EP0166499A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Precision moving mechanism
Assignee: Toshiba Corp
•
Filing: 1985-02-19
•
Granted: —
•
Expires: 2005-02-19
Abstract
Abstract A precision moving mechanism can rotate a table continuously and precisely. A first drive disk (22) is made of first and second movable sections (24a, 24b) and a resilient hinge (26) connecting these sections. A first piezoelectric element (38) has ends coupled to these sections (24a, 24b), which can be attached to a first base by first and second members (44, 46). A second drive disk (62) is made of third and fourth movable sections (64a, 64b) and a resilient hinge (66) connecting these sections. A second piezoelectric element (74) has ends coupled to these sections (64a, 64b), which can be attached to the second base by third and fourth members (76, 78). The second and third sections (24b, 64a) are coupled to the second base and table, respectively. During the first period, the first member (44) attaches the first secton (42a) to the first base, the fourth member (78) attaches the fourth section (64b) to the second base, and the first element (38) expands, and the second element (74) contracts, whereby the second section (24b) slightly rotates to rotate the table. During the second period, the second member (46) attaches the second section to the first base, the third member attaches the third section to the second base, the first element contracts and the second element expands, whereby the fourth section slightly rotates to rotate the table.
Inventors
- 👤 Kuniyoshi C/O Patent Division K.K. Toshiba Tanaka
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 16:44
CPC Classifications
H; H02; H02N; H02N2/00; H02N2/10; H02N2/101; H01; H01J; H01J37/00; H01J37/02; H01J37/20; H10; H10P; H10P72/00; H10P72/50
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
369 words
A precision moving mechanism having a first base (18; 106), a first drive disk (22; 108) comprising first and second movable sections (24a; 24b; 109a; 109b), a first piezoelectric element (38; 110) connected at one end to the first movable section (24a; 109a) and at the other end to the second movable section (24b; 109b), a first member (44; 134) for attaching the first movable section (24a; 109a) to the first base (18; 106), and a second member (46; 136) for attaching the second movable section (24b; 109b) to the first base (18; 106), characterized by further comprising: a second base (58; 146) supported by the first or second movable section (24a; 24b; 109a; 109b); a second drive disk (62; 148) movably mounted on the second base (58; 146) and having third and fourth movable sections (64a; 64b, 150a; 150b); a second piezoelectric element (74; 152) connected at one end to the third movable section (64a; 150a) and at the other end to the fourth movable section (64b; 150b); a third member (76; 176) for attaching the third movable section (64a; 150a) to the second base (58; 146); a fourth member (78; 178) for attaching the fourth movable section (64b; 150b) to the second base (58; 146); a table (16; 104) supported by the third or fourth movable section (64a; 64b; 150a; 150b); a drive means (82) for alternately driving the first and second members (44; 46; 134; 136) and alternately driving the third and fourth members (76; 78; 176; 178), and for alternately driving the first or second member (44; 46; 134; 136) for attaching the movable section supporting said second base (58; 146) to said first base (18; 106), and the third or fourth member (76; 78; 176; 178) for attaching the movable section supporting said table (16; 104) to said second base (58; 146); and a voltage generating means (82) for applying a voltage to the first and second piezoelectric elements (38; 74; 110; 152), said voltage varying in synchronism with the drive cycle of said first and third members (44; 134; 76; 176) and causing said first and second piezoelectric elements (38; 74; 110; 152) to expand and contract with a phase difference of 180°.
Claim 2
Dependent Claim
369 words
A precision moving mechanism having a first base (18; 106), a first drive disk (22; 108) comprising first and second movable sections (24a; 24b; 109a; 109b), a first piezoelectric element (38; 110) connected at one end to the first movable section (24a; 109a) and at the other end to the second movable section (24b; 109b), a first member (44; 134) for attaching the first movable section (24a; 109a) to the first base (18; 106), and a second member (46; 136) for attaching the second movable section (24b; 109b) to the first base (18; 106), characterized by further comprising: a second base (58; 146) supported by the first or second movable section (24a; 24b; 109a; 109b); a second drive disk (62; 148) movably mounted on the second base (58; 146) and having third and fourth movable sections (64a; 64b, 150a; 150b); a second piezoelectric element (74; 152) connected at one end to the third movable section (64a; 150a) and at the other end to the fourth movable section (64b; 150b); a third member (76; 176) for attaching the third movable section (64a; 150a) to the second base (58; 146); a fourth member (78; 178) for attaching the fourth movable section (64b; 150b) to the second base (58; 146); a table (16; 104) supported by the third or fourth movable section (64a; 64b; 150a; 150b); a drive means (82) for alternately driving the first and second members (44; 46; 134; 136) and alternately driving the third and fourth members (76; 78; 176; 178), and for alternately driving the first or second member (44; 46; 134; 136) for attaching the movable section supporting said second base (58; 146) to said first base (18; 106), and the third or fourth member (76; 78; 176; 178) for attaching the movable section supporting said table (16; 104) to said second base (58; 146); and a voltage generating means (82) for applying a voltage to the first and second piezoelectric elements (38; 74; 110; 152), said voltage varying in synchronism with the drive cycle of said first and third members (44; 134; 76; 176) and causing said first and second piezoelectric elements (38; 74; 110; 152) to expand and contract with a phase difference of 180°.
Claim 3
Dependent Claim
50 words
A precision moving mechanism according to claim 1, characterized in that two bearings (36; 72) are provided at the center portions of said first and second drive disks (22; 62) and supporting said first and second drive disks (22, 62) rotatably on said first and second bases (18; 58), respectively.
Claim 4
Dependent Claim
76 words
A precision moving mechanism according to claim 2, characterized in that said first drive disk (22) has a resilient hinge (26) provided at the center of rotation of said first drive disk (22) and connecting the first and second movable sections (24a, 24b), and said second drive disk (62) has a resilient hinge (66) provided at the center of rotation of said second drive disk (62) and connecting the third and fourth movable sections (64a, 64b).
Claim 5
Dependent Claim
71 words
A precision moving mechanism according to claim 1, characterized in that a third piezoelectric element (90; 112) is connected at one end to said first movable section (24a; 109a) and at the other end to said second movable section (24b; 109b), and a fourth piezoelectric element (92; 154) connected at one end to said third movable section (64a; 150a) and at the other end to said fourth movable section (64b; 150b).
Claim 6
Dependent Claim
91 words
A precision moving mechanism according to claim 4, characterized by further comprising a means for applying a voltage to said third piezoelectric element (90; 112) in such a manner that said third piezoelectric element (90; 112) expands and contracts with a 360° phase difference from said first piezoelectric element (38; 110), and a means for applying a voltage to said fourth piezoelectric element (92; 154) in such a manner that said fourth piezoelectric element (92; 154) expands and contracts with a 360° phase difference from said second piezoelectric element (74; 152).
Claim 7
Dependent Claim
68 words
A precision moving mechanism according to claim 1, characterized in that said first, second, third and fourth members (44; 46; 76; 78; 134; 136; 176; 178) are electrostatic chucks each comprising an electrode (48; 50) and an insulative layer (52; 54) wrapping the electrode, and each adapted to attach the corresponding movable section (24a; 24b; 64a; 64b; 109a; 109b; 150a; 150b) to the base (18; 58; 106; 146).
Claim 8
Dependent Claim
35 words
A precision moving mechanism according to claim 3, characterized in that each of said drive disks (22; 62) and each of said resilient hinges (26; 66) are formed by forming a plate member with notches.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.