Self-aligned silicide process

Claim 2

A self-aligned silicide process to form different thicknesses of silicide over source/drain junction regions and gate regions, comprising the steps of: a. forming a thin nitride layer on said source/drain regions; b. depositing a layer of refractory metal over said thin nitride layer and said gate regions; and c. annealing said layer of refractory metal to form a first silicide layer of a first thickness over said gate regions and a second silicide layer over said source/drain regions having a second thickness, wherein said first thickness is greater than said second thickness.

Claim 3

A self-aligned silicide process comprising the steps of: a. forming a gate dielectric on the surface of a semiconductor body; b. forming a polysilicon layer on the surface of said gate dielectric; c. forming a dielectric capping layer on said polysilicon layer; d. etching said dielectric capping layer and said polysilicon layer to form a polysilicon gate having sidewall edges; e. forming silicon nitride sidewall spacers on said sidewall edges; f. forming source/drain junctions in said surface of said semiconductor body adjacent said silicon nitride sidewall spacers; g. removing a first portion of said gate dielectric, said first portion located over said source/drain junctions; h. forming a thin nitride layer over said source/drain junctions; i. removing said dielectric capping layer; and j. forming a first silicide layer over said polysilicon layer and a second silicide layer over said source/drain regions, wherein said first silicide layer is thicker than said second silicide layer.

Claim 4

A self-aligned silicide process comprising the steps of: a. forming a gate dielectric on the surface of a semiconductor body; b. forming a polysilicon layer on the surface of said gate dielectric; c. forming a dielectric capping layer on said polysilicon layer; d. etching said dielectric capping layer and said polysilicon layer to form a polysilicon gate having sidewall edges; e. forming silicon nitride sidewall spacers on said sidewall edges; f. forming source/drain junctions in said surface of said semiconductor body adjacent said silicon nitride sidewall spacers; g. removing a first portion of said gate dielectric, said first portion located over said source/drain junctions; h. forming a thin nitride layer over said source/drain junctions; i. removing said dielectric capping layer; and j. forming a first silicide layer over said polysilicon layer and a second silicide layer over said source/drain regions, wherein said first silicide layer is thicker than said second silicide layer.

Claim 5

The process of claim 2, wherein said step of forming said first and second silicide layer comprises the steps of: a. depositing a first layer of refractory metal over said thin nitride layer, said nitride sidewall spacers and said polysilicon gate; b. annealing said first layer of refractory metal in a nitrogen-containing atmosphere to form said first layer of silicide over said polysilicon gate, said second layer of silicide over said source/drain regions, and a first layer of refractory metal-nitride over said second layer of silicide and said nitride sidewall spacers, wherein said first silicide layer is thicker than said second silicide layer; and c. removing said first layer of refractory metal-nitride.

Claim 6

The method of claim 3, wherein said first layer of refractory metal comprises titanium.

Claim 7

The method of claim 2, wherein said first and second silicide layers are formed in a single silicidation reaction step.

Claim 8

The method of claim 2, wherein said step of forming said dielectric capping layer comprises the step of depositing a LPCVD oxide layer having a thickness in the range of 200 to 500 Å.

Claim 9

The method of claim 2, further comprising the step of forming lightly doped drains prior to said step of forming said silicon nitride sidewall spacers.

Claim 10

The method of claim 2, wherein said step of forming said thin nitride layer comprises the step of rapid thermal nitridation in an ammonia atmosphere at 700°-1000° C. for 15-200 seconds.

Claim 11

The method of claim 2, wherein said thin nitride layer has a thickness in the range of 5-20 Å.

Claim 12

The method of claim 2, further comprising the steps of: a. forming an interlevel dielectric layer over said semiconductor body after said step of forming said first and second silicide layers; b. etching a portion of said interlevel dielectric layer over said source/drain junctions; c. forming silicide contacts over said source/drain junctions, respectively; and d. forming a plurality of interconnect lines to connect to said silicide contact.

