US5320907A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Crystal article and method for forming same
Assignee: Canon Inc
•
Filing: 1991-05-20
•
Granted: 1994-06-14
•
Expires: 2011-05-20
Abstract
Abstract A crystal article comprises a substrate, a plurality of single crystals provided on said substrate with adjacent single crystals contacting each other and a void generation preventive body filling the portion surrounded by said plurality of single crystals.
Inventors
- 👤 Nobuhiko Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:10
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; C; C30; C30B; C30B19/00; C30B19/12; C30B25/00; C30B25/02; C30B25/18; H10P14/24; H10P14/27; H10P14/271; H10P14/274; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/3414; H10P14/3418; H10P14/3421
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
68 words
A crystal article comprising a substrate having a nucleation and a non-nucleation surface, a plurality of single crystal contacting each other and a void generation preventive body filling the portions surrounded by said plurality of single crystals, wherein the surface of said void generation preventive body is a non-nucleation surface having a nucleation density which is at most 10 -2 times the nucleation density of the nucleation surface.
Claim 2
Dependent Claim
68 words
A crystal article comprising a substrate having a nucleation and a non-nucleation surface, a plurality of single crystal contacting each other and a void generation preventive body filling the portions surrounded by said plurality of single crystals, wherein the surface of said void generation preventive body is a non-nucleation surface having a nucleation density which is at most 10 -2 times the nucleation density of the nucleation surface.
Claim 3
Dependent Claim
18 words
A crystal article according to claim 1, wherein said single crystal is formed by the selective growth method.
Claim 4
Dependent Claim
17 words
A crystal article according to claim 1, wherein said void generation preventive body is an insulating material.
Claim 5
Dependent Claim
32 words
A crystal article according to claim 1 wherein said void generation preventive body comprises an insulative material selected from the group consisting of silicon oxide, silicon nitride, tin oxide and indium oxide.
Claim 6
Dependent Claim
16 words
A crystal article according to claim 1, wherein said void generation preventive body is silicon oxide.
Claim 7
Dependent Claim
23 words
A crystal article according to claim 1, wherein the shape of said void generation preventive body is substantially square as observed from above.
Claim 8
Dependent Claim
19 words
A crystal article according to claim 1, wherein said void generation preventive body is formed by the CVD method.
Claim 9
Dependent Claim
32 words
A crystal article according to claim 1, wherein said void generation preventive body has a surface substantially vertical toward the growth origination point of the adjacent single crystals as observed from above.
References Cited (Backward Citations)
US3617822A
Cited
USRE33096E
Cited
US4637127A
Cited
US4412868A
Cited
US4557794A
Cited
EP0284433A2
Cited
US4758531A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-13 | 1997-12-13 | 1998-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-13 | 2001-12-13 | 2002-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-13 | 2005-12-13 | 2006-06-14 | $7700.00 | Window Closed / Lapsed |