Abstract A flat panel display device, such as a liquid crystal panel display device, of large size and a method and apparatus of manufacture of the same. The display device may be provided by discrete or divided display sections. For the manufacture of the panel display device, a pattern for forming picture elements and a drive circuit therefor is photolithographically transferred onto the whole surface of a substrate or base plate in a step-and-repeat manner. In one aspect of the invention, different masks having patterns corresponding to portions of the first-mentioned pattern are used. After the pattern of one of the masks is transferred onto one portion of the substrate, the one mask is replaced by another which the substrate is moved stepwise so that the pattern of the other mask can be transferred onto another portion of the substrate. By repeating the pattern transfer, with different masks, and repeating the stepwise movement of the substrate, the whole of the first-mentioned pattern is transferred onto the whole surface of the substrate with a high resolving power.
A method of exposure usable with an optical projection system, for manufacture of a flat panel display device, comprising the steps of: providing first and second masks having different mask patterns, including a display element forming pattern; placing a workpiece having a surface on a movable stage; moving the movable stage so that two-dimensionally arrayed different portions of the workpiece surface are placed, in sequence, at an exposure station at which the portion of the workpiece surface placed thereat can be patterningly exposed by projection by the optical projection system; and handling the first and second masks and selecting a pattern to be projected by the optical projection system upon the portion of the workpiece surface placed at the exposure station, wherein the moving of the movable stage is so interrelated to the handling of the first and second masks and the selection of the pattern to be projected that under the influence of the optical projection system plural display element forming patterns are printed two-dimensionally on a first region of the workpiece surface while plural driving element forming patterns are printed on a second region of the workpiece surface outside of the first region.
Claim 2
Independent Claim
195 words
A method of exposure usable with an optical projection system, for manufacture of a flat panel display device, comprising the steps of: providing first and second masks having different mask patterns, including a display element forming pattern; placing a workpiece having a surface on a movable stage; moving the movable stage so that two-dimensionally arrayed different portions of the workpiece surface are placed, in sequence, at an exposure station at which the portion of the workpiece surface placed thereat can be patterningly exposed by projection by the optical projection system; and handling the first and second masks and selecting a pattern to be projected by the optical projection system upon the portion of the workpiece surface placed at the exposure station, wherein the moving of the movable stage is so interrelated to the handling of the first and second masks and the selection of the pattern to be projected that under the influence of the optical projection system plural display element forming patterns are printed two-dimensionally on a first region of the workpiece surface while plural driving element forming patterns are printed on a second region of the workpiece surface outside of the first region.