US5141319A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Displacement detection device with adjacent semiconductor diode lasers
Assignee: Olympus Corp
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Filing: 1991-11-15
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Granted: 1992-08-25
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Expires: 2011-11-15
Abstract
Abstract A displacement detection device has a laser unit. The laser unit has two semiconductor lasers formed on a single substrate through a single process. One of the lasers has an end coated with a reflection preventing film and facing a mirror provided at the end of a cantilever. The other end of the laser is coated with a film having a high reflectance film such that a light resonator is formed together with the mirror and the high reflectance film. The other laser has both opposite ends coated with films of a high reflectance, and a light resonator is formed between the opposite ends. Two laser beams emitted from the two semiconductor lasers interfere with each other, and the resultant interference light enters the light detector. The detector detects a variation in the interference light caused by displacement of the mirror, and outputs a signal indicative of a displacement in the cantilever.
Inventors
- 👤 Hiroshi Kajimura
- 👤 Masahiko Kato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:40
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/02; B; B82; B82Y; B82Y35/00; G01B; G01B9/00; G01B9/02; G01B9/02001; G01B9/02002; G01B9/02003; G01B9/02049; G01B9/02051; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868; Y10S977/87
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
77 words
A displacement detection device for detecting displacement of a cantilever comprising: a reflecting mirror provided on the cantilever; a first semiconductor laser using the reflecting mirror as a mirror for a light resonator; a second semiconductor laser arranged in the vicinity of the first semiconductor laser; and a light detector for receiving interference light of light beams emitted from the first and second semiconductor lasers, and outputting a signal indicative of a displacement in the reflecting mirror.
Claim 2
Dependent Claim
77 words
A displacement detection device for detecting displacement of a cantilever comprising: a reflecting mirror provided on the cantilever; a first semiconductor laser using the reflecting mirror as a mirror for a light resonator; a second semiconductor laser arranged in the vicinity of the first semiconductor laser; and a light detector for receiving interference light of light beams emitted from the first and second semiconductor lasers, and outputting a signal indicative of a displacement in the reflecting mirror.
Claim 3
Dependent Claim
25 words
The displacement detection device according to claim 1, wherein the first and second semiconductor lasers are formed on a single substrate through a single process.
Claim 4
Dependent Claim
43 words
The displacement detection device according to claim 2, further comprising a light waveguide having two input terminals for receiving laser beams emitted from the first and second semiconductor lasers, and one output terminal for outputting the received laser beams toward the light detector.
Claim 5
Dependent Claim
101 words
A displacement detection device for detecting displacement of a cantilever comprising: a reflecting mirror provided on the cantilever; a semiconductor laser having two cleavage surfaces which are arranged in parallel with the reflecting mirror; and a detector for monitoring an oscillation output from the semiconductor laser; wherein one of the two cleavage surfaces, which is opposed to the reflecting mirror, has a reflectance smaller than that of the other of the two cleavage surfaces, such that a first resonator is formed between the two cleavage surfaces and a second resonator is formed between the reflecting mirror and the other cleavage surface.
Claim 6
Dependent Claim
101 words
A displacement detection device for detecting displacement of a cantilever comprising: a reflecting mirror provided on the cantilever; a semiconductor laser having two cleavage surfaces which are arranged in parallel with the reflecting mirror; and a detector for monitoring an oscillation output from the semiconductor laser; wherein one of the two cleavage surfaces, which is opposed to the reflecting mirror, has a reflectance smaller than that of the other of the two cleavage surfaces, such that a first resonator is formed between the two cleavage surfaces and a second resonator is formed between the reflecting mirror and the other cleavage surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-25 | 1996-02-24 | 1996-08-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-25 | 2000-02-24 | 2000-08-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-25 | 2004-02-24 | 2004-08-25 | $7700.00 | Window Closed / Lapsed |