US5362671A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating single crystal silicon arrayed devices for display panels
Assignee: Kopin Corp
•
Filing: 1994-04-08
•
Granted: 1994-11-08
•
Expires: 2014-04-08
Abstract
Abstract A display panel is formed using essentially single crystal thin-film material that is transferred to substrates for display fabrication. Pixel arrays form light valves or switches that can be fabricated with control electronics in the thin-film material prior to transfer. The resulting circuit panel is than incorporated into a display panel with a light emitting or liquid crystal material to provide the desired display.
Inventors
- 👤 Paul M. Zavracky
- 👤 John C. C. Fan
- 👤 Robert McClelland
- 👤 Jeffrey Jacobsen
- 👤 Brenda Dingle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 23:17
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/01; H10D86/021; H10D86/0214; A; A61; A61B; A61B3/00; A61B3/10; A61B3/113; G; G02; G02B; G02B27/00; G02B27/0093; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/136277; G09; G09G; G09G3/00; G09G3/20; G09G3/22; G09G3/30; G09G3/34; G09G3/36; H04; H04N; H04N5/00; H04N5/74; H04N5/7416; H04N5/7441; H04N9/00; H04N9/12; H04N9/31; H04N9/3141; H05; H05B; H05B33/00; H05B33/12; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0321; H10D30/0323; H10D30/60; H10D30/67; H10D30/6729; H10D30/673; H10D30/6733; H10D30/6734; H10D30/6758; H10D86/0221; H10D86/0223; H10D86/40; H10D86/60; H10H; H10H29/00; H10H29/10; H10H29/14; H10H29/142; G02B27/01; G02B2027/0192; G02B2027/0198; G09G2300/00; G09G2300/02; G09G2300/023; G09G2300/08; G09G2300/0809; G09G2300/0842; G09G2320/00; G09G2320/02; G09G2320/0233; G09G2320/04; G09G2320/041; G09G2320/043; G09G2340/00; G09G2340/04; G09G2340/0464; G09G2370/00; G09G2370/04; G09G2370/042; G09G3/3607; G09G3/3611; G09G3/3614; G09G3/3648; H04N5/66; H04N5/70; H04N5/7475; H04N5/7491; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/743; H10P72/7432; Y; Y10; Y10S; Y10S148/00; Y10S148/15
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
113 words
A method of fabricating a panel display comprising: forming an essentially single crystal silicon semiconductor material on an insulating layer on a first substrate; forming an array of transistors with the essentially single crystal silicon semiconductor material to form a circuit panel; bonding the essentially single crystal silicon semiconductor material having the formed array of transistors and the insulating layer onto an optically transmissive substrate with an adhesive; removing the first substrate from the circuit panel with the insulating layer; and positioning a light transmitting material adjacent the circuit panel such that an electric field generated by a pixel electrode conductively connected to each transistor alters a light transmitting property of the material.
Claim 2
Independent Claim
113 words
A method of fabricating a panel display comprising: forming an essentially single crystal silicon semiconductor material on an insulating layer on a first substrate; forming an array of transistors with the essentially single crystal silicon semiconductor material to form a circuit panel; bonding the essentially single crystal silicon semiconductor material having the formed array of transistors and the insulating layer onto an optically transmissive substrate with an adhesive; removing the first substrate from the circuit panel with the insulating layer; and positioning a light transmitting material adjacent the circuit panel such that an electric field generated by a pixel electrode conductively connected to each transistor alters a light transmitting property of the material.
Claim 3
Dependent Claim
44 words
The method of claim 1 wherein the step of forming an essentially single crystal semiconductor material comprises: forming a non-single crystal silicon semiconductor material on the supporting substrate; and crystallizing the non-single crystal silicon semiconductor material to the essentially single crystal silicon semiconductor material.
Claim 4
Dependent Claim
32 words
The method of claim 1 further comprising forming a drive circuit in or on the essentially single crystal silicon semiconductor material such that each transistor is electrically connected to the drive circuit.
Claim 5
Dependent Claim
30 words
The method of claim 1 wherein the transferring step further comprises forming a pixel electrode adjacent to each transistor such that the pixel electrode is electrically connected to the transistor.
Claim 6
Dependent Claim
25 words
The method of claim 1 wherein the transferring step further comprises cleaving a support for the single crystal silicon semiconductor material from the supporting substrate.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein the transferring step further comprises chemically etching the supporting substrate to release the essentially single crystal silicon semiconductor material.
Claim 8
Dependent Claim
20 words
The method of claim 1 wherein the transferring step further comprises bonding the circuit panel to the optically transmissive substrate.
Claim 9
Dependent Claim
14 words
The method of claim 7 wherein the light transmitting material comprises a liquid crystal.
Claim 10
Dependent Claim
12 words
The method of claim 1 wherein the optically transmissive substrate comprises glass.
Claim 11
Independent Claim
119 words
A method of fabricating a panel display comprising: forming a non-single crystal silicon film on a supporting insulating layer; crystallizing the non-single crystal silicon film to form an essentially single crystal silicon film; forming an array of transistors with the essentially single crystal silicon film to form a circuit panel; transferring the essentially single crystal silicon film having the formed array of transistors onto an optically transmissive substrate by bonding the circuit panel and insulating layer to the optically transmissive substrate; and positioning a light transmitting material adjacent the circuit panel such that an electric field generated by a pixel electrode conductively connected to a transistor in the array of transistors alters a light transmitting property of the material.
