US5264412A
Expired / Lapsed
US
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Laser ablation method for forming oxide superconducting thin films using a homogenized laser beam
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1991-08-12
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Granted: 1993-11-23
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Expires: 2011-08-12
Abstract
Abstract A method is provided for forming a thin film of an oxide superconductor on a substrate by laser ablation. Energy distribution in the section of a laser beam is homogenized within 10%. The homogenized laser beam is applied onto a target. A thin high-quality film of material ablated from the target is thus formed on a substrate which is arranged to face the target.
Inventors
- 👤 Nobuhiro Ota
- 👤 Tatsuoki Nagaishi
- 👤 Naoji Fujimori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:56
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
60 words
In a method of forming a smooth-surfaced film of an oxide superconductor material on a substrate by applying laser beam to cause ablation of a target made of the oxide superconductor material for deposition of ablated target material on the substrate, the improvement comprising the step of: homogenizing an energy distribution in a section of said laser beam within 10%.
Claim 2
Dependent Claim
60 words
In a method of forming a smooth-surfaced film of an oxide superconductor material on a substrate by applying laser beam to cause ablation of a target made of the oxide superconductor material for deposition of ablated target material on the substrate, the improvement comprising the step of: homogenizing an energy distribution in a section of said laser beam within 10%.
Claim 3
Dependent Claim
34 words
A method of forming a smooth-surfaced film in accordance with claim 1, wherein: said homogenizing step comprises passing the laser beam through a biprism element before applying the homogenized laser beam to the target.
Claim 4
Dependent Claim
38 words
A method of forming a smooth-surfaced film in accordance with claim 1, comprising the further step of: rotating said target while applying said homogenized laser beam so that said target is entirely irradiated with said homogenized laser beam.
Claim 5
Dependent Claim
35 words
A method of forming a smooth surfaced film in accordance with claim 3, wherein: said homogenizing step comprises passing the laser beam through a biprism element before applying the homogenized laser beam to the target.
Claim 6
Dependent Claim
34 words
A method of forming a smooth-surfaced film in accordance with claim 2, wherein: said homogenized laser beam is applied to said target at a position which is displaced from a center of the target.
Claim 7
Dependent Claim
34 words
A method of forming a smooth-surfaced film in accordance with claim 5 wherein: rotating said target while applying said homogenized laser beam so that said target is entirely irradiated with said homogenized laser beam.
References Cited (Backward Citations)
GB2220502A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-22 | 1997-05-24 | 1997-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-22 | 2001-05-24 | 2001-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-22 | 2005-05-24 | 2005-11-23 | $7700.00 | Window Closed / Lapsed |