Patent US5264296A successfully refreshed from Google Patents.
US5264296A
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Laser depositon of crystalline boron nitride films
Assignee: Motors Liquidation Co
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Filing: 1990-05-16
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Granted: 1993-11-23
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Expires: 2010-05-16
Abstract
Abstract Thin films of boron nitride are grown on single crystal silicon substrates using laser deposition techniques. The films are characterized by essentially a single crystal throughout and having a cubic structure which is in epitaxial registry with the underlying silicon substrate.
Inventors
- 👤 Gary L. Doll
- 👤 Jeffrey A. Sell
- 👤 Charles A. Peck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:07
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6329; C; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/40; C30B29/403; H10P14/6349; H10P14/68; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
49 words
A thin film of boron nitride wherein a thin film of boron nitride is deposited onto a silicon substrate oriented essentially along its crystallographic plane and wherein said thin film of boron nitride is characterized by essentially a cubic single crystal structure and crystallographically oriented with said silicon substrate.
Claim 2
Dependent Claim
49 words
A thin film of boron nitride wherein a thin film of boron nitride is deposited onto a silicon substrate oriented essentially along its crystallographic plane and wherein said thin film of boron nitride is characterized by essentially a cubic single crystal structure and crystallographically oriented with said silicon substrate.
Claim 3
Dependent Claim
30 words
A thin film of boron nitride as recited in claim 1 wherein the lattice constant of said cubic single crystal boron nitride film ranges between about 3.6 and 3.8 Angstroms.
Claim 4
Dependent Claim
27 words
A thin film of boron nitride as recited in claim 1 wherein the lattice constant of said cubic single crystal boron nitride film is approximately 3.8 Angstroms.
References Cited (Backward Citations)
US4118539A
Cited
US4297387A
Cited
US4565741A
Cited
JPS6184379A
Cited
JPS61222111A
Cited
US4714625A
Cited
JPS6277454A
Cited
JPS62243770A
Cited
US4973494A
Cited
US4843031A
Cited
US4980730A
Cited
US4832986A
Cited
US4957773A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-22 | 1997-05-24 | 1997-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-22 | 2001-05-24 | 2001-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-22 | 2005-05-24 | 2005-11-23 | $7700.00 | Window Closed / Lapsed |