Abstract A device for exchanging masks used in the photolithographic treatment of semiconductor devices comprises a rotatable disk (1), on which supporting places for a number of masks (5,6) are present, which disk can be arranged by rotation in a position in which one of the mask supporting places is in a position desired for photolithographic treatment, said position can be determined by means of a detector (19), which, after a position-servo-system has been switched into circuit, supplies a detector signal to this system and thus controls the adjustment of the disk. For rotation of the disk (1), two electromagnetic movement systems (7,13; 8,14) are present each comprising a magnet and a coil, wherein either the pair of magnets or the pair of coils is fixedly arranged and the other pair is provided on the turntable and is rotatable therewith, a current connection for the coils being present to supply a constant current to the coils.
A device for exchanging masks used in the photolithographic treatment of semiconductor devices, in which device supporting places for a number of masks are present on a rotatable disk, the disk bringing one of the mask supporting places in a position desired for photolithographic treatment, which position can be determined by means of a detector, which, after a position-servo-system has been switched into circuit, supplies a detector signal to this system and thus controls the adjustment of the disk, characterized in that for rotation of the disk two electromagnetic movement systems are present each comprising a magnet and a coil, wherein either the pair of magnets or the pair of coils is fixedly arranged and the other pair is provided on the turntable and is rotatable therewith, a current connection is present for the coils and means is provided for supplying a constant current to the coils.
Claim 2
Independent Claim
147 words
A device for exchanging masks used in the photolithographic treatment of semiconductor devices, in which device supporting places for a number of masks are present on a rotatable disk, the disk bringing one of the mask supporting places in a position desired for photolithographic treatment, which position can be determined by means of a detector, which, after a position-servo-system has been switched into circuit, supplies a detector signal to this system and thus controls the adjustment of the disk, characterized in that for rotation of the disk two electromagnetic movement systems are present each comprising a magnet and a coil, wherein either the pair of magnets or the pair of coils is fixedly arranged and the other pair is provided on the turntable and is rotatable therewith, a current connection is present for the coils and means is provided for supplying a constant current to the coils.
Claim 3
Dependent Claim
20 words
A device as claimed in claim 1, characterized in that the electromagnetic movement systems are constructed as immersion coil magnets.
Claim 4
Dependent Claim
52 words
A device as claimed in claim 1 or 2, characterized in that both coils are mounted on a support and their windings are connected in series in a manner such that upon connection to a current source a force is produced which attempts to move a coil away from its associated magnet.