US4786358A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming a pattern of a film on a substrate with a laser beam
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1987-08-07
•
Granted: 1988-11-22
•
Expires: 2007-08-07
Abstract
Abstract An improved method for forming a pattern on a substrate coated with a film is shown. The substrate is irradiated with a laser beam which is shaped through a mask, and a portion of the film is removed by the energy of the laser beam to produce the desired pattern. The laser beam is emitted from an exmer laser.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Akira Mase
- 👤 Hiroyuki Sakayori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 20:15
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/066; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439; G03; G03F; G03F7/00; G03F7/20; G03F7/2002; G03F7/2004; G03F7/2006; H05; H05K; H05K3/00; H05K3/02; H05K3/027; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
67 words
A method for forming a pattern of a film provided on a substrate, said method comprising the steps of: generating a laser beam from an eximer laser; expanding said laser beam by an expander; contracting said expanded laser beam through a convex lense; shaping said contracted laser beam through a mask; and irradiating said film with said shaped laser beam to remove selected portion of said film.
Claim 2
Independent Claim
67 words
A method for forming a pattern of a film provided on a substrate, said method comprising the steps of: generating a laser beam from an eximer laser; expanding said laser beam by an expander; contracting said expanded laser beam through a convex lense; shaping said contracted laser beam through a mask; and irradiating said film with said shaped laser beam to remove selected portion of said film.
Claim 3
Dependent Claim
15 words
A method of claim 1 further comprising a step of cleaning the pattern thus formed.
Claim 4
Dependent Claim
12 words
A method of claim 2 wherein said cleaning step is ultrasonic cleaning.
Claim 5
Dependent Claim
17 words
A method of claim 3 wherein said ultrasonic cleaning is carried out with an alcohol or aceton.
Claim 6
Dependent Claim
27 words
The method of claim 1 wherein said mask is formed with a slit through which said contracted laser beam is shaped to have a linear cross section.
Claim 7
Dependent Claim
34 words
The method of claim 5 wherein said irradiating step is carried out repeatedly while the irradiating portion of substrate is shifted with reference to the laser beam in the direction perpendicular to the slit.
Claim 8
Dependent Claim
12 words
The method of claim 6 wherein said slit has a wide end.
Claim 9
Dependent Claim
42 words
The method of claim 1 wherein the pattern of said mask is formed to remove the portion of said contracted laser beam except for an elongated narrow portion and a wide end portion connected with the distal end of said narrow portion.
Claim 10
Dependent Claim
62 words
The method of claim 8 wherein said irradiating step is carried out repeatedly while the irradiating portion of substrate is shifted in the direction perpendicular to the elengated direction of said narrow portion by an shifting amount which is less than that corresponding to the width of said wide end but larger than that corresponding to the width of said narrow portion.
Claim 11
Dependent Claim
30 words
The method of claim 1 wherein said mask is patterned in accordance with a lead pattern for connection with an IC chip which is to be mounted on said substrate.
Claim 12
Dependent Claim
18 words
The method of claim 1 wherein said mask comprises a transparent board and a shading pattern formed thereon.
Claim 13
Dependent Claim
13 words
The method of claim 11 wherein said board is made of artificial quartz.
Claim 14
Dependent Claim
13 words
The method of claim 1 wherein said substrate is mounted on a base.
Claim 15
Dependent Claim
16 words
The method of claim 13 wherein said base comprises a X table and a Y table.
Claim 16
Independent Claim
75 words
A method for forming a pattern of a film provided on a substrate, said method comprising the steps of: generating a laser beam from an eximer laser; expanding said laser beam by an expander; shaping said contracted laser beam through a mask; contracting said expanded laser beam through a convex lense; shaping said contracted laser beam through a mask; and irradiating said film with said shaped laser beam to remove selected portion of said film.
Claim 17
Independent Claim
75 words
A method for forming a pattern of a film provided on a substrate, said method comprising the steps of: generating a laser beam from an eximer laser; expanding said laser beam by an expander; shaping said contracted laser beam through a mask; contracting said expanded laser beam through a convex lense; shaping said contracted laser beam through a mask; and irradiating said film with said shaped laser beam to remove selected portion of said film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-11-22 | 1992-05-23 | 1992-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-22 | 1996-05-23 | 1996-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-22 | 2000-05-23 | 2000-11-22 | $7700.00 | Window Closed / Lapsed |