US5172190A
Expired / Lapsed
US
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Alignment patterns for two objects to be aligned relative to each other
Assignee: Rave N P Inc
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Filing: 1991-01-11
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Granted: 1992-12-15
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Expires: 2011-01-11
Abstract
Abstract The invention relates to alignment marks for a process for aligning two objects relative to each other by means of an image recognition system wherein the lines are optoelectronically scanned and the obtained brightness values are integrated line-by-line. The advantages of the alignment marks according to the invention reside in that position inaccuracies due to the mutual optical influence of the alignment marks in the optoelectronic evaluation are avoided and furthermore in a high evaluation speed.
Inventors
- 👤 Paul Kaiser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 18:15
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
109 words
Alignment marks to be superimposed for aligning an optically transparent first object and a second object relative to each other by optically scanning the alignment mark of the second object through the alignment mark of the optically transparent first object, wherein a) the alignment marks of either object consist of parallel non-intersecting straight lines and b) the straight lines of two directly superimposed alignment mark areas are not arranged parallel to one another in the desired position, characterized in that c) every single alignment mark consists of four evaluation areas, and d) the evaluation areas are arranged diagonally to respective mark symmetric lines and are identical in one diagonal.
Claim 2
Dependent Claim
109 words
Alignment marks to be superimposed for aligning an optically transparent first object and a second object relative to each other by optically scanning the alignment mark of the second object through the alignment mark of the optically transparent first object, wherein a) the alignment marks of either object consist of parallel non-intersecting straight lines and b) the straight lines of two directly superimposed alignment mark areas are not arranged parallel to one another in the desired position, characterized in that c) every single alignment mark consists of four evaluation areas, and d) the evaluation areas are arranged diagonally to respective mark symmetric lines and are identical in one diagonal.
Claim 3
Dependent Claim
24 words
Alignment marks according to claim 1, characterized in that the straight lines of two superimposed alignment marks are arranged essentially orthogonally to one another.
Claim 4
Dependent Claim
16 words
Alignment marks according to claim 1, characterized in that the straight lines form a periodic lattice.
Claim 5
Dependent Claim
21 words
Alignment marks according to claim 1, characterized in that the straight lines form a lattice with two or three lattice constants.
Claim 6
Dependent Claim
25 words
Alignment marks according to claim 1, characterized in that line density of the optically transparent first object is smaller than that of the second object.
Claim 7
Dependent Claim
22 words
Alignment marks according to claim 1, characterized in that said first and second objects are mask and wafer, respectively, in semiconductor technology.
Claim 8
Dependent Claim
19 words
Alignment marks according to claim 1, characterized in that the evaluation areas are distinctly separated alongside mark symmetry lines.
Claim 9
Dependent Claim
15 words
Alignment marks according to claim 1, characterized in that the four evaluation areas are quadratic.
Claim 10
Dependent Claim
61 words
Alignment marks according to claim 6, characterized in that the total line length of the mask alignment mark is 800 μm per 100×100 μm 2 evaluation area and the line width is 2 μm and that the total line length of the wafer alignment mark is 2400 μm per 100×100 μm 2 evaluation area and the line width is 2 μm.
Claim 11
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 1 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 12
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 2 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 13
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 3 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 14
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 4 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 15
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 5 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 16
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 6 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 17
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 7 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 18
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 8 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 19
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 9 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 20
Dependent Claim
102 words
Alignment marks to be superimposed for aligning an optically transparent first object and a second object relative to each other by optically scanning the alignment mark of the second object through the alignment mark of the optically transparent first object, wherein a) the alignment marks of either object consist of parallel non-intersecting straight lines, and b) the straight lines of two directly superimposed alignment mark areas are not arranged parallel to one another in the desired position, characterized in that c) the line density of the alignment mark of the optically transparent first object is smaller than that of the second object.
Claim 21
Dependent Claim
102 words
Alignment marks to be superimposed for aligning an optically transparent first object and a second object relative to each other by optically scanning the alignment mark of the second object through the alignment mark of the optically transparent first object, wherein a) the alignment marks of either object consist of parallel non-intersecting straight lines, and b) the straight lines of two directly superimposed alignment mark areas are not arranged parallel to one another in the desired position, characterized in that c) the line density of the alignment mark of the optically transparent first object is smaller than that of the second object.
Claim 22
Dependent Claim
24 words
Alignment marks according to claim 19, characterized in that the straight lines of two superimposed alignment marks are arranged essentially orthogonally to one another.
Claim 23
Dependent Claim
16 words
Alignment marks according to claim 19, characterized in that the straight lines form a periodic lattice.
Claim 24
Dependent Claim
21 words
Alignment marks according to claim 19, characterized in that the straight lines form a lattice with two or three lattice constants.
Claim 25
Dependent Claim
22 words
Alignment marks according to claim 19, characterized in that said first and second objects are mask and wafer, respectively, in semiconductor technology.
Claim 26
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 19 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 27
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 20 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 28
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 21 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 29
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 22 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
Claim 30
Dependent Claim
45 words
Method for aligning two objects relative to each other by means of an image recognition system and by means of the alignment marks according to claim 23 wherein different straight lines on both objects are optoelectronically scanned and the obtained brightness values are integrated line-by-line.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-15 | 1996-06-15 | 1996-12-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-15 | 2000-06-15 | 2000-12-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-15 | 2004-06-15 | 2004-12-15 | $7700.00 | Window Closed / Lapsed |