Hermetically packaged HDI electronic system

Claim 2

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface, and at least one electronic component disposed on said component-supporting surface, said component having contact pads thereon; a seal ring disposed on said component-supporting surface encircling said at least one electronic component; a set of inner contact points on said component-supporting surface located inside said seal ring, and a corresponding set of outer contact points on said component-supporting surface located outside said seal ring; a set of electrical conductors at least in part buried in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections between at least some of said components contact pads and said inner contact points, comprising a multilayer interconnect structure including interleaved layers of dielectric material and conductive material disposed over portions of said substrate, over said at least one electronic component and over said inner set of contact points; and a package lid attached to said seal ring and enclosing said at least one electronic component and said electrical connections.

Claim 3

The packaged electronic system in accordance with claim 1, wherein said ceramic substrate and said set of electrical conductors buried at least in part in said ceramic substrate comprise a cofired body.

Claim 4

The packaged electronic system in accordance with claim 1, wherein said component-supporting surface includes at least one cavity, said electronic component being disposed in said cavity such that a major surface of said electronic component is substantially coplanar with a portion of said component-supporting surface surrounding said cavity.

Claim 5

The packaged electronic system in accordance with claim 1 and further including a lead frame, at least some of said outer contact points being connected to corresponding individual leads of said lead frame.

Claim 6

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface, and at least one electronic component disposed on said component-supporting surface, said component having contact pads thereon; a seal ring disposed on said component-supporting surface encircling said at least one electronic component; a set of inner contact points on said component-supporting surface located inside said seal ring, and a corresponding set of outer contact points on said component-supporting surface located outside said seal ring; a set of electrical conductors at least in part buried in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections between at least some of said component contact pads and said inner contact points; a package lid attached to said seal ring and enclosing said at least one electronic component and said electrical connections; and an electrical feedthrough extending from said seal ring through said ceramic substrate to an opposite surface thereof, whereby said seal ring and said package lid may be grounded through said electrical feedthrough.

Claim 7

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface, and at least one electronic component disposed on said component-supporting surface, said component having contact pads thereon; a seal ring disposed on said component-supporting surface encircling said at least one electronic component; a set of inner contact points on said component-supporting surface located inside said seal ring, and a corresponding set of outer contact points on said component-supporting surface located outside said seal ring; a set of electrical conductors at least in part buried in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections between at least some of said component contact pads and said inner contact points; a package lid attached to said seal ring and enclosing said at least one electronic component and said electrical connections; and an electrical feedthrough extending from said seal ring through said ceramic substrate to an opposite surface thereof, whereby said seal ring and said package lid may be grounded through said electrical feedthrough.

Claim 8

The packaged electronic system in accordance with claim 5, wherein said ceramic substrate, said set of electrical conductors buried at least in part in said ceramic substrate and said electrical feedthrough comprise a cofired body.

Claim 9

A packaged electronic system in accordance with claim 5, wherein said ceramic substrate and said set of electrical conductors at least in part buried in said ceramic substrate comprise a cofired body.

Claim 10

A packaged electronic system in accordance with claim 5, wherein said outer contact points are adapted for connection to individual leads of a lead frame.

Claim 11

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface which includes at least one cavity, and a plurality of electronic components, each of said components having contact pads thereon, disposed within said at least one cavity on said component-supporting surface such that major surfaces of said components are substantially coplanar with portions of said component-supporting surface surrounding said at least one cavity; a seal ring disposed on said component-supporting surface encircling said at least one electronic component; a set of inner contact points on said component-supporting surface located inside said seal ring, and a corresponding set of outer contact points on said component-supporting surface located outside said seal ring; a set of electrical conductors at least in part buried in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections between at least some of said component contact pads and said inner contact points; and a package lid attached to said seal ring and enclosing said at least one electronic component and said electrical connections.

