US5049405A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of thin film deposition using laser ablation
Assignee: Teledyne Scientific and Imaging LLC
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Filing: 1990-06-29
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Granted: 1991-09-17
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Expires: 2010-06-29
Abstract
Abstract A rotating cylindrical target surface is provided for the laser ablation process of depositing thin films on a substrate. The target is mounted in a vacuum chamber so that it may be rotated about the longitudinal axis of the cylindrical surface target and simultaneously translated along the longitudinal axis. A laser beam is focused by a cylindrical lens onto the target surface along a line that is at an angle with respect to the longitudinal axis to spread the plume of ablated material over a greater radial arc. The plume may be spread in the longitudinal direction by providing a concave or convex lateral target surface. The angle of incidence of the focused laser beam may be other than normal to the target surface to provide a more glancing geometry. Simultaneous roation about and translation along the longitudinal axis produce a smooth and even ablation of the entire cylindrical target surface and a steady evaporation plume. Maintaining a smooth target surface is useful in reducing undesirable splashing of particulates during the laser ablation process and thereby depositing high quality thin films.
Inventors
- 👤 Jeffrey T. Cheung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:50
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
149 words
A method of laser ablation for depositing a thin film of material on a substrate, comprising the steps of: providing a target of deposition material, said target having a curved ablative surface rotatable about an axis of rotation, said curved ablative surface surrounding said axis of rotation and forming a generally circular line when taken in cross section perpendicular to said axis to rotation; rotating said curved ablative surface about said axis of rotation; focusing a laser beam on said rotating ablative surface along a line of incidence at an angle with respect to said axis of rotation such that said line of incidence and said axis do not form a plane; producing a plume of laser ablated material by action of said laser beam line on said rotating curved ablative surface; and positioning the substrate to receive said ablated material as a thin film deposit on the substrate.
Claim 2
Independent Claim
149 words
A method of laser ablation for depositing a thin film of material on a substrate, comprising the steps of: providing a target of deposition material, said target having a curved ablative surface rotatable about an axis of rotation, said curved ablative surface surrounding said axis of rotation and forming a generally circular line when taken in cross section perpendicular to said axis to rotation; rotating said curved ablative surface about said axis of rotation; focusing a laser beam on said rotating ablative surface along a line of incidence at an angle with respect to said axis of rotation such that said line of incidence and said axis do not form a plane; producing a plume of laser ablated material by action of said laser beam line on said rotating curved ablative surface; and positioning the substrate to receive said ablated material as a thin film deposit on the substrate.
Claim 3
Dependent Claim
26 words
The method of claim 1, further comprising the step of translating said target along said axis of rotation during laser ablation of said curved ablative surface.
Claim 4
Dependent Claim
29 words
The method of claim 2, wherein the step of providing a target comprises providing an elongated cylindrical target of material having a curved cylindrical side comprising said ablative surface.
Claim 5
Independent Claim
119 words
A method of thin film deposition using laser ablation, comprising the steps of: providing a target having an axis of rotation and a curved ablative surface of deposition material extending around said axis, a cross section of said ablative surface forming a generally circular line when taken perpendicular to said axis of rotation; rotating said ablative surface about said axis of rotation; focusing a laser beam on said rotating ablative surface along a line of incidence such that said line of incidence and said axis of rotation are not coplanar; producing a broad plume of laser ablated material; positioning a substrate within said plume of ablated material; and depositing said ablated material in a thin film on said substrate.
Claim 6
Independent Claim
119 words
A method of thin film deposition using laser ablation, comprising the steps of: providing a target having an axis of rotation and a curved ablative surface of deposition material extending around said axis, a cross section of said ablative surface forming a generally circular line when taken perpendicular to said axis of rotation; rotating said ablative surface about said axis of rotation; focusing a laser beam on said rotating ablative surface along a line of incidence such that said line of incidence and said axis of rotation are not coplanar; producing a broad plume of laser ablated material; positioning a substrate within said plume of ablated material; and depositing said ablated material in a thin film on said substrate.
Claim 7
Dependent Claim
27 words
The method of claim 4, wherein the step of providing a target comprises providing an elongated generally cylindrical target having a lateral ablative surface of deposition material.
Claim 8
Dependent Claim
32 words
The method of claim 5, wherein the step of providing a generally cylindrical target comprises providing a target having a concave lateral ablative surface for producing said broad plume of ablated material.
Claim 9
Dependent Claim
27 words
The method of claim 6, further comprising the step of translating said target along said axis of rotation during laser ablation of said concave lateral ablative surface.
Claim 10
Independent Claim
129 words
A method of thin film deposition using laser ablation, comprising the steps of: providing an elongated generally cylindrical target having a longitudinal axis of rotation and a curved elongated lateral ablative surface of deposition material surrounding and rotatable about said axis; rotating said curved lateral ablative surface about said axis of rotation; focusing a laser beam on said rotating ablative surface along a line at an angle of incidence such that said line and said axis of rotation do not define a plane; translating said rotating curved ablative surface along said axis of rotation; producing a broad plume of laser ablated material from said curved ablative surface; positioning a substrate within said plume of ablated material; and depositing said ablated material in a uniform thin film on said substrate.
Claim 11
Independent Claim
129 words
A method of thin film deposition using laser ablation, comprising the steps of: providing an elongated generally cylindrical target having a longitudinal axis of rotation and a curved elongated lateral ablative surface of deposition material surrounding and rotatable about said axis; rotating said curved lateral ablative surface about said axis of rotation; focusing a laser beam on said rotating ablative surface along a line at an angle of incidence such that said line and said axis of rotation do not define a plane; translating said rotating curved ablative surface along said axis of rotation; producing a broad plume of laser ablated material from said curved ablative surface; positioning a substrate within said plume of ablated material; and depositing said ablated material in a uniform thin film on said substrate.
Claim 12
Dependent Claim
33 words
The method of claim 8, wherein the step of providing a generally cylindrical target comprises providing a target having a concave lateral ablative surface for producing said broad plume of laser ablated material.
Claim 13
Dependent Claim
33 words
The method of claim 8, wherein the step of providing a generally cylindrical target comprises providing a target having a convex lateral ablative surface for producing said broad plume of laser ablated material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-16 | 1995-03-18 | 1995-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-16 | 1999-03-18 | 1999-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-16 | 2003-03-18 | 2003-09-17 | $7700.00 | Window Closed / Lapsed |