Patent US5440920A successfully refreshed from Google Patents.
US5440920A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning force microscope with beam tracking lens
Assignee: Bank of America NA
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Filing: 1994-02-03
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Granted: 1995-08-15
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Expires: 2014-02-03
Abstract
Abstract An atomic force, scanning probe microscope (AFM or SPM) having a stationary-sample stage and a scanning cantilever using an optical lever method with an S-shape PZT is described. The cantilever tip is translated to measure surface profiles while a simple lens attached to the cantilever holder guides a focused beam from a fixed collimated diode laser. This enables the change of scanners or scanning techniques in air or solution without disturbing the sample. The imaging capability is demonstrated up to 100×100 square micrometers.
Inventors
- 👤 Pan S. Jung
- 👤 Daphna R. Yaniv
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 21:45
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/02; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/724; Y10S977/732; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851; Y10S977/86; Y10S977/861; Y10S977/863; Y10S977/868; Y10S977/869; Y10S977/87; Y10S977/873; Y10S977/875; Y10S977/878; Y10S977/88; Y10S977/881; Y10S977/902; Y10S977/932; Y10S977/953; Y10S977/954
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
217 words
A scanning force microscope for examining the surface properties of a sample surface, said microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking element mounted to a rigid support element mounted in turn to said scanner element; a source of a collimated light beam, said source fixed in operation to said frame, said source arranged to project said collimated light beam to said beam tracking element and from said beam tracking element to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive detector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 2
Dependent Claim
217 words
A scanning force microscope for examining the surface properties of a sample surface, said microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking element mounted to a rigid support element mounted in turn to said scanner element; a source of a collimated light beam, said source fixed in operation to said frame, said source arranged to project said collimated light beam to said beam tracking element and from said beam tracking element to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive detector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 3
Dependent Claim
17 words
A scanning force microscope according to claim 1 wherein said position sensitive detector comprises a multi-cell photodetector.
Claim 4
Dependent Claim
16 words
A scanning force microscope according to claim 2 wherein said multi-cell photodetector is a bi-cell photodetector.
Claim 5
Dependent Claim
16 words
A scanning force microscope according to claim 1 wherein said scanner element is a piezoceramic scanner.
Claim 6
Dependent Claim
15 words
A scanning force microscope according to claim 4 wherein said piezoceramic scanner is a tube.
Claim 7
Dependent Claim
15 words
A scanning force microscope according to claim 5 wherein said tube is an S-shaped scanner.
Claim 8
Dependent Claim
16 words
A scanning force microscope according to claim 1 wherein said beam tracking element is a lens.
Claim 9
Dependent Claim
13 words
A scanning force microscope according to claim 7 wherein said lens is bi-convex.
Claim 10
Dependent Claim
15 words
A scanning atomic force microscope according to claim 1 wherein said source includes a laser.
Claim 11
Dependent Claim
15 words
A scanning force microscope according to claim 9 wherein said laser is a diode laser.
Claim 12
Dependent Claim
26 words
A scanning force microscope according to claim 10 wherein said source further includes means for adjusting the position of said source with respect to said frame.
Claim 13
Dependent Claim
30 words
A scanning force microscope according to claim 1 wherein said position sensitive detector further includes means for adjusting the position of said position sensitive detector with respect to said frame.
Claim 14
Dependent Claim
221 words
An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a piezoceramic tube scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking lens mounted to a rigid support element fixed in operation to said scanner element; a source of a collimated light beam including a diode laser module, said source fixed in operation to said frame, said source arranged to project said collimated light beam through said beam tracking lens and to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 15
Dependent Claim
221 words
An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a piezoceramic tube scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking lens mounted to a rigid support element fixed in operation to said scanner element; a source of a collimated light beam including a diode laser module, said source fixed in operation to said frame, said source arranged to project said collimated light beam through said beam tracking lens and to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 16
Dependent Claim
30 words
An atomic force microscope according to claim 13 wherein said position sensitive photodetector further includes means for adjusting the position of said position sensitive detector with respect to said frame.
Claim 17
Dependent Claim
26 words
An atomic force microscope according to claim 13 wherein said source further includes means for adjusting the position of said source with respect to said frame.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-14 | 1999-02-13 | 1999-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-14 | 2003-02-13 | 2003-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-14 | 2007-02-13 | 2007-08-15 | $7700.00 | Window Closed / Lapsed |