US4758531A
Expired / Lapsed
US
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Method of making defect free silicon islands using SEG
Assignee: International Business Machines Corp
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Filing: 1987-10-23
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Granted: 1988-07-19
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Expires: 2007-10-23
Abstract
Abstract A method for forming epitaxial grown silicon structure having substantially defect free outer surfaces and resulting structure is provided. A silicon substrate is provided, on which an epitaxial silicon crystal is grown. The outer surface layer of the silicon epitaxially grown silicon crystal will contain defective material which is removed by oxidation of the outer layer to silicon dioxide. This removes the defect containing outer layer, creating a new outer layer which is substantially defect free.
Inventors
- 👤 Klaus D. Beyer
- 👤 Louis L. Hsu
- 👤 Dominic J. Schepis
- 👤 Victor J. Silvestri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:59
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/018; H10W10/10; Y; Y10; Y10S; Y10S148/00; Y10S148/026; Y10S148/029; Y10S148/097
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
92 words
A method of forming epitaxial monocrystalline silicon within a region isolated by insulating side walls, comprising the steps of: (a) providing a silicon substrate material having a region bounded at least in part by insulated side walls, (b) growing an epitaxial crystal of silicon within said region on said substrate, said epitaxial crystal being characterized by a defective surface layer at the interface of the epitaxial crystal and the insulated side walls, and (c) replacing at least a portion of said defective surface layer of said epitaxial crystal with an insulating material.
Claim 2
Independent Claim
92 words
A method of forming epitaxial monocrystalline silicon within a region isolated by insulating side walls, comprising the steps of: (a) providing a silicon substrate material having a region bounded at least in part by insulated side walls, (b) growing an epitaxial crystal of silicon within said region on said substrate, said epitaxial crystal being characterized by a defective surface layer at the interface of the epitaxial crystal and the insulated side walls, and (c) replacing at least a portion of said defective surface layer of said epitaxial crystal with an insulating material.
Claim 3
Dependent Claim
28 words
The invention as defined in claim 1, wherein said portion of said surface layer is replaced by oxidizing said portion with said surface layer to form silicon dioxide.
Claim 4
Dependent Claim
51 words
The invention as defined in claim 2, wherein said insulated side walls include at least two discrete coatings, and wherein the outer coating is selectively removed prior to oxidizing said portion of said surface layer and said oxidized silicon substantially fills the void left by the removal of said outer layer.
Claim 5
Dependent Claim
34 words
The invention as defined in claim 3, wherein the thickness of the outer coating is selected to be at least as thick as the surface layer of the epitaxial grown silicon crystal having defects.
Claim 6
Dependent Claim
14 words
The invention as defined in claim 3, wherein the outer coating is silicon nitride.
Claim 7
Dependent Claim
15 words
The invention as defined in claim 5, wherein the silicon nitride is removed by etching.
Claim 8
Dependent Claim
38 words
The invention as defined in claim 1, wherein said portion of said defective surface layer is removed leaving a void at the space occupied by said defective surface layer and additional insulating material is deposited in said void.
Claim 9
Dependent Claim
90 words
The invention as defined in claim 7, wherein the epitaxial silicon extends within a trench formed in said silicon substrate to a height at least as high as a face of said substrate, and wherein said insulated side walls surround said epitaxial silicon within said trench, further characterized by removing the defective surface layer of said epitaxial silicon in the region adjacent the face of said substrate to form a shallow trench and depositing said additional insulating material in the shallow trench where said defective surface layer has been removed.
Claim 10
Dependent Claim
29 words
The invention as defined in claim 8, wherein at least a portion of the insulation of said side wall is also removed and replaced with said additional insulating material.
Claim 11
Dependent Claim
33 words
The invention as defined in claim 9, wherein a portion of the silicon substrate surrounding the insulated side wall at the face thereof is also removed and replaced with said additional insulating material.
Claim 12
Dependent Claim
20 words
The invention as defined in claim 7, wherein said portion of said surface layer is removed by reactive ion etching.
Claim 13
Dependent Claim
34 words
The invention as defined in claim 1, wherein said insulated side walls are comprised of an insulating material deposited on the planar face of a silicon substrate, and having openings therein to said substrate.
Claim 14
Independent Claim
93 words
A method of forming in a substrate a substantially defect-free epitaxial grown silicon crystal isolated by dielectric side walls, comprising: providing a semiconductor substrate having at least one deep trench having substantially vertical surfaces, said surfaces being covered with a composite dielectric layer of oxide over which a nitride layer is disposed; filling said trench with a silicon crystal by selective epitaxial growth on the substrate surfaces; selectively removing said nitride thereby forming a gap between said oxide and said crystal; and thermally oxidizing said crystal to completely fill said gap with oxide.
Claim 15
Independent Claim
93 words
A method of forming in a substrate a substantially defect-free epitaxial grown silicon crystal isolated by dielectric side walls, comprising: providing a semiconductor substrate having at least one deep trench having substantially vertical surfaces, said surfaces being covered with a composite dielectric layer of oxide over which a nitride layer is disposed; filling said trench with a silicon crystal by selective epitaxial growth on the substrate surfaces; selectively removing said nitride thereby forming a gap between said oxide and said crystal; and thermally oxidizing said crystal to completely fill said gap with oxide.
Claim 16
Independent Claim
87 words
A method for forming in a substrate a substantially defect-free portion of an epitaxially grown silicon crystal isolated by insulator sidewalls, comprising: providing a semiconductor substrate having at least one deep trench having substantially vertical walls coated with an insulator liner; filling said trench with a silicon crystal by selective epitaxial growth on the substrate surface; forming shallow trenches over each of said walls and including the removal of a portion of the outer layer of the silicon crystal; and filling said shallow trenches with a dielectric.
Claim 17
Independent Claim
87 words
A method for forming in a substrate a substantially defect-free portion of an epitaxially grown silicon crystal isolated by insulator sidewalls, comprising: providing a semiconductor substrate having at least one deep trench having substantially vertical walls coated with an insulator liner; filling said trench with a silicon crystal by selective epitaxial growth on the substrate surface; forming shallow trenches over each of said walls and including the removal of a portion of the outer layer of the silicon crystal; and filling said shallow trenches with a dielectric.
Claim 18
Independent Claim
92 words
A method of forming epitaxial monocrystalline semiconductor within a region isolated by insulating side walls, comprising the steps of: (a) providing a semiconductor substrate material having a region bounded at least in part by insulated side walls, (b) growing an epitaxial crystal of semiconductor within said region on said substrate, said epitaxial crystal being characterized by a defective surface layer at the interface of the epitaxial crystal and the insulated side walls, and (c) replacing at least a portion of said defective surface layer of said epitaxial crystal with an insulating material.
Claim 19
Independent Claim
92 words
A method of forming epitaxial monocrystalline semiconductor within a region isolated by insulating side walls, comprising the steps of: (a) providing a semiconductor substrate material having a region bounded at least in part by insulated side walls, (b) growing an epitaxial crystal of semiconductor within said region on said substrate, said epitaxial crystal being characterized by a defective surface layer at the interface of the epitaxial crystal and the insulated side walls, and (c) replacing at least a portion of said defective surface layer of said epitaxial crystal with an insulating material.
Claim 20
Dependent Claim
38 words
The invention as defined in claim 15, wherein said portion of said defective surface layer is removed leaving a void at the space occupied by said defective surface layer and additional insulating material is deposited in said void.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-19 | 1992-01-18 | 1992-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-19 | 1996-01-18 | 1996-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-19 | 2000-01-18 | 2000-07-19 | $7700.00 | Window Closed / Lapsed |