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US5444290A
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Method and apparatus for programming antifuse elements using combined AC and DC electric fields
Assignee: Symetrix Corp
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Filing: 1994-05-26
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Granted: 1995-08-22
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Expires: 2014-05-26
Abstract
Abstract An antifuse element has a dielectric layer comprising materials whose dielectric constant increases in the presence of a DC electric field, such as a ferroelectric. An applied AC electric field and a DC electric field breaks down the dielectric material to form a conductive filament. The AC electric field causes the physical reorientation of the electric dipole of the molecules in the ferroelectric material which creates heat within the ferroelectric material. The DC electric field enhances the heating effect of the AC electric field by enlarging the electric dipole of the ferroelectric molecules. The synergy of the two electric fields permits programming antifuse elements of the present invention by applying DC electric fields as low as 2 volts amplitude.
Inventors
- 👤 Carlos A. Paz de Araujo
- 👤 Larry D. McMillan
- 👤 Joseph D. Cuchiaro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 18:24
CPC Classifications
G; G11; G11C; G11C17/00; G11C17/14; G11C17/16; H; H10; H10B; H10B53/00
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
113 words
A method for programming an antifuse element, said antifuse element comprising two electrodes separated by a dielectric material layer, said method comprising the steps of: applying an AC electric field of predetermined AC amplitude across said two electrodes for a first period of time; and applying a DC electric field of predetermined DC amplitude across said two electrodes to alter said dielectric material layer to electrically connect said two electrodes for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 2
Independent Claim
113 words
A method for programming an antifuse element, said antifuse element comprising two electrodes separated by a dielectric material layer, said method comprising the steps of: applying an AC electric field of predetermined AC amplitude across said two electrodes for a first period of time; and applying a DC electric field of predetermined DC amplitude across said two electrodes to alter said dielectric material layer to electrically connect said two electrodes for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein said dielectric material layer comprises a ferroelectric material.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein said dielectric material layer comprises barium strontium titanate (Ba x Sr 1-x TiO 3 ).
Claim 5
Dependent Claim
19 words
The method of claim 1 wherein the amplitude of said AC electric field is from 1 to 10 volts.
Claim 6
Dependent Claim
16 words
The method of claim 1 wherein the amplitude of said AC electric field is 5 volts.
Claim 7
Dependent Claim
20 words
The method of claim 1 wherein said AC electric field oscillates at a frequency between 10,000 hertz and 10,000,000 hertz.
Claim 8
Dependent Claim
20 words
The method of claim 1 wherein said DC electric field has an amplitude of between 0.5 volts and 5 volts.
Claim 9
Dependent Claim
18 words
The method of claim 1 wherein said DC electric field has an amplitude of less than 2 volts.
Claim 10
Independent Claim
116 words
A method for programming an antifuse element, said antifuse element comprising two electrodes separated by an insulative ferroelectric dielectric material layer, said method comprising the steps of: applying an AC electric field of predetermined AC amplitude across said two electrodes for a first period of time; and applying a DC electric field of predetermined DC amplitude across said two electrodes to breakdown said ferroelectric dielectric material layer to electrically connect said two electrodes for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 11
Independent Claim
116 words
A method for programming an antifuse element, said antifuse element comprising two electrodes separated by an insulative ferroelectric dielectric material layer, said method comprising the steps of: applying an AC electric field of predetermined AC amplitude across said two electrodes for a first period of time; and applying a DC electric field of predetermined DC amplitude across said two electrodes to breakdown said ferroelectric dielectric material layer to electrically connect said two electrodes for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 12
Dependent Claim
22 words
The method of claim 9 wherein said ferroelectric dielectric material layer comprises barium strontium titanate (Ba x Sr 1-x TiO 3 ).
Claim 13
Dependent Claim
19 words
The method of claim 9 wherein the amplitude of said AC electric field is from 1 to 10 volts.
Claim 14
Dependent Claim
16 words
The method of claim 9 wherein the amplitude of said AC electric field is 5 volts.
Claim 15
Dependent Claim
20 words
The method of claim 9 wherein said AC electric field oscillates at a frequency between 10,000 hertz and 10,000,000 hertz.
Claim 16
Dependent Claim
20 words
The method of claim 9 wherein said DC electric field has an amplitude of between 0.5 volts and 5 volts.
Claim 17
Dependent Claim
18 words
The method of claim 9 wherein said DC electric field has an amplitude of less than 2 volts.
Claim 18
Dependent Claim
135 words
An electrically programmable antifuse device comprising: first and second electrodes; a dielectric layer electrically insulating said first and second conductive electrodes; and fusing means for controllably altering said dielectric layer to form an electrical conductor connecting said first and second conductive electrodes, said fusing means further comprising: means for controllably applying an AC electric field of predetermined AC amplitude across said first and second conductive electrodes for a first period of time; and means for controllably applying a DC electric field of predetermined DC amplitude across said first and second conductive electrodes for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 19
Dependent Claim
135 words
An electrically programmable antifuse device comprising: first and second electrodes; a dielectric layer electrically insulating said first and second conductive electrodes; and fusing means for controllably altering said dielectric layer to form an electrical conductor connecting said first and second conductive electrodes, said fusing means further comprising: means for controllably applying an AC electric field of predetermined AC amplitude across said first and second conductive electrodes for a first period of time; and means for controllably applying a DC electric field of predetermined DC amplitude across said first and second conductive electrodes for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 20
Dependent Claim
32 words
The programmable antifuse device of claim 16 wherein said dielectric layer comprises a material having a dielectric constant that increases substantially when a DC electric field is applied across said dielectric layer.
Claim 21
Dependent Claim
215 words
A programmable array integrated circuit comprising: a substrate material; a plurality of row electrode means formed in substantially parallel rows on said substrate material; a plurality of column electrode means formed in substantially parallel columns substantially perpendicular to said plurality of row electrode means, each of said plurality of column electrodes intersecting the plane of each of said plurality of row electrodes; dielectric means for electrically insulating each of said intersecting row and column electrode means; and fusing means for controllably altering said dielectric means at any one of said intersections of said row and column electrode means to form an electrical conductor connecting said one of said intersecting row and column electrode means, said fusing means further comprising: means for controllably applying an AC electric field of predetermined AC amplitude across said one of said intersecting row and column electrode means for a first period of time; and means for controllably applying a DC electric field of predetermined DC amplitude across said one of said intersecting row and column electrode means for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 22
Dependent Claim
215 words
A programmable array integrated circuit comprising: a substrate material; a plurality of row electrode means formed in substantially parallel rows on said substrate material; a plurality of column electrode means formed in substantially parallel columns substantially perpendicular to said plurality of row electrode means, each of said plurality of column electrodes intersecting the plane of each of said plurality of row electrodes; dielectric means for electrically insulating each of said intersecting row and column electrode means; and fusing means for controllably altering said dielectric means at any one of said intersections of said row and column electrode means to form an electrical conductor connecting said one of said intersecting row and column electrode means, said fusing means further comprising: means for controllably applying an AC electric field of predetermined AC amplitude across said one of said intersecting row and column electrode means for a first period of time; and means for controllably applying a DC electric field of predetermined DC amplitude across said one of said intersecting row and column electrode means for a second period of time, wherein at least a portion of said first period of time is simultaneous with said second period of time whereby the application of said AC electric field is coincident with the application of said DC electric field.
Claim 23
Dependent Claim
34 words
The programmable array integrated circuit of claim 18 wherein said dielectric insulating means comprises a material having a dielectric constant that increases substantially when a DC electric field is applied across said dielectric layer.
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