Claim 12
Independent Claim
119 words
A method of fabricating a panel display comprising: forming a non-single crystal silicon film on a supporting insulating layer; crystallizing the non-single crystal silicon film to form an essentially single crystal silicon film; forming an array of transistors with the essentially single crystal silicon film to form a circuit panel; transferring the essentially single crystal silicon film having the formed array of transistors onto an optically transmissive substrate by bonding the circuit panel and insulating layer to the optically transmissive substrate; and positioning a light transmitting material adjacent the circuit panel such that an electric field generated by a pixel electrode conductively connected to a transistor in the array of transistors alters a light transmitting property of the material.
Claim 13
Dependent Claim
20 words
The method of claim 10 wherein the crystallizing step comprises scanning the non-single crystal silicon film with a heat source.
Claim 14
Dependent Claim
31 words
The method of claim 10 further comprising forming a drive circuit in or on the essentially single crystal silicon film such that each transistor is electrically connected to the drive circuit.
Claim 15
Dependent Claim
27 words
The method of claim 11 wherein the crystallizing step is followed by the step of forming the array of transistors in the essentially single crystal silicon film.
Claim 16
Dependent Claim
36 words
The method of claim 10 wherein the step of forming an array of transistors further comprises forming a pixel electrode adjacent to each transistor such that the pixel electrode is electrically connected to the adjacent transistor.
Claim 17
Dependent Claim
25 words
The method of claim 10 wherein the transferring step further comprises cleaving a support for the essentially single crystal silicon film from the supporting substrate.
Claim 18
Dependent Claim
24 words
The method of claim 10 wherein the transferring step further comprises chemically etching the supporting substrate to release the essentially single crystal silicon film.
Claim 19
Dependent Claim
22 words
The method of claim 10 wherein the bonding step comprises bonding the circuit panel to the optically transmissive substrate with an adhesive.
Claim 20
Dependent Claim
14 words
The method of claim 17 wherein the light transmitting material comprises a liquid crystal.
Claim 21
Dependent Claim
12 words
The method of claim 10 wherein the optically transmissive substrate comprises glass.
Claim 22
Independent Claim
134 words
A method of fabricating a panel display comprising: forming a silicon material over an insulating layer and a supporting substrate; forming an array of transistors with the silicon material to form an active matrix display circuit; bonding the silicon material having the formed array of transistors onto an optically transmissive substrate with an adhesive, the optically transmissive substrate being positioned on a first side of the display circuit; removing the supporting substrate from a second side of the display circuit; and positioning a light transmitting material over an array of pixel electrodes conductively connected to the active matrix display circuit, the light transmitting material being positioned on the second side of the active matrix display circuit such that an electric field generated by each pixel electrode alters a light transmitting property of the material.
Claim 23
Independent Claim
134 words
A method of fabricating a panel display comprising: forming a silicon material over an insulating layer and a supporting substrate; forming an array of transistors with the silicon material to form an active matrix display circuit; bonding the silicon material having the formed array of transistors onto an optically transmissive substrate with an adhesive, the optically transmissive substrate being positioned on a first side of the display circuit; removing the supporting substrate from a second side of the display circuit; and positioning a light transmitting material over an array of pixel electrodes conductively connected to the active matrix display circuit, the light transmitting material being positioned on the second side of the active matrix display circuit such that an electric field generated by each pixel electrode alters a light transmitting property of the material.
Claim 24
Dependent Claim
18 words
The method of claim 20 wherein the silicon forming step further comprises forming a single crystal silicon film.
Claim 25
Dependent Claim
23 words
The method of claim 20 wherein the removing step further comprises chemically etching the supporting substrate to release the active matrix display circuit.
Claim 26
Dependent Claim
18 words
The method of claim 20 wherein the bonding step comprises bonding the circuit with an optically transmissive adhesive.
Claim 27
Dependent Claim
15 words
The method of claim 20 wherein the light transmitting material comprises a liquid crystal material.
Claim 28
Dependent Claim
11 words
The method of claim 20 wherein the pixel electrodes comprise silicon.
References Cited (Backward Citations)
US3955190A
Cited
US4024626A
Cited
US4321747A
Cited
US4266223A
Cited
US4727047A
Cited
US4409724A
Cited
JPS57106181A
Cited
US4644338A
Cited
US4654117A
Cited
US4770498A
Cited
US4740782A
Cited
US4653862A
Cited
US4597636A
Cited
US4655551A
Cited
EP0151508A2
Cited
US4808983A
Cited
US4660935A
Cited
US4655552A
Cited
US4662719A
Cited
US4838657A
Cited
US4878086A
Cited
US4814830A
Cited
US4653858A
Cited
US4810637A
Cited
US4870475A
Cited
US4935792A
Cited
US4807974A
Cited
US4917468A
Cited
US4772943A
Cited
US4870486A
Cited
US4862153A
Cited
US4774205A
Cited
US4782340A
Cited
JPS6355529A
Cited
US4838654A
Cited
US4819038A
Cited
US5013138A
Cited
US4980308A
Cited
US5099345A
Cited
US4952031A
Cited
JPS6438727A
Cited
US4961629A
Cited
US5075674A
Cited
US4930874A
Cited
US5053765A
Cited
US5020881A
Cited
US5073772A
Cited
US5087113A
Cited
US4846931A
Cited
US4883561A
Cited
US5054887A
Cited
US5117298A
Cited
US5076666A
Cited
US5076543A
Cited
US4917465A
Cited
US5115232A
Cited
US5069534A
Cited
JPH03142418A
Cited
US5056895A
Cited
US5256562A
Cited
US5258325A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-07 | 1998-05-09 | 1998-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-07 | 2002-05-09 | 2002-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-07 | 2006-05-09 | 2006-11-08 | $7700.00 | Window Closed / Lapsed |