claim 27
Dependent Claim
62 words
The planarized diamond film of claim 22 wherein the filler material is selected from the group of materials consisting of acrylics, alkyds, amino resins, cyclotene resins based on benzocyclobutene, epoxides, fluorocarbons, SiO 2 , SiN, SiC, nylons, oxy-nitrides, phenolics, photo-sensitive polymers, polyamides, polyesters, polyethylene, polyimides, polyolefins, polyolefin copolymers, polyphenylene oxides, polyphenylene sulfides, polypropylene, polystyrenes, polysulfones, polyurethanes, polyvinyl chloride, spin-on-glass, and mixtures thereof.
Claim 28
Dependent Claim
23 words
The planarized diamond film of claim 22 wherein the filler material is selected from the group of materials consisting of spin-on-glasses and polyimides.
Claim 29
Dependent Claim
21 words
The planarized diamond film of claim 22 wherein the polished surface area comprises at least 25 percent polished diamond surface area.
Claim 30
Dependent Claim
20 words
The planarized diamond film of claim 22 wherein the film has a thickness variation of less than about 5 percent.
Claim 31
Dependent Claim
47 words
The planarized diamond film of claim 22 wherein the filler material is selected from the group consisting of spin-on-glasses and polyimides, the polished surface area comprises at least 50 percent polished diamond surface area, and the film has a thickness variation of less than about 2 percent.
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