US5084300A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for the ablation of material from a target and coating method and apparatus
Assignee: Forschungszentrum Jülich
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Filing: 1990-05-02
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Granted: 1992-01-28
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Expires: 2010-05-02
Abstract
Abstract A rotating cylindrical target has material ablated therefrom by a laser beam trained to contact the surface along a line parallel to the rotation axis, thereby avoiding problems of crater formation which arise with disc-shaped targets.
Inventors
- 👤 Willi Zander
- 👤 Bernd Stritzker
- 👤 Joachim Frohlingsdorf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 23:24
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/087; C23C14/22; C23C14/24; C23C14/28; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732; Y10S505/786
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
186 words
An apparatus for ablating material of a composition capable of forming a oxide ceramic superconductor from a target and depositing said material in the same composition on a substrate, comprising: a rotatable holder defining an axis of rotation; means forming a cylindrical target surface centered on and surrounding said axis and mounted on said holder for rotation around said axis; means for rotating said holder and said target around said axis; means for positioning a substrate below said cylindrical target surface; a laser training a beam of laser radiation against a lower portion of said surface below said axis during rotation thereof to ablate target material from said surface; means for axially shifting said surface during ablation of target material therefrom by said laser beam; and cylindrical lens means elongated parallel to said axis for focusing said laser beam into an incident line at said surface parallel to said axis, said line lying below a line connecting a center of said cylindrical lens means with said axis, the coating being effected under conditions in which a plasma is formed from said material in an oxygen atmosphere.
Claim 2
Independent Claim
186 words
An apparatus for ablating material of a composition capable of forming a oxide ceramic superconductor from a target and depositing said material in the same composition on a substrate, comprising: a rotatable holder defining an axis of rotation; means forming a cylindrical target surface centered on and surrounding said axis and mounted on said holder for rotation around said axis; means for rotating said holder and said target around said axis; means for positioning a substrate below said cylindrical target surface; a laser training a beam of laser radiation against a lower portion of said surface below said axis during rotation thereof to ablate target material from said surface; means for axially shifting said surface during ablation of target material therefrom by said laser beam; and cylindrical lens means elongated parallel to said axis for focusing said laser beam into an incident line at said surface parallel to said axis, said line lying below a line connecting a center of said cylindrical lens means with said axis, the coating being effected under conditions in which a plasma is formed from said material in an oxygen atmosphere.
Claim 3
Independent Claim
156 words
A method of coating a substrate with a oxide ceramic superconductor target material of a certain composition which comprises the steps of: rotating a target having a cylindrical surface of said composition about an axis of said surface; training a laser beam against a lower portion of said surface below said axis in an incident line shape parallel to said axis to ablate material from said surface by a cylindrical lens means elongated parallel to said axis for focusing said laser beam into said incident line shape at a location on said surface lying below a line connecting a center of said cylindrical lens with said axis; and positioning a substrate below said surface in a region of said line at a location in a path of reflection from said surface of said beam under conditions in which a plasma is formed from said material in an oxygen atmosphere, thereby coating said substrate with said material.
Claim 4
Independent Claim
156 words
A method of coating a substrate with a oxide ceramic superconductor target material of a certain composition which comprises the steps of: rotating a target having a cylindrical surface of said composition about an axis of said surface; training a laser beam against a lower portion of said surface below said axis in an incident line shape parallel to said axis to ablate material from said surface by a cylindrical lens means elongated parallel to said axis for focusing said laser beam into said incident line shape at a location on said surface lying below a line connecting a center of said cylindrical lens with said axis; and positioning a substrate below said surface in a region of said line at a location in a path of reflection from said surface of said beam under conditions in which a plasma is formed from said material in an oxygen atmosphere, thereby coating said substrate with said material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-27 | 1995-07-29 | 1996-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-27 | 1999-07-29 | 2000-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-27 | 2003-07-29 | 2004-01-28 | $7700.00 | Window Closed / Lapsed |