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US4785177A Expired / Lapsed US ⏱️ 0.0 years remaining

Kinematic arrangement for the micro-movements of objects

Assignee: Forschungszentrum Jülich
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Filing: 1987-03-13
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Granted: 1988-11-15
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Expires: 2007-03-13
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Abstract

Abstract A kinematic arrangement for the micro-movement over long distances of objs, and in particular, for imparting movement to and the manipulation of objects which are to be investigated or treated microscopically. The object is supported on at least one motion-imparting or kinematic element constituted of piezoelectric material, which is deformable through the application of electrical voltages. The supporting point or points of the kinematic or motion-imparting elements is or are changed in position through a deformation of the piezoelectric material due to the application of electrical voltage variations to the kinematic element, which so changes in its position that the object which is supported by the kinematic elements will move in desired directions within a plane predetermined by the supporting points.

Inventors

  • 👤 Karl-Heinz Besocke

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 12:34
CPC Classifications
G; G01; G01Q; G01Q10/00; G01Q10/04; B; B82; B82Y; B82Y35/00; H; H02; H02N; H02N2/00; H02N2/02; H02N2/021; H02N2/025; H02N2/10; H02N2/101; H10; H10N; H10N30/00; H10N30/20; H10N30/202; H10N30/2027

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 132 words
Micromanipulator for the micro-movement of objects, for imparting relative microscopic movements between the micromanipulator and objects which are to be examined or treated microscopically; comprising at least one kinematic element positioned for supporting or being supported by said object, said at least one kinematic element being constituted from a piezoelectric material and being deformable through the application of electrical voltages, at least a portion of said at least one kinematic element being hollow-cylindrical; support means for said object being located at one end surface of said at least one element; and a closed, continuous electrically-conductive coating being provided on one cylindrical surface of said at least one hollow-cylindrical kinematic element, and a plurality of electrically-conductive part coatings, which are electrically insulated relative to each other, being provided on the other cylindrical surface.
Claim 2
Dependent Claim 132 words
Micromanipulator for the micro-movement of objects, for imparting relative microscopic movements between the micromanipulator and objects which are to be examined or treated microscopically; comprising at least one kinematic element positioned for supporting or being supported by said object, said at least one kinematic element being constituted from a piezoelectric material and being deformable through the application of electrical voltages, at least a portion of said at least one kinematic element being hollow-cylindrical; support means for said object being located at one end surface of said at least one element; and a closed, continuous electrically-conductive coating being provided on one cylindrical surface of said at least one hollow-cylindrical kinematic element, and a plurality of electrically-conductive part coatings, which are electrically insulated relative to each other, being provided on the other cylindrical surface.
Claim 3
Dependent Claim 23 words
Micromanipulator as claimed in claim 1, wherein said support means comprises a single support point projecting from said at least one kinematic element.
Claim 4
Dependent Claim 28 words
Micromanipulator as claimed in claim 1, wherein said support means comprises a plurality of object-supporting surfaces circumferentially distributed along the end surface of said at least one element.
Claim 5
Dependent Claim 48 words
Micromanipulator as claimed in claim 1, wherein said part coatings which are insulated relative to each other extend along said other cylindrical surface in the direction of the cylinder axis; and an insulation between said part coatings extending between said part coatings in parallel with the cylinder axis.
Claim 6
Dependent Claim 24 words
Micromanipulator as claimed in claim 1, wherein said electrically insulated part coatings are provided on the external cylindrical surface of at least one element.
Claim 7
Dependent Claim 35 words
Micromanipulator as claimed in claim 1, wherein means are provided for applying to said closed coating and to said part coating a separate electrical operating voltage in conformance with the intended movement of the object.
Claim 8
Dependent Claim 27 words
Micromanipulator as claimed in claim 1, wherein means are provided for applying a direct voltage superimposable on an alternating-current voltage required for the operation of said arrangement.
Claim 9
Dependent Claim 32 words
Micromanipulator as claimed in claim 1, wherein said at least one kinematic element is rigidly interconnected with a scan element of a scanning-tunneling microscope supporting the tunnel tip of said scanning-tunneling microscope.
Claim 10
Dependent Claim 24 words
Micromanipulator as claimed in claim 8, wherein said scan element has a construction analogous to the construction of said at least one kinematic element.
Claim 11
Dependent Claim 22 words
Micromanipulator as claimed in claim 8, wherein the scanning movements of said arrangement are provided by said at least one kinematic element.
Claim 12
Dependent Claim 26 words
Micromanipulator as claimed in claim 8, wherein said at least one kinematic element comprises a thermal sensor means for effecting the temperature measurement of the object.
Claim 13
Dependent Claim 22 words
Micromanipulator as claimed in claim 8, wherein said at least one kinematic element comprises a means for contacting the object under investigation.
Claim 14
Dependent Claim 15 words
Micromanipulator as claimed in claim 1, wherein said arrangement includes an object treating implement means.

References Cited (Backward Citations)

US4163168A Cited
US4195243A Cited
US4343993A Cited
US4442002A Cited
US4422002A Cited
EP0166499A2 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-11-15 1992-05-16 1992-11-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-11-15 1996-05-16 1996-11-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-11-15 2000-05-16 2000-11-15 $7700.00 Window Closed / Lapsed

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