US5405659A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for removing material from a target by use of a ring-shaped elliptical laser beam and depositing the material onto a substrate
Assignee: University of Puerto Rico System
•
Filing: 1993-03-05
•
Granted: 1995-04-11
•
Expires: 2013-03-05
Abstract
Abstract Method and apparatus for depositing a thin layer of a target material onto a substrate by illuminating the target material with at least one ring-shaped elliptical laser beam so that a ring-shaped deposition plume is emitted from the target material, and positioning the substrate to receive the emitted material. Concentric, ring-shaped elliptical laser beams are formed by use of a multi-faceted negative axicon.
Inventors
- 👤 Felix E. Fernandez
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 15:02
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
86 words
A method of depositing a layer of a target material on a deposition substrate which comprises the steps of: (a) illuminating the target material with at least one ring-shaped elliptical laser beam so that a ring-shaped elliptical illumination pattern is formed on the target material and so that a deposition plume is emitted from the pattern so formed on the target material; and (b) positioning a deposition substrate relative to the target material so that the deposition substrate receives target material emitted from the deposition plume.
Claim 2
Independent Claim
86 words
A method of depositing a layer of a target material on a deposition substrate which comprises the steps of: (a) illuminating the target material with at least one ring-shaped elliptical laser beam so that a ring-shaped elliptical illumination pattern is formed on the target material and so that a deposition plume is emitted from the pattern so formed on the target material; and (b) positioning a deposition substrate relative to the target material so that the deposition substrate receives target material emitted from the deposition plume.
Claim 3
Dependent Claim
64 words
A method according to claim 1, which further comprises the step of passing a laser beam through a first lens, the lens comprising a first substantially flat surface and a second surface opposite the first surface comprising a concave conic section having a cone angle relative to the first surface, to form the at least one elliptical laser beam prior to said illuminating step.
Claim 4
Dependent Claim
54 words
A method according to claim 2, wherein the first lens further comprises at least one concentric ring, said at least one concentric ring being angled relative to said first surface, and said at least one concentric ring having a steeper pitch relative to said first surface than the cone angle of said conic section.
Claim 5
Dependent Claim
73 words
A method according to claim 2, wherein said at least one concentric ring comprises a plurality of concentric rings, each of said plurality of concentric rings having an inner diameter and being angled relative to said first surface, and each of said plurality of concentric rings having a steeper pitch relative to said first surface than the cone angle of the conic section and the pitch of any rings within its inner diameter.
Claim 6
Dependent Claim
20 words
A method according to claim 1, wherein in said illuminating step, the elliptical laser beam is one circular laser beam.
Claim 7
Dependent Claim
31 words
A method according to claim 1, wherein said illuminating step further comprises the step of altering the ellipsicity of the at least one elliptical laser beam prior to the illuminating step.
Claim 8
Dependent Claim
17 words
A method according to claim 1, which further comprises rotating the target material during said illuminating step.
Claim 9
Dependent Claim
26 words
A method according to claim 2, which further comprises focusing the at least one elliptical laser beam on the target material prior to the illuminating step.
Claim 10
Dependent Claim
21 words
A method according to claim 1, wherein said illuminating step comprises illuminating the target material with a plurality of elliptical beams.
Claim 11
Dependent Claim
20 words
A method according to claim 9, wherein each of the plurality of elliptical beams has substantially equal linear power density.
Claim 12
Independent Claim
80 words
An apparatus for depositing a target material on a deposition substrate comprising: (a) means for producing a laser beam; (b) a beam-separating lens comprising: (i) a first substantially flat surface; and (ii) a second concave surface opposite said first surface comprising a conic section having a cone angle relative to said first surface; and (c) means for focusing a laser beam on the target material; wherein said beam-separating lens is positioned between said laser beam-producing means and said focusing means.
Claim 13
Independent Claim
80 words
An apparatus for depositing a target material on a deposition substrate comprising: (a) means for producing a laser beam; (b) a beam-separating lens comprising: (i) a first substantially flat surface; and (ii) a second concave surface opposite said first surface comprising a conic section having a cone angle relative to said first surface; and (c) means for focusing a laser beam on the target material; wherein said beam-separating lens is positioned between said laser beam-producing means and said focusing means.
Claim 14
Dependent Claim
41 words
An apparatus according to claim 11, wherein said beam-separating lens further comprises at least one concentric ring angled relative to said first surface and having a steeper pitch relative to said first surface than the cone angle of said conic section.
Claim 15
Dependent Claim
61 words
An apparatus according to claim 11, wherein said at least one concentric ring comprises a plurality of concentric rings, each of which has an inner diameter, and each of which is angled relative to said first surface at a steeper pitch than the core angle of said conic section and any of said plurality of concentric rings within its inner diameter.
Claim 16
Dependent Claim
14 words
An apparatus according to claim 11, wherein said focusing means comprises a positive lens.
Claim 17
Dependent Claim
44 words
An apparatus according to claim 14, which further comprises means for securing the target material, said target securing means being positioned so that the distance between said positive lens and the target material is substantially equal to the focal length of said positive lens.
Claim 18
Dependent Claim
28 words
An apparatus according to claim 11, wherein said means for producing a laser beam comprises means for producing a beam having radially symmetric intensity about its laser axis.
Claim 19
Dependent Claim
34 words
An apparatus according to claim 11, further comprising a lens for altering the ellipsicity of a laser beam positioned so that said beam-separating lens is between said laser beam-producing means and said ellipsicity-altering lens.
Claim 20
Dependent Claim
14 words
An apparatus according to claim 17, wherein said ellipsicity-altering lens is a cylindrical lens.
Claim 21
Dependent Claim
14 words
An apparatus according to claim 17, wherein said focusing means is a spheroidal-cylindrical lens.
Claim 22
Dependent Claim
14 words
An apparatus according to claim 15, further comprising means for supporting the deposition substrate.
Claim 23
Dependent Claim
53 words
An apparatus according to claim 20, wherein said means for supporting the deposition substrate is positioned between said focusing means and said target substrate securing means, and wherein said means for providing a laser beam is positioned so that the path of the laser beam produced thereby is normal to the target substrate.
Claim 24
Dependent Claim
42 words
An apparatus according to claim 14, wherein said positive lens is positioned so that its longitudinal axis is tilted relative to said flat surface of said beam separating lens so that a substantially circular illumination pattern is produced at the target material.
References Cited (Backward Citations)
US4151008A
Cited
US4059461A
Cited
US4271347A
Cited
US4309225A
Cited
US4281030A
Cited
US4308078A
Cited
US4701592A
Cited
US4615904A
Cited
US4466179A
Cited
DD219508A1
Cited
US4592975A
Cited
US4606932A
Cited
US4543270A
Cited
US4719183A
Cited
US4786358A
Cited
US4964967A
Cited
US4970196A
Cited
US4892751A
Cited
US4837044A
Cited
US4987007A
Cited
JPH01319673A
Cited
US5084300A
Cited
US5049405A
Cited
DD296381A5
Cited
US5264412A
Cited
US5191591A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-10 | 1998-10-10 | 1999-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-10 | 2002-10-10 | 2003-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-10 | 2006-10-10 | 2007-04-11 | $7700.00 | Window Closed / Lapsed |