Claim 13

The method of claim 10, wherein said step of forming said silicide contacts comprises: a. depositing a second layer of refractory metal over said interlevel dielectric layer and said source/drain junctions; and b. annealing said second layer of refractory metal in a nitrogen-containing atmosphere to form a third layer of silicide over said source/drain junctions and a second layer of titanium-nitride over said interlevel dielectric layer.

Claim 14

A self-aligned silicide process comprising the steps of: a. growing a silicon dioxide layer on the surface of a semiconductor body; b. depositing a polysilicon layer on the surface of said first dielectric layer; c. depositing a LPCVD oxide layer having a thickness in the range of 200 to 500 Å over said polysilicon layer; d. etching said LPCVD oxide layer and said polysilicon layer to form a polysilicon gate having sidewall edges; e. forming lightly doped drains in said surface of said semiconductor body adjacent said polysilicon gate; f. forming silicon nitride sidewall spacers on said sidewall edges; g. forming source/drain junction regions in said surface of said semiconductor body adjacent said silicon nitride sidewall spacers; h. selectively etching a first portion of said silicon dioxide layer, said first portion located over said source/drain junction regions; i. thermally growing a thin nitride layer having a thickness in the range 5-20 Å over said source/drain junction regions; j. removing said LPCVD oxide layer; k. depositing a first layer of refractory metal over said thin nitride layer, said silicon nitride sidewall spacers and said polysilicon gate; l. annealing said first layer of refractory metal in a nitrogen-containing atmosphere to form a first layer of silicide over said polysilicon gate, a second layer of silicide over said source/drain regions, and a first layer of refractory metal-nitride over said second layer of silicide and said silicon nitride sidewall spacers, wherein said first silicide layer is thicker than said second silicide layer; m. removing said first layer of refractory metal-nitride.

Claim 15

A self-aligned silicide process comprising the steps of: a. growing a silicon dioxide layer on the surface of a semiconductor body; b. depositing a polysilicon layer on the surface of said first dielectric layer; c. depositing a LPCVD oxide layer having a thickness in the range of 200 to 500 Å over said polysilicon layer; d. etching said LPCVD oxide layer and said polysilicon layer to form a polysilicon gate having sidewall edges; e. forming lightly doped drains in said surface of said semiconductor body adjacent said polysilicon gate; f. forming silicon nitride sidewall spacers on said sidewall edges; g. forming source/drain junction regions in said surface of said semiconductor body adjacent said silicon nitride sidewall spacers; h. selectively etching a first portion of said silicon dioxide layer, said first portion located over said source/drain junction regions; i. thermally growing a thin nitride layer having a thickness in the range 5-20 Å over said source/drain junction regions; j. removing said LPCVD oxide layer; k. depositing a first layer of refractory metal over said thin nitride layer, said silicon nitride sidewall spacers and said polysilicon gate; l. annealing said first layer of refractory metal in a nitrogen-containing atmosphere to form a first layer of silicide over said polysilicon gate, a second layer of silicide over said source/drain regions, and a first layer of refractory metal-nitride over said second layer of silicide and said silicon nitride sidewall spacers, wherein said first silicide layer is thicker than said second silicide layer; m. removing said first layer of refractory metal-nitride.

Claim 16

The method of claim 12, wherein said first layer of refractory metal comprises titanium.

Claim 17

The method of claim 12, wherein said step of forming said thin nitride layer comprises the step of rapid thermal nitridation in an ammonia atmosphere at 700°-1000° C. for 15-200 seconds.

Claim 18

The method of claim 12, further comprising the steps of: a. forming an interlevel dielectric layer over said semiconductor body after said step of forming said first and second silicide layers; b. etching a portion of said interlevel dielectric layer over said source/drain junction regions; c. forming silicide contacts over said source/drain junction regions, respectively; and d. forming a plurality of interconnect lines to connect to said silicide contacts.