Claim 12

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface which includes at least one cavity, and a plurality of electronic components, each of said components having contact pads thereon, disposed within said at least one cavity on said component-supporting surface such that major surfaces of said components are substantially coplanar with portions of said component-supporting surface surrounding said at least one cavity; a seal ring disposed on said component-supporting surface encircling said at least one electronic component; a set of inner contact points on said component-supporting surface located inside said seal ring, and a corresponding set of outer contact points on said component-supporting surface located outside said seal ring; a set of electrical conductors at least in part buried in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections between at least some of said component contact pads and said inner contact points; and a package lid attached to said seal ring and enclosing said at least one electronic component and said electrical connections.

Claim 13

The packaged electronic system in accordance with claim 9, wherein said electrical connections extending between at least some of said component contact pads and at least some of said inner contact points, respectively, comprise a multilayer interconnect structure including interleaved layers of dielectric material and conductive material, said multilayer interconnect structure being disposed over said portion of said component-supporting surface surrounding said cavity, over said electronic components and over said inner set of contact points.

Claim 14

A packaged electronic system in accordance with claim 9, wherein said ceramic substrate and said set of electrical conductors at least in part buried in said ceramic substrate comprise a cofired body.

Claim 15

A packaged electronic system in accordance with claim 9, wherein said outer contact points are adapted for connection to individual leads of a lead frame.

Claim 16

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface including at least one cavity, and at least one electronic component, having contact pads thereon, and disposed within said at least one cavity such that a major surface of said at least one electronic component is substantially coplanar with portions of said component-supporting surface surrounding said at least one cavity; a solder seal ring on said portions of said component-supporting surface surrounding said at least one cavity; a set of inner contact points on said component-supporting surface located inside said seal ring, and a corresponding set of outer contact points on said component-supporting surface located outside said seal ring; a set of electrical conductors at least in part buried in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections between at least some of said component contact pads and said inner contact points; and a package lid attached to said seal ring and enclosing said at least one electronic component and said electrical connections.

Claim 17

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface including at least one cavity, and at least one electronic component, having contact pads thereon, and disposed within said at least one cavity such that a major surface of said at least one electronic component is substantially coplanar with portions of said component-supporting surface surrounding said at least one cavity; a solder seal ring on said portions of said component-supporting surface surrounding said at least one cavity; a set of inner contact points on said component-supporting surface located inside said seal ring, and a corresponding set of outer contact points on said component-supporting surface located outside said seal ring; a set of electrical conductors at least in part buried in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections between at least some of said component contact pads and said inner contact points; and a package lid attached to said seal ring and enclosing said at least one electronic component and said electrical connections.

Claim 18

A packaged electronic system in accordance with claim 13, wherein said ceramic substrate and said set of electrical conductors at least in part buried in said ceramic substrate comprise a cofired body.

Claim 19

A packaged electronic system in accordance with claim 13, wherein said outer contact points are adapted for connection to individual leads of a lead frame.

Claim 20

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface including at least one cavity; at least one electronic component having contact pads therein and disposed in said cavity such that a major surface of said electronic component is substantially coplanar with a portion of said component-supporting surface surrounding said cavity; said component-supporting surface including a peripheral ledge having a ledge surface recessed with respect to said portion of said component-supporting surface surrounding said cavity; a seal ring comprising a weldable ring disposed on said ledge surface encircling said at least one electronic component, said weldable ring having a thickness such that a major surface thereof is substantially coplanar with said portion of said component-supporting surface surrounding said cavity; a set of inner contact points on said component-supporting surface and a corresponding set of outer contact points on said component-supporting surface, said inner contact points being encircled by said seal ring and said outer contact points being situated outside said seal ring; a set of electrical conductors buried at least in part in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections extending between at least some of said component contact pads and at least some of said inner contact points, respectively; and package lid attached to said seal ring and enclosing said electronic component and said electrical connections.

Claim 21

A packaged electronic system comprising: a ceramic substrate having a component-supporting surface including at least one cavity; at least one electronic component having contact pads therein and disposed in said cavity such that a major surface of said electronic component is substantially coplanar with a portion of said component-supporting surface surrounding said cavity; said component-supporting surface including a peripheral ledge having a ledge surface recessed with respect to said portion of said component-supporting surface surrounding said cavity; a seal ring comprising a weldable ring disposed on said ledge surface encircling said at least one electronic component, said weldable ring having a thickness such that a major surface thereof is substantially coplanar with said portion of said component-supporting surface surrounding said cavity; a set of inner contact points on said component-supporting surface and a corresponding set of outer contact points on said component-supporting surface, said inner contact points being encircled by said seal ring and said outer contact points being situated outside said seal ring; a set of electrical conductors buried at least in part in said ceramic substrate and extending between said inner and outer sets of contact points; electrical connections extending between at least some of said component contact pads and at least some of said inner contact points, respectively; and package lid attached to said seal ring and enclosing said electronic component and said electrical connections.

Claim 22

A hermetically packaged electronic system comprising: a package base comprising a nonconductive substrate having a component-supporting surface; a plurality of electronic components disposed on said components-supporting surface; a seal ring disposed on said component-supporting surface encircling said electronic components; a set of inner contact points on said component-supporting surface and a corresponding set of outer contact points on said component-supporting surface, said inner contact points being encircled by said seal ring and said outer contact points being situated outside said seal ring; a set of electrical conductors buried at least in part in said substrate and extending between said inner and outer sets of contact points; a multilayer interconnect structure including interleaved layers of dielectric material and conductive material, said multilayer interconnect structure being disposed over said components, over portions of said substrate, and over said inner set of contact points; and a package lid hermetically attached to said seal ring and enclosing said electronic components and said multilayer interconnect structure.

Claim 23

A hermetically packaged electronic system comprising: a package base comprising a nonconductive substrate having a component-supporting surface; a plurality of electronic components disposed on said components-supporting surface; a seal ring disposed on said component-supporting surface encircling said electronic components; a set of inner contact points on said component-supporting surface and a corresponding set of outer contact points on said component-supporting surface, said inner contact points being encircled by said seal ring and said outer contact points being situated outside said seal ring; a set of electrical conductors buried at least in part in said substrate and extending between said inner and outer sets of contact points; a multilayer interconnect structure including interleaved layers of dielectric material and conductive material, said multilayer interconnect structure being disposed over said components, over portions of said substrate, and over said inner set of contact points; and a package lid hermetically attached to said seal ring and enclosing said electronic components and said multilayer interconnect structure.

Claim 24

The hermetically packaged electronic system in accordance with claim 17 and further comprising an electrical feedthrough extending from said seal ring through said substrate to a surface opposite said component-supporting surface, said feedthrough allowing said seal ring and said package lid to be grounded therethrough.

Claim 25

The hermetically packaged electronic system in accordance with claim 17 and further including a lead frame, at least some of said outer contact points being connected to corresponding individual leads of said lead frame.

Claim 26

The hermetically packaged electronic system in accordance with claim 17, wherein said component-supporting surface includes at least one cavity, said electronic components being disposed in said cavity such that major surfaces of said electronic components are substantially coplanar with a portion of said component-supporting surface surrounding said cavity; and wherein said seal ring comprises a solder seal ring on said portion of said component-supporting surface surrounding said cavity.

Claim 27

The hermetically packaged electronic system in accordance with claim 17, wherein said component-supporting surface includes at least one cavity, said electronic components being disposed in said cavity such that major surfaces of said electronic components are substantially coplanar with a portion of said component-supporting surface surrounding said cavity and said component-supporting surface further includes a peripheral ledge having a ledge surface recessed with respect to said portion of said component-supporting surface surrounding said cavity; and wherein said seal ring comprises a weldable ring disposed on said ledge surface, said weldable ring having a thickness such that a major surface thereof is substantially coplanar with said portion of said component-supporting surface surrounding said cavity.