US5440920A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning force microscope with beam tracking lens
Assignee: Bank of America NA
•
Filing: 1994-02-03
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Granted: 1995-08-15
•
Expires: 2014-02-03
Abstract
Abstract An atomic force, scanning probe microscope (AFM or SPM) having a stationary-sample stage and a scanning cantilever using an optical lever method with an S-shape PZT is described. The cantilever tip is translated to measure surface profiles while a simple lens attached to the cantilever holder guides a focused beam from a fixed collimated diode laser. This enables the change of scanners or scanning techniques in air or solution without disturbing the sample. The imaging capability is demonstrated up to 100×100 square micrometers.
Inventors
- 👤 Pan S. Jung
- 👤 Daphna R. Yaniv
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 21:29
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/02; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/724; Y10S977/732; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851; Y10S977/86; Y10S977/861; Y10S977/863; Y10S977/868; Y10S977/869; Y10S977/87; Y10S977/873; Y10S977/875; Y10S977/878; Y10S977/88; Y10S977/881; Y10S977/902; Y10S977/932; Y10S977/953; Y10S977/954
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
217 words
A scanning force microscope for examining the surface properties of a sample surface, said microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking element mounted to a rigid support element mounted in turn to said scanner element; a source of a collimated light beam, said source fixed in operation to said frame, said source arranged to project said collimated light beam to said beam tracking element and from said beam tracking element to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive detector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 2
Dependent Claim
217 words
A scanning force microscope for examining the surface properties of a sample surface, said microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking element mounted to a rigid support element mounted in turn to said scanner element; a source of a collimated light beam, said source fixed in operation to said frame, said source arranged to project said collimated light beam to said beam tracking element and from said beam tracking element to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive detector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 3
Dependent Claim
17 words
A scanning force microscope according to claim 1 wherein said position sensitive detector comprises a multi-cell photodetector.
Claim 4
Dependent Claim
16 words
A scanning force microscope according to claim 2 wherein said multi-cell photodetector is a bi-cell photodetector.
Claim 5
Dependent Claim
16 words
A scanning force microscope according to claim 1 wherein said scanner element is a piezoceramic scanner.
Claim 6
Dependent Claim
15 words
A scanning force microscope according to claim 4 wherein said piezoceramic scanner is a tube.
Claim 7
Dependent Claim
15 words
A scanning force microscope according to claim 5 wherein said tube is an S-shaped scanner.
Claim 8
Dependent Claim
16 words
A scanning force microscope according to claim 1 wherein said beam tracking element is a lens.
Claim 9
Dependent Claim
13 words
A scanning force microscope according to claim 7 wherein said lens is bi-convex.
Claim 10
Dependent Claim
15 words
A scanning atomic force microscope according to claim 1 wherein said source includes a laser.
Claim 11
Dependent Claim
15 words
A scanning force microscope according to claim 9 wherein said laser is a diode laser.
Claim 12
Dependent Claim
26 words
A scanning force microscope according to claim 10 wherein said source further includes means for adjusting the position of said source with respect to said frame.
Claim 13
Dependent Claim
30 words
A scanning force microscope according to claim 1 wherein said position sensitive detector further includes means for adjusting the position of said position sensitive detector with respect to said frame.
Claim 14
Dependent Claim
221 words
An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a piezoceramic tube scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking lens mounted to a rigid support element fixed in operation to said scanner element; a source of a collimated light beam including a diode laser module, said source fixed in operation to said frame, said source arranged to project said collimated light beam through said beam tracking lens and to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 15
Dependent Claim
221 words
An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising: a frame; a sample stage adjustable in position with respect to said frame; a piezoceramic tube scanner element having a first scanner end fixed in operation with respect to said frame and a second scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end fixed in operation with respect to said second scanner end; a beam tracking lens mounted to a rigid support element fixed in operation to said scanner element; a source of a collimated light beam including a diode laser module, said source fixed in operation to said frame, said source arranged to project said collimated light beam through said beam tracking lens and to a focus on said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
Claim 16
Dependent Claim
30 words
An atomic force microscope according to claim 13 wherein said position sensitive photodetector further includes means for adjusting the position of said position sensitive detector with respect to said frame.
Claim 17
Dependent Claim
26 words
An atomic force microscope according to claim 13 wherein said source further includes means for adjusting the position of said source with respect to said frame.
References Cited (Backward Citations)
US34331A
Cited
US34489A
Cited
US33387A
Cited
US4343993A
Cited
US4422002A
Cited
US4520570A
Cited
US4700075A
Cited
US4668865A
Cited
US4924104A
Cited
US4724318A
Cited
USRE33387E
Cited
US4785177A
Cited
US4866271A
Cited
US4877957A
Cited
US4806755A
Cited
US4800274A
Cited
US5022743A
Cited
US4837435A
Cited
US4962480A
Cited
US4868396A
Cited
US4902892A
Cited
US4823004A
Cited
US4969978A
Cited
US4914293A
Cited
US5257024A
Cited
US4956817A
Cited
US4871938A
Cited
US5325010A
Cited
USRE34331E
Cited
US4889988A
Cited
US5013913A
Cited
US5009111A
Cited
US4999495A
Cited
US5018865A
Cited
US4947042A
Cited
US5155715A
Cited
US5034903A
Cited
US5120959A
Cited
US4924091A
Cited
USRE34489F1
Cited
USRE34489E
Cited
US4935634A
Cited
US5260622A
Cited
US4968914A
Cited
US4952857A
Cited
US5304924A
Cited
US5260824A
Cited
US5051646A
Cited
US5047633A
Cited
US5017010A
Cited
US5229606A
Cited
US5266801A
Cited
US5142145A
Cited
US5117110A
Cited
US4992659A
Cited
US4999494A
Cited
US5296704A
Cited
US5206702A
Cited
US5003815A
Cited
US5025658A
Cited
US5189906A
Cited
US4954704A
Cited
US5237859A
Cited
US5224376A
Cited
US5202004A
Cited
US4992728A
Cited
US5067805A
Cited
US5289004A
Cited
US5066858A
Cited
US5253516A
Cited
US5103095A
Cited
US5198715A
Cited
US5245863A
Cited
US5077473A
Cited
US5081390A
Cited
US5231286A
Cited
US5274230A
Cited
US5266897A
Cited
US5107114A
Cited
US5144833A
Cited
US5166516A
Cited
US5168159A
Cited
US5141319A
Cited
US5283437A
Cited
US5107113A
Cited
US5157251A
Cited
US5260567A
Cited
US5293042A
Cited
US5247186A
Cited
US5258107A
Cited
US5155361A
Cited
US5276324A
Cited
US5317153A
Cited
US5196713A
Cited
US5323003A
Cited
US5210410A
Cited
US5298975A
Cited
US5286977A
Cited
US5283442A
Cited
US5204531A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-14 | 1999-02-13 | 1999-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-14 | 2003-02-13 | 2003-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-14 | 2007-02-13 | 2007-08-15 | $7700.00 | Window Closed / Lapsed |