EP0284433A2
Expired / Lapsed
EP
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Crystal articles and method for forming the same
Assignee: Canon Inc
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Filing: 1988-03-25
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Granted: —
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Expires: 2008-03-25
Abstract
Abstract A crystal article comprises; a substrate (1) having i) a nonnucleation surface (2) (S NDS ) having a small nucleation density, ii) at least one single-nucleation surface (S NDL -S) (3A,B) provided adjacent to said nonnucleation surface (S NDS ) (2), having an area small enough for a crystal to grow from only a single nucleus and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ), and iii) at least one multiple-nucleation surface (S NDL -M) having an area large enough for crystals to grow from plural nuclei and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ); at least one monocrystal (4,5) grown from said single nucleus and extending over said single-nucleation surface (S NDL -S) to cover part of said nonnucleation surface (S NDS ); and a polycrystalline film grown from said plural nuclei to cover said multiple-nucleation surface.
Inventors
- 👤 Yoshiyuki Osada
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 01:47
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/18; H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/27; H10P14/271; H10P14/274; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2921; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
163 words
A crystal article comprising; a substrate having i) a nonnucleation surface (S NDS ) having a small nucleation density, ii) at least one single-nucleation surface (S NDL -S) provided adjacent to said nonnucleation surface (S NDS ), having an area small enough for a crystal to grow from only a single nucleus and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ), and iii) at least one multiple-nucleation surface (S NDL -M) having an area large enough for crystals to grow from plural nuclei and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ); at least one monocrystal grown from said single nucleus and extending over said small nucleation surface (S NDL -S) to cover part of said nonnucleation surface (S NDS ); and a polycrystalline film grown from said plural nuclei to cover said multiple-nucleation surface.
Claim 2
Dependent Claim
163 words
A crystal article comprising; a substrate having i) a nonnucleation surface (S NDS ) having a small nucleation density, ii) at least one single-nucleation surface (S NDL -S) provided adjacent to said nonnucleation surface (S NDS ), having an area small enough for a crystal to grow from only a single nucleus and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ), and iii) at least one multiple-nucleation surface (S NDL -M) having an area large enough for crystals to grow from plural nuclei and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ); at least one monocrystal grown from said single nucleus and extending over said small nucleation surface (S NDL -S) to cover part of said nonnucleation surface (S NDS ); and a polycrystalline film grown from said plural nuclei to cover said multiple-nucleation surface.
Claim 3
Dependent Claim
17 words
The crystal article of Claim 1, wherein said nonnucleation surface (S NDS ) comprises an amorphous material.
Claim 4
Dependent Claim
17 words
The crystal article of Claim 1, wherein said single-nucleation surface (S NDL -S) comprises an amorphous material.
Claim 5
Dependent Claim
17 words
The crystal article of Claim 1, wherein said multiple-nucleation surface (S NDL -M) comprises an amorphous material.
Claim 6
Dependent Claim
24 words
The crystal article of Claim 1, wherein said single-nucleation surface (S NDL -S) comprises the same material as said multiple-uncleation surface (S NDL -M).
Claim 7
Dependent Claim
44 words
The crystal article of any one of Claims 1 to 5, wherein said single-nucleation surface (S NDL -S) is provided in plurality to have a desired distance, and said monocrystals come in contact at substantially the center between said single-nucleation surfaces through grain boundaries.
Claim 8
Dependent Claim
42 words
The crystal article of any one of Claims 1 to 5, wherein said single-nucleation surface (S NDL -S) and said multiple-nucleation surface (S NDL -M) are provided to have a desired distance, and said monocrystal comes in contact with said polycrystalline film.
Claim 9
Dependent Claim
29 words
The crystal article of any one of Claims 1 to 7, wherein said multiple-nucleation surface (S NDL -M) is provided in plurality at desired positions and in desired shapes.
Claim 10
Independent Claim
164 words
A method of forming a crystal article, comprising; effecting crystal growth on a substrate having i) a nonnucleation surface (S NDS ) having a small nucleation density, ii) at least one small nucleation surface (S NDL -S) having an area small-enough for a crystal to grow from only a single nucleus and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ), and iii) at least one multiple-nucleation surface (S NDL -M) having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ) and having an area large enough for crystals to grow from plural nuclei; and thereby forming a single nucleus on said single-nucleation surface (S NDL -S) to further allow a monocrystal to grow from said single nucleus so as to cover part of said nonnucleation surface; while forming a polycrystalline film on said multiple-nucleation surface (S NDL -M).
Claim 11
Independent Claim
164 words
A method of forming a crystal article, comprising; effecting crystal growth on a substrate having i) a nonnucleation surface (S NDS ) having a small nucleation density, ii) at least one small nucleation surface (S NDL -S) having an area small-enough for a crystal to grow from only a single nucleus and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ), and iii) at least one multiple-nucleation surface (S NDL -M) having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ) and having an area large enough for crystals to grow from plural nuclei; and thereby forming a single nucleus on said single-nucleation surface (S NDL -S) to further allow a monocrystal to grow from said single nucleus so as to cover part of said nonnucleation surface; while forming a polycrystalline film on said multiple-nucleation surface (S NDL -M).
Claim 12
Dependent Claim
56 words
The method of forming a crystal article of Claim 9, wherein said single-nucleation surface (S NDL -S) and multiple-nucleation surface (S NDL -M) are simultaneously formed by depositing a material having a nucleation density substantially larger than the material constituting said nonnucleation surface (S NDS ) on said nonnucleation surface, followed by patterning according to lithography.
Claim 13
Dependent Claim
51 words
The method of forming a crystal article of Claim 9, wherein said single-nucleation surface (S NDL -S) and multiple-nucleation surface (S NDL -M) are formed by ion implantation of a material having a nucleation density substantially larger than the material constituting said nonnucleation surface (S NDS ) to said nonnucleation surface.
Claim 14
Independent Claim
43 words
The method of forming a crystal article of any one of Claims 9 to 11, wherein the position and size of said monocrystal are controlled by the relative positional relationship between said single-nucleation surface (S NDL -S) and multiple-nucleation surface (S NDL -M).
References Cited (Backward Citations)
No citation records indexed.
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