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US5444538A
Expired / Lapsed
US
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System and method for optimizing the grid and intrafield registration of wafer patterns
Assignee: International Business Machines Corp
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Filing: 1994-03-10
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Granted: 1995-08-22
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Expires: 2014-03-10
Abstract
Abstract A system and method according to the invention identify assignable overlay error sources contributing to pattern misregistration on a wafer. Specifically, this system treats the case where a single overlay field from a given layer is sufficiently large to cover two or more fields patterned on any other layer. This system identifies values of correctable coefficients, such that when these values are applied to corrective adjustment to the vector field of measured overlay misregistration, the result tends to reduce the sums of the vector magnitudes to a minimum.
Inventors
- 👤 Joseph C. Pellegrini
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/705; G03F7/70605; G03F7/70616; G03F7/70633
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
101 words
An overlay optimization system for registering field patterns on wafers comprising: a first field stepper for registering a first field pattern; a second field stepper for registering a second field pattern overlaying said first field pattern; an overlay measuring instrument for measuring pattern misregistration data of said first and second field patterns; means for generating an overlay coefficient associated with an assignable source of overlay error from said pattern misregistration data; means for calculating the overlay error associated with said assignable source using said overlay coefficient; and means for adjusting said first and second field steppers for reducing said overlay error.
Claim 2
Dependent Claim
101 words
An overlay optimization system for registering field patterns on wafers comprising: a first field stepper for registering a first field pattern; a second field stepper for registering a second field pattern overlaying said first field pattern; an overlay measuring instrument for measuring pattern misregistration data of said first and second field patterns; means for generating an overlay coefficient associated with an assignable source of overlay error from said pattern misregistration data; means for calculating the overlay error associated with said assignable source using said overlay coefficient; and means for adjusting said first and second field steppers for reducing said overlay error.
Claim 3
Dependent Claim
27 words
The overlay optimization system as recited in claim 1 wherein said means for generating generates said overlay coefficient by least squares estimation using said pattern misregistration data.
Claim 4
Dependent Claim
44 words
The overlay optimization system as recited in claim 1 wherein: said means for generating further generates a composite coefficient associated with a plurality of inseparable assignable sources of overlay error; and said means for calculating further calculates said overlay error using said composite coefficient.
Claim 5
Dependent Claim
42 words
The overlay optimization system as recited in claim 3 wherein: said means for generating assigns said composite coefficient to a first inseparable assignable source of overlay error; and said means for adjusting adjusts said first inseparable assignable source using said composite coefficient.
Claim 6
Dependent Claim
68 words
The overlay optimization system as recited in claim 4 wherein: said means for generating generates said composite coefficient from a plurality of assignable sources of overlay error including at least one of the inseparable assignable sources of overlay error; and said means for adjusting adjusts each assignable source using a portion of said overlay error corresponding to a relative contribution of each assignable source to the composite coefficient.
Claim 7
Dependent Claim
30 words
The overlay optimization system as recited in claim 1 wherein the second field stepper registers the second field pattern being at least twice the area of the first field pattern.
Claim 8
Dependent Claim
132 words
An overlay optimization system for manufacturing a wafer using heterogenous field imaging of patterns, comprising: a first field stepper having a first field size; a second field stepper having a second field size, the second field size being greater than the first field size; means for measuring a plurality of coordinates of a plurality of patterns laid down by said first field stepper and said second field stepper; a processor for processing said plurality of coordinates to generate an overlay coefficient associated with an assignable source of overlay error, said processor for calculating the overlay error associated with the plurality of patterns associated with said assignable source using said overlay coefficient; and means for adjusting a respective stepper controller of said first stepper and said second stepper to reduce said overlay error.
Claim 9
Dependent Claim
132 words
An overlay optimization system for manufacturing a wafer using heterogenous field imaging of patterns, comprising: a first field stepper having a first field size; a second field stepper having a second field size, the second field size being greater than the first field size; means for measuring a plurality of coordinates of a plurality of patterns laid down by said first field stepper and said second field stepper; a processor for processing said plurality of coordinates to generate an overlay coefficient associated with an assignable source of overlay error, said processor for calculating the overlay error associated with the plurality of patterns associated with said assignable source using said overlay coefficient; and means for adjusting a respective stepper controller of said first stepper and said second stepper to reduce said overlay error.
Claim 10
Dependent Claim
26 words
The overlay optimization system as recited in claim 7 wherein said processor uses least squares estimation to generate said overlay coefficient from said plurality of coordinates.
Claim 11
Dependent Claim
29 words
The overlay optimization system as recited in claim 7 wherein the second field stepper has the second field size being twice the first field size for 2:1 field matching.
Claim 12
Independent Claim
120 words
A method for optimizing wafer stepper overlaying using a first field stepper, a second field stepper and a processor, comprising the steps of: patterning a first field layer on a wafer using the first field stepper; patterning a second field layer overlaying said first field layer using the second field stepper; measuring overlay misregistration between the first field layer and the second field layer as misregistration data; processing the misregistration data to generate an overlay coefficient associated with an assignable source of overlay error from the misregistration data; calculating the overlay error associated with said assignable source using said overlay coefficient; and adjusting the patterning of the first field stepper and the second field stepper to reduce said overlay error,
Claim 13
Independent Claim
120 words
A method for optimizing wafer stepper overlaying using a first field stepper, a second field stepper and a processor, comprising the steps of: patterning a first field layer on a wafer using the first field stepper; patterning a second field layer overlaying said first field layer using the second field stepper; measuring overlay misregistration between the first field layer and the second field layer as misregistration data; processing the misregistration data to generate an overlay coefficient associated with an assignable source of overlay error from the misregistration data; calculating the overlay error associated with said assignable source using said overlay coefficient; and adjusting the patterning of the first field stepper and the second field stepper to reduce said overlay error,
Claim 14
Dependent Claim
31 words
The method as recited in claim 10 wherein the step of processing the misregistration data further comprises the step of correlating said misregistration data with corresponding assignable sources of overlay error.
Claim 15
Dependent Claim
27 words
The method as recited in claim 10 wherein said step of generating further comprises generating said overlay coefficient by least squares estimation using said pattern misregistration data.
Claim 16
Dependent Claim
36 words
The method as recited in claim 10 further comprising the steps of generating a composite coefficient associated with a plurality of inseparable assignable sources of overlay error; and calculating said overlay error using said composite coefficient.
Claim 17
Dependent Claim
36 words
The method as recited in claim 13 further comprising the steps of: assigning said composite coefficient to a first inseparable assignable source of overlay error; and adjusting said first inseparable assignable source using said composite coefficient.
Claim 18
Dependent Claim
65 words
The method as recited in claim 13 further comprising the steps of: generating said composite coefficient from a plurality of assignable sources of overlay error including at least one of the inseparable assignable sources of overlay error; and adjusting each assignable source of overlay error using a portion of said overlay error corresponding to a relative contribution of each assignable source to the composite coefficient.
Claim 19
Dependent Claim
36 words
The method as recited in claim 10 wherein the step of patterning the second field layer includes the step of patterning the second field layer having an area twice the area of the first field layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-21 | 1999-02-20 | 1999-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-21 | 2003-02-20 | 2003-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-21 | 2007-02-20 | 2007-08-22 | $7700.00 | Window Closed / Lapsed |