Measuring

Claim 1

An interferometer including: means for creating a first beam of monochromatic electromagnetic radiation; beam splitting means disposed in said first beam for creating second and third beams; radiation intensity sensing means; first directing means for directing said second beam along a first path of fixed length to be incident on said sensing means; second directing means for directing said third beam along a second path of variable length to be incident on said sensing means whereat it interferes with said second beam and creates a straight line interference pattern; means for varying the length of said second path in dependence on a variable being measured; said sensing means including at least three detectors disposed in a row extending perpendicular to the fringe pattern and disposed on centers spaced apart one-fourth the period of the fringe pattern, each of said detectors being adapted to provide a signal indicative of the intensity of radiation incident on it, said signals including a term varying sinusoidally as the pattern moves across the detectors responsive to a variation in length of said second path; said sinusoidally varying term being the product of a component indicative of the sensed amplitude of the sinusoidal variation of the radiation intensity and a sinusoidal factor including a spatial variable and the path length difference; means for rendering the components indicative of the sensed amplitude of the sinusoidal variation of radiation intensity of each of the three only signals of the provided by said detectors, equal; and means for deriving the path length difference from only said three signals.

Claim 4

A method of deriving information on change in difference in path length in an interferometric device, including the steps of: creating a straight-line fringe pattern the phase of which changes with change of difference in path lengths of the beams in the interferometric device; deriving at least three signals indicative of intensity at adjacent locations at quarter-period centers on a line perpendicular to the fringe pattern; modifying the signals so that the factors indicative of fringe amplitude are equal; and deriving information on change in path length difference from three only of the modified signals.

Claim 5

A method of deriving information on change in difference in path length in an interferometric device, including the steps of: creating a straight-line fringe pattern the phase of which changes with change of difference in path lengths of the beams in the interferometric device; deriving at least three signals indicative of intensity at adjacent locations at quarter-period centers on a line perpendicular to the fringe pattern; modifying the signals so that the factors indicative of fringe amplitude are equal; and deriving information on change in path length difference from three only of the modified